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111. 发明申请

US20090154015A1 MAGNETIC WRITE POLE FABRICATION 有权
标题翻译：磁性写字槽制造
公开(公告)号：US20090154015A1
公开(公告)日：2009-06-18
申请号：US11957481
申请日：2007-12-16
申请人： Amanda Baer , Jeffrey S. Lille , Aron Pentek
发明人： Amanda Baer , Jeffrey S. Lille , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Write elements and methods of fabricating magnetic write poles are described. For one method, a vertical mask structure is formed on a magnetic layer in locations of a pole tip and a yoke of a write pole. The vertical mask structure may be formed by coating vertical surfaces of resists with an atomic layer deposition (ALD) process or a similar process. A removal process is then performed around the vertical mask structure to define the pole tip and part of the yoke of the write pole, and the vertical mask structure is removed. A lower portion of the pole tip is them masked while the upper portion of the pole tip and the part of the yoke is exposed. The upper portion of the pole tip and the part of the yoke are then expanded with magnetic material, such as with a plating process.
摘要翻译：描述制造磁性写入极的写入元件和方法。对于一种方法，在写入极的极尖和磁轭的位置的磁性层上形成垂直掩模结构。垂直掩模结构可以通过用原子层沉积（ALD）工艺或类似工艺涂覆抗蚀剂的垂直表面而形成。然后围绕垂直掩模结构执行去除处理以限定磁极尖端和写极的磁轭的一部分，并且去除垂直掩模结构。极尖的下部被掩蔽，而极尖的上部和轭的一部分露出。然后用磁性材料例如电镀工艺使磁极尖端的上部和磁轭的一部分膨胀。

112. 发明申请

US20080145524A1 FABRICATING PERPENDICULAR WRITE ELEMENTS IN PERPENDICULAR MAGNETIC RECORDING HEADS 失效
标题翻译：在完整的磁记录头中制作完整的写入元素
公开(公告)号：US20080145524A1
公开(公告)日：2008-06-19
申请号：US11380154
申请日：2006-04-25
申请人： Hung-Chin Guthrie , Ming Jiang , Yinshi Liu , Aron Pentek , John J. Yang , Sue Siyang Zhang
发明人： Hung-Chin Guthrie , Ming Jiang , Yinshi Liu , Aron Pentek , John J. Yang , Sue Siyang Zhang
IPC分类号： B05D5/12
CPC分类号： G11B5/1278 , G11B5/3163
摘要： Methods of fabricating perpendicular write elements for perpendicular magnetic recording heads are discussed. In write element fabrication, write poles are fabricated according to one of many desired methods. The write poles during fabrication are typically covered by a hard mask and a photolithographic soft mask. According to the methods described herein, the soft mask is removed such as by chemical etching. The hard mask is then removed, such as by CMP and ion etching, to expose the write poles. Shield gap material may then be deposited on the write poles to define the shield gap between the write poles and the trailing shields. Trailing shield material may then be deposited on the shield gap material to form the trailing shields corresponding with the write poles.
摘要翻译：讨论了制造垂直磁记录头垂直写入元件的方法。在写入元件制造中，根据许多期望的方法之一制造写入极。制造期间的写入极通常被硬掩模和光刻软掩模覆盖。根据本文描述的方法，例如通过化学蚀刻去除软掩模。然后去除硬掩模，例如通过CMP和离子蚀刻，以暴露写入极。然后可以将屏蔽间隙材料沉积在写入极上以限定写入极和后部屏蔽之间的屏蔽间隙。然后可以将后挡板材料沉积在屏蔽间隙材料上以形成对应于写入极的后挡板。

