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    • 1. 发明授权
    • Magnetic recording medium and method of manufacturing
    • 磁记录介质及其制造方法
    • US09028704B2
    • 2015-05-12
    • US13659749
    • 2012-10-24
    • Kazutaka TakizawaAkira WatanabeKaori KimuraTakeshi IwasakiAkihiko Takeo
    • Kazutaka TakizawaAkira WatanabeKaori KimuraTakeshi IwasakiAkihiko Takeo
    • B44C1/22G11B5/31
    • G11B5/3163G11B5/3116G11B5/82G11B5/855
    • A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
    • 磁记录介质的制造方法如下:在基板上形成磁记录层; 形成下层和金属剥离层,其与磁性记录层上的下层依次形成合金,并通过使底层和金属剥离层合金化而形成合金剥离层; 在合金剥离层上形成掩模层; 在掩模层上形成抗蚀剂层; 通过图案化抗蚀剂层提供突起 - 凹陷图案; 将突起凹部图案转印到掩模层; 将所述突起凹部图案转印到所述合金剥离层; 将突起凹部图案转印到磁记录层; 通过使用剥离溶液溶解合金剥离层,并从磁记录层的上侧除去在合金剥离层上形成的层。