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111. 发明授权

US08349163B2 Perpendicular magnetic recording medium, method of manufacturing the same, and magnetic read/write apparatus 失效
标题翻译：垂直磁记录介质，其制造方法以及磁读/写装置
公开(公告)号：US08349163B2
公开(公告)日：2013-01-08
申请号：US12961388
申请日：2010-12-06
申请人： Satoshi Shirotori , Akira Watanabe , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Satoshi Shirotori , Akira Watanabe , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： B29D17/00 , C25D1/00 , C25D1/10 , G11B3/00
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , C25D1/003 , C25D1/10 , G03F7/0002 , G11B5/746 , G11B5/865
摘要： According to one embodiment, an electroforming master comprises a patterns of protrusions and recesses formed on one major surface of an Si substrate having two major surfaces, corresponding to information for positioning of a read/write head (a preamble, address, and burst), recording tracks or recording bits. Impurity ions are doped in the surface of this patterns of protrusions and recesses. The impurity ion concentration distribution in the film thickness direction of the Si substrate has a peak in a portion from the patterns of protrusions and recesses surface to a depth of 40 nm in the film thickness direction. The impurity concentration of this peak is 1×1020 to 2×1021 ions/cm3.
摘要翻译：根据一个实施例，电铸母版包括形成在具有两个主表面的Si衬底的一个主表面上的突起和凹槽的图案，其对应于用于定位读/写头（前导码，地址和突发）的信息，记录轨道或记录位。杂质离子掺杂在这种突起和凹陷图案的表面。 Si衬底的膜厚方向上的杂质离子浓度分布在从薄膜厚度方向的突起和凹陷表面的图案到深度为40nm的部分中具有峰值。该峰的杂质浓度为1×1020〜2×1021离子/ cm3。

112. 发明授权

US08343362B2 Stamper manufacturing method 有权
标题翻译：压模制造方法
公开(公告)号：US08343362B2
公开(公告)日：2013-01-01
申请号：US12641135
申请日：2009-12-17
申请人： Takuya Shimada , Shinobu Sugimura , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Takuya Shimada , Shinobu Sugimura , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： H01B13/00 , C25F3/00
CPC分类号： G11B5/855 , C23C14/04 , C23C14/185 , C23C14/34
摘要： According to one embodiment, when forming first, second, and third stampers by transferring three-dimensional patterns of a master, a height adjusting layer having a film thickness greater on the upper surface of a projection than on the bottom surface of a recess is formed between the second stamper and a second release layer, and the surface of the third stamper is etched with an acidic solution having a pH of less than 3.
摘要翻译：根据一个实施例，当通过传送主机的三维图案来形成第一，第二和第三压模时，形成在突起的上表面上比在凹部的底表面上具有更大的膜厚度的高度调节层在第二压模和第二剥离层之间，并且用pH小于3的酸性溶液蚀刻第三压模的表面。

113. 发明授权

US08308965B2 Stamper, method of manufacturing the stamper, and magnetic recording medium manufacturing method using the stamper 失效
标题翻译：压模，制造压模的方法以及使用压模的磁记录介质制造方法
公开(公告)号：US08308965B2
公开(公告)日：2012-11-13
申请号：US13093221
申请日：2011-04-25
申请人： Masatoshi Sakurai , Satoshi Shirotori , Seiji Morita , Shinobu Sugimura , Takuya Shimada , Yoshiyuki Kamata
发明人： Masatoshi Sakurai , Satoshi Shirotori , Seiji Morita , Shinobu Sugimura , Takuya Shimada , Yoshiyuki Kamata
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00
CPC分类号： G11B5/855 , C25D1/10
摘要： According to one embodiment, a stamper manufacturing method includes forming a conductive material concentration gradient layer including the projections pattern, and a composition ratio of a buffering agent to a conductive material in the conductive material concentration gradient layer reducing in a thickness direction from a master side.
摘要翻译：根据一个实施例，压模制造方法包括形成包括突起图案的导电材料浓度梯度层，并且导电材料浓度梯度层中的缓冲剂与导电材料的组成比在厚度方向上从主侧减小。