113. 发明申请

US20080141522A1 OPTICAL LAPPING GUIDE FOR USE IN THE MANUFACTURE OF PERPENDICULAR MAGNETIC WRITE HEADS 失效
标题翻译：光学写入头制造中使用的光学引导指南
公开(公告)号：US20080141522A1
公开(公告)日：2008-06-19
申请号：US11611829
申请日：2006-12-15
申请人： Amanda Baer , Vladimir Nikitin , Aron Pentek , Neil Leslie Robertson
发明人： Amanda Baer , Vladimir Nikitin , Aron Pentek , Neil Leslie Robertson
IPC分类号： G11B5/127 , B05D5/12 , H04R31/00
CPC分类号： G11B5/3166 , G11B5/102 , G11B5/1278 , G11B5/3146 , G11B5/3169 , G11B5/3173 , Y10T29/49032 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： An optical lapping guide for determining an amount of lapping performed on a row of sliders in a process for manufacturing sliders for magnetic data recording. The optical lapping guide is constructed with a front edge that is at an angle with respect to an air bearing surface plane ABS plane, such that a portion of the lapping guides is in front of the ABS and portion of the lapping guide is behind the ABS. As lapping progresses, an increasing amount of the lapping guide will be exposed at the ABS and visible for inspection. Therefore, after a lapping process has been performed, the optical lapping guide can be inspected to determine the amount of material removed by lapping. The greater the amount of the lapping guide that is exposed and visible, the greater the amount of material removed by lapping.
摘要翻译：光学研磨引导件，用于确定在用于制造用于磁数据记录的滑块的过程中对一排滑块执行的研磨量。光学研磨引导件的前边缘相对于空气轴承表面平面ABS平面成一定角度，使得研磨导轨的一部分在ABS的前面，研磨导轨的一部分在ABS后面。随着研磨的进行，越来越多的研磨导轨将暴露在ABS处并可见以供检查。因此，在进行研磨处理之后，可以检查光学研磨导向件以确定通过研磨去除的材料的量。暴露和可见的研磨导轨的量越大，通过研磨去除的材料量就越大。

114. 发明申请

US20080072417A1 Perpendicular magnetic write pole formation using an aluminum oxide wrap around mask 失效
标题翻译：使用氧化铝缠绕掩模的垂直磁性写入磁极形成
公开(公告)号：US20080072417A1
公开(公告)日：2008-03-27
申请号：US11525788
申请日：2006-09-21
申请人： Yimin Hsu , Vladimir Nikitin , Aron Pentek
发明人： Yimin Hsu , Vladimir Nikitin , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a write pole for a perpendicular magnetic write head. The method includes forming a mask structure over a full film layer of magnetic write pole material. A layer of hard mask material such as conformally deposited alumina is then deposited full film over the mask and write pole material. An ion mill, such as in an Ar or CHF3 chemistry is then used to preferentially remove horizontally disposed portions of the alumina layer (hard mask layer), thereby forming vertical hard mask walls at the sides of the mask structure. An ion mill is then used to form the write pole, with the alumna side walls providing excellent masking for forming well defined write pole edges. A relatively gentle clean up process can then be performed to remove the remaining mask material and side walls. The use of the alumina side walls eliminated the need to use an alumina hard mask that extends over the entire top of the write pole, Because of this, after forming the write pole, a relatively gentle clean up such as TMAH etch and NMP can be used to remove the remaining mask and alumina walls from the write pole.
摘要翻译：一种用于制造用于垂直磁写头的写极的方法。该方法包括在磁性写入磁极材料的全部薄膜层上形成掩模结构。然后将诸如保形沉积氧化铝的硬掩模材料层沉积在掩模上并写入极材料。然后使用诸如Ar或CHF 3化学中的离子磨机来优先除去氧化铝层（硬掩模层）的水平设置的部分，从而在掩模结构的侧面形成垂直的硬掩模壁。然后使用离子磨机形成写柱，校准侧壁为形成良好定义的写极边缘提供了优异的掩模。然后可以执行相对温和的清理过程以除去剩余的掩模材料和侧壁。使用氧化铝侧壁消除了使用在写入极的整个顶部上延伸的氧化铝硬掩模的需要。因此，在形成写入极之后，可以进行相对温和的清洁，例如TMAH蚀刻和NMP可以用于从写入极上去除剩余的掩模和氧化铝壁。