114. 发明授权

US08300340B2 Magnetic recording medium 有权
标题翻译：磁记录介质
公开(公告)号：US08300340B2
公开(公告)日：2012-10-30
申请号：US13039158
申请日：2011-03-02
申请人： Masatoshi Sakurai , Ryosuke Yamamoto , Naoko Kihara , Akiko Yuzawa , Yoshiyuki Kamata
发明人： Masatoshi Sakurai , Ryosuke Yamamoto , Naoko Kihara , Akiko Yuzawa , Yoshiyuki Kamata
IPC分类号： G11B5/09 , G11B21/02 , G11B5/82 , G11B5/64
CPC分类号： G11B5/59688 , B82Y10/00 , G11B5/743 , G11B5/855
摘要： According to one embodiment, a servo area of a magnetic recording medium includes magnetic dots arrayed at a period L0. The magnetic dots include a plurality of magnetic dot regions divided in the cross track direction. A width Wm in the down track direction of the mth magnetic dot region from the innermost circumference and a number Nm of dot rows in the down track direction of the mth region meet a relationship represented by L0{Nm√3/2−0.3}≦Wm≦L0{Nm√3/2+0.3} (1).
摘要翻译：根据一个实施例，磁记录介质的伺服区包括以周期L0排列的磁点。磁点包括沿交叉磁道方向分割的多个磁点区域。第m个区域的第m个磁性区域的向下轨道方向的宽度Wm和第m个区域的向下轨道方向的点行数为Nm满足L0 {Nm3 / 2-0.3}＆nlE ; Wm＆nlE; L0 {Nm√3/ 2 + 0.3}（1）。

115. 发明授权

US08257560B2 Patterned media and method of manufacturing the same, and magnetic recording apparatus 有权
标题翻译：图案化介质及其制造方法以及磁记录装置
公开(公告)号：US08257560B2
公开(公告)日：2012-09-04
申请号：US12805471
申请日：2010-08-02
申请人： Yoshiyuki Kamata , Masatoshi Sakurai , Satoshi Shirotori , Kaori Kimura
发明人： Yoshiyuki Kamata , Masatoshi Sakurai , Satoshi Shirotori , Kaori Kimura
IPC分类号： C23C14/00 , C23C14/32 , B44C1/22
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59655 , G11B5/743 , G11B5/855
摘要： A patterned media has a substrate, and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filled in between the protruded magnetic patterns. In the patterned media, a depth Db and a depth Da, which are defined that Db is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a first central part between the magnetic patterns adjacent to each other in a cross-track direction or a down-track direction, and Da is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a second central part in a portion surrounded by the magnetic patterns, have a relationship that the depth Da is greater than the depth Db.
摘要翻译：图案化介质具有基板，并且在基板上的磁记录层包括突出的磁图案和填充在突出磁图案之间的非磁性材料。在图案化介质中，深度Db和深度Da被定义为Db是从磁图案的表面到填充在彼此相邻的磁图案之间的第一中心部分的非磁性材料的表面的深度交叉轨道方向或向下轨道方向，并且Da是从磁图案的表面到填充在由磁图案包围的部分中的第二中心部分中的非磁性材料的表面的深度，具有如下关系：深度Da大于深度Db。

116. 发明授权

US08097351B2 Magnetic recording apparatus 有权
标题翻译：磁记录装置
公开(公告)号：US08097351B2
公开(公告)日：2012-01-17
申请号：US11341849
申请日：2006-01-30
申请人： Takeshi Okino , Seiji Morita , Yoshiyuki Kamata , Satoshi Shirotori , Masatoshi Sakurai , Hiroaki Nakamura
发明人： Takeshi Okino , Seiji Morita , Yoshiyuki Kamata , Satoshi Shirotori , Masatoshi Sakurai , Hiroaki Nakamura
IPC分类号： G11B5/66
CPC分类号： G11B5/855
摘要： A magnetic recording apparatus has a magnetic recording media including a substrate and a magnetic layer containing magnetic patterns on the substrate, the magnetic layer including data zones to constitute recoding tracks and servo zones, the magnetic patterns of the servo zones being used as address bits, and a magnetic head configured to read signals from the magnetic recording media while flying over the magnetic recording media, in which, in a case where two magnetic patterns used as address bits on the servo zones corresponding to two adjacent recording tracks are arranged in such a manner that one corner of one magnetic pattern is closest to one corner of the other magnetic pattern, the corners of the two magnetic patterns are substantially separated from each other.
摘要翻译：磁记录装置具有包括基板和在基板上包含磁图案的磁性层的磁记录介质，磁层包括构成记录轨道和伺服区的数据区，伺服区的磁图用作地址位，以及磁头，被配置为在磁记录介质上飞行时从磁记录介质读取信号，其中在用于作为与两个相邻记录轨道对应的伺服区上的地址位的两个磁图案布置在这样的一个磁性图案的一个角最靠近另一个磁性图案的一个角的方式，两个磁性图案的角部基本上彼此分离。