115. 发明申请

US20070242393A1 Recessed SiO2 or Si3N4 overcoat for GMR head in magnetic disk drive 失效
标题翻译：用于磁盘驱动器中的GMR磁头的嵌入式SiO2或Si3N4外涂层
公开(公告)号：US20070242393A1
公开(公告)日：2007-10-18
申请号：US11809184
申请日：2007-05-31
申请人： Yunxiao Gao , Aron Pentek , Alan Tam , Sue Zhang
发明人： Yunxiao Gao , Aron Pentek , Alan Tam , Sue Zhang
IPC分类号： G11B5/127
CPC分类号： G11B5/3136 , G11B5/3106 , G11B5/3133 , G11B5/3163 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A giant magnetoresistive (GMR) head contains an overcoat layer consisting of silicon dioxide or silicon nitride. These materials have a coefficient of thermal expansion (CTE) that is less than alumina, which is conventionally used for the overcoat layer. As a result, the overcoat layer exhibits a smaller temperature-induced protrusion when the head heats up from friction with the passing air stream. The process of forming the head includes forming a recess in the overcoat layer that reduces the stress on the poles and improves the performance of the head. The process includes depositing a seed layer over the overcoat layer in preparation to plating a metal mask layer with an opening where the recess is to be formed, wet chemical etching the seed layer through the opening in the mask layer and performing an ion milling process to remove any remaining traces of the seed layer. With the seed layer completely removed, a trench having smooth sidewalls and bottom can be etched in the overcoat layer by a reactive ion etch (RIE) process. The saw that is used to separate the head elements in the wafer can be passed through the clean trench without contacting the overcoat layer, thereby avoiding the chipping and cracking that might otherwise result from the use of a silicon dioxide or silicon nitride overcoat layer.
摘要翻译：巨磁阻（GMR）磁头包含由二氧化硅或氮化硅组成的外涂层。这些材料的热膨胀系数（CTE）小于通常用于外涂层的氧化铝。结果，当头部与通过的空气流的摩擦加热时，外涂层表现出较小的温度引起的突起。形成头部的过程包括在外涂层中形成凹陷，其减小了磁极上的应力并提高了磁头的性能。该方法包括在外涂层上沉积种子层，以准备对具有要形成凹部的开口镀金属掩模层，通过掩模层中的开口湿化学蚀刻晶种层并执行离子铣削加工去除种子层的剩余痕迹。随着种子层完全去除，可以通过反应离子蚀刻（RIE）工艺在覆盖层中蚀刻具有平滑侧壁和底部的沟槽。用于分离晶片中的头元件的锯可以通过干净的沟槽而不与外涂层接触，从而避免由于使用二氧化硅或氮化硅外涂层而导致的切屑和裂纹。

116. 发明授权

US07120988B2 Method for forming a write head having air bearing surface (ABS) 失效
标题翻译：用于形成具有空气轴承表面（ABS）的写头的方法
公开(公告)号：US07120988B2
公开(公告)日：2006-10-17
申请号：US10672896
申请日：2003-09-26
申请人： Quang Le , Edward Hin Pong Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
发明人： Quang Le , Edward Hin Pong Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
IPC分类号： G11B5/127 , C23C14/00
CPC分类号： G11B5/1278 , G11B5/112 , Y10T29/49021 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49067
摘要： A method and materials to fabricate a trailing shield write pole that resolve the problems of controlling the write gap and preventing damages to the write gap or pole during fabrication of the subsequent structure. This process also introduces a CMP assisted lift-off process to remove re-deposition and fencing (increase yields) and a method to create dishing in the top of the write pole. Moreover, also included in this disclosure are suitable materials that can function as an ion mill transfer layer, CMP layer, and RIEable layer.
摘要翻译：一种用于制造后屏蔽写入极的方法和材料，其解决了在后续结构的制造期间控制写入间隙并防止对写入间隙或极的损坏的问题。该过程还引入CMP辅助剥离过程以去除再沉积和栅栏（增加产量）以及在写柱顶部产生凹陷的方法。此外，本公开中还包括可用作离子磨转移层，CMP层和可分离层的合适材料。

117. 发明申请

US20050068671A1 Magnetic transducer for perpendicular magnetic recording with single pole write head with trailing shield 有权
标题翻译：用于垂直磁记录的磁性传感器，带有后挡板的单刀头
公开(公告)号：US20050068671A1
公开(公告)日：2005-03-31
申请号：US10675046
申请日：2003-09-29
申请人： Yimin Hsu , Quang Le , Hin Lee , James Nix , Aron Pentek , Kurt Rubin , Neil Smith , Nian Sun , Walter Weresin , Mason Williams
发明人： Yimin Hsu , Quang Le , Hin Lee , James Nix , Aron Pentek , Kurt Rubin , Neil Smith , Nian Sun , Walter Weresin , Mason Williams
IPC分类号： G11B5/187 , G11B5/31 , G11B5/60 , H05K1/02 , G11B5/127
CPC分类号： G11B5/3116 , G11B5/11 , G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/6005
摘要： The invention is a magnetic transducer with separated read and write heads for perpendicular recording. The write head has a trailing shield that extends from the return pole piece toward the main pole piece to form the write gap at the air-bearing surface. One embodiment of the trailing shield is a two part structure with a pedestal and a much smaller tip that confronts the main pole piece at the gap. In one embodiment a sink of non-magnetic, electrically conductive material is disposed in the separation gap between the read head and the flux bearing pole piece. The sink is preferably made of copper and does not extend to the ABS.
摘要翻译：本发明是具有分离的用于垂直记录的读写头的磁性换能器。写头具有从返回极片向主极片延伸的尾部屏蔽件，以在空气轴承表面形成写入间隙。后挡板的一个实施例是具有基座的两部分结构和在间隙处面对主极片的更小的尖端。在一个实施例中，非磁性导电材料的汇流槽设置在读头和磁通轴承极片之间的分隔间隙中。水槽优选由铜制成并且不延伸到ABS。

118. 发明授权

US07770283B2 Method of fabricating a magnetic head 有权
标题翻译：制造磁头的方法
公开(公告)号：US07770283B2
公开(公告)日：2010-08-10
申请号：US11347356
申请日：2006-02-03
申请人： Daniel Wayne Bedell , Vladimir Nikitin , Aron Pentek , Sue Siyang Zhang
发明人： Daniel Wayne Bedell , Vladimir Nikitin , Aron Pentek , Sue Siyang Zhang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A multi-step process for notching the P1 pole of the write head element of a magnetic head. In a first step following the fabrication of the P2 pole tip, a layer of protective material is deposited on the approximately vertical side surfaces of the P2 pole tip. Thereafter, a first ion milling step, utilizing a species such as argon, is performed to mill through the write gap layer and to notch into the P1 pole layer therebelow. The removal of redeposited material from the side surfaces of the P2 pole tip is thereafter accomplished and the protective material formed on the side surfaces of the P2 pole tip protects the P2 pole tip during the redeposition clean up step. Thereafter, the protective material is removed from the side surfaces of the P2 pole tip, and a second ion milling step is performed to further notch the P1 pole material.
摘要翻译：用于切割磁头的写入头元件的P1极的多步骤过程。在制造P2极尖之后的第一步骤中，在P2极尖的大致垂直侧表面上沉积有一层保护材料。此后，进行利用物质如氩的第一离子研磨步骤，通过写入间隙层研磨并陷入其下方的P1极层。然后，从P2极尖端的侧面去除再沉积材料，并且形成在P2极端部的侧表面上的保护材料在再沉积清洁步骤期间保护P2极尖。然后，从P2极端部的侧面除去保护材料，进行第二离子研磨工序，进一步切断P1极材料。

119. 发明授权

US07743487B2 Method to planarize perpendicular write poles using a combination of CMP and reactive ion milling 有权
标题翻译：使用CMP和反应离子铣削的组合来平面化垂直写入极的方法
公开(公告)号：US07743487B2
公开(公告)日：2010-06-29
申请号：US11453681
申请日：2006-06-14
申请人： Amanda Baer , Hamid Balamane , Michael Feldbaum , Ming Jiang , Aron Pentek , Neil Leslie Robertson , Sue Siyang Zhang
发明人： Amanda Baer , Hamid Balamane , Michael Feldbaum , Ming Jiang , Aron Pentek , Neil Leslie Robertson , Sue Siyang Zhang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/1871 , G11B5/3169 , Y10T29/49032 , Y10T29/49039 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular write head includes a beveled main pole having corners defining a track width and having a planarized surface and encapsulated on either side thereof and below by an alumina layer, the alumina layer having a polished surface and extending above the main pole on either side thereof as steps.
摘要翻译：垂直写头包括具有限定轨道宽度并且具有平坦化表面并且在其两侧和下方由氧化铝层封装的角的倾斜主极，所述氧化铝层具有抛光表面并且在其两侧的主极上方延伸作为步骤。

120. 发明授权

US07715147B2 Magnetic write head having a shield that extends below the leading edge of the write pole 有权
标题翻译：磁写头具有在写柱的前缘下方延伸的屏蔽
公开(公告)号：US07715147B2
公开(公告)日：2010-05-11
申请号：US11588961
申请日：2006-10-27
申请人： Michael Feldbaum , Quang Le , Aron Pentek , Sue Siyang Zhang
发明人： Michael Feldbaum , Quang Le , Aron Pentek , Sue Siyang Zhang
IPC分类号： G11B5/187 , G11B5/11
CPC分类号： G11B5/11 , G11B5/315
摘要： A magnetic write head for perpendicular magnetic recording that has a write pole and a trailing or side shield that has a leading edge that extends to or beyond the leading edge of write pole, thereby ensuring complete side magnetic shielding. The write head can be formed by forming the write pole on a non-magnetic substrate that is constructed of a material that can be readily removed by reactive ion etching (RIE). The write pole can be formed by depositing a layer of magnetic write pole material over the substrate and then forming a mask over the magnetic write pole material. An ion mill can be performed to define the write pole, and then a reactive ion etch can be performed to notch the substrate, so that when a non-magnetic