117. 发明授权

US08057689B2 Method of manufacturing magnetic recording medium 有权
标题翻译：磁记录介质的制造方法
公开(公告)号：US08057689B2
公开(公告)日：2011-11-15
申请号：US12705490
申请日：2010-02-12
申请人： Yousuke Isowaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Yousuke Isowaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： B44C1/22
CPC分类号： G11B5/865 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist by means of a first etching gas, etching the second hard mask by means of the first etching gas using the patterned resist as a mask to transfer the patterns to the second hard mask, etching the first hard mask by means of a second etching gas different from the first etching gas using the second hard mask as a mask to transfer the patterns to the first hard mask, and performing ion beam etching in order to deactivate the magnetic recording layer exposed in the recesses and to remove the second hard mask.
摘要翻译：根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上，通过第一蚀刻气体去除残留在图案化抗蚀剂的凹部中的残留物，利用第一蚀刻气体，使用图案化抗蚀剂作为掩模蚀刻第二硬掩模，以将图案转移到第二硬掩模，蚀刻第一通过不同于使用第二硬掩模的第一蚀刻气体作为掩模的第二蚀刻气体将硬掩模转印到第一硬掩模，并且执行离子束蚀刻以使暴露在凹部中的磁记录层失活并移除第二个硬掩模。

118. 发明授权

US08017023B2 Method of manufacturing magnetic recording medium and magnetic recording medium 有权
标题翻译：制造磁记录介质和磁记录介质的方法
公开(公告)号：US08017023B2
公开(公告)日：2011-09-13
申请号：US12882113
申请日：2010-09-14
申请人： Yoshiyuki Kamata , Kaori Kimura , Yousuke Isowaki , Masatoshi Sakurai
发明人： Yoshiyuki Kamata , Kaori Kimura , Yousuke Isowaki , Masatoshi Sakurai
IPC分类号： B44C1/22
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/743
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.
摘要翻译：根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成抗蚀剂，将压模压印到抗蚀剂上以转印突起和凹陷的图案，以及在不覆盖图案的区域中部分蚀刻磁记录层通过使用He和N2的混合气体的离子束蚀刻用作掩模的抗蚀剂以及修改磁记录层的剩余部分留下厚度减小的非磁性层。

119. 发明申请

US20110165438A1 METHOD OF MANUFACTURING DISCRETE TRACK RECORDING MEDIUM AND DISCRETE TRACK RECORDING MEDIUM 审中-公开
标题翻译：分离轨迹记录介质和分离轨迹记录介质的制造方法
公开(公告)号：US20110165438A1
公开(公告)日：2011-07-07
申请号：US13048017
申请日：2011-03-15
申请人： Yoshiyuki Kamata , Satoshi Shirotori , Kaori Kimura , Masatoshi Sakurai
发明人： Yoshiyuki Kamata , Satoshi Shirotori , Kaori Kimura , Masatoshi Sakurai
IPC分类号： G11B5/00
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a discrete track recording medium includes forming protruded magnetic patterns on a substrate, and repeating processes of depositing a nonmagnetic material so as to be filled in recesses between the magnetic patterns and etching back the nonmagnetic material two or more times with rotating the substrate in a plane thereof by an angle less than one revolution.
摘要翻译：根据一个实施例，制造离散轨道记录介质的方法包括在基板上形成突出的磁图案，并且重复沉积非磁性材料以便填充在磁性图案之间的凹部中并且蚀刻非磁性材料2或更多次，使基板在其平面内以小于一转的角度旋转。

120. 发明授权

US07938978B2 Method of manufacturing stamper 有权
标题翻译：制造压模的方法
公开(公告)号：US07938978B2
公开(公告)日：2011-05-10
申请号：US12691491
申请日：2010-01-21
申请人： Takuya Shimada , Shinobu Sugimura , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Takuya Shimada , Shinobu Sugimura , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： B44C1/22 , B28B11/08
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a stamper includes forming a first stamper from a master plate having lands and grooves through electroforming, forming a second stamper, a width of which is GW, from the first stamper through electroforming, forming a lamination film with a thickness of LLT on the second stamper, forming, on the lamination film, a second releasing layer, a transfer layer with a thickness of TLT and a third electroforming layer with a thickness of ELT, peeling off the transfer layer and the third electroforming layer from the second stamper to form a third stamper, and isotropically etching the transfer layer on the third stamper in an etching thickness of ET to reduce a width of lands of the third stamper, in which the following relations are satisfied: 10 nm≦ELT and ET≦TLT.
摘要翻译：根据一个实施例，制造压模的方法包括通过电铸从具有焊盘和槽的母板形成第一压模，通过电铸从第一压模形成其宽度为GW的第二压模，形成层压膜在第二压模上具有LLT的厚度，在层压膜上形成第二释放层，厚度为TLT的转印层和具有ELT厚度的第三电铸层，剥离转印层和第三电铸从而形成第三压模，并且以蚀刻厚度的ET对第三压模上的转印层进行各向同性蚀刻，以减小第三压模的焊盘的宽度，其中满足以下关系：10nm＆nlE; ELT 和ET＆nlE; TLT。

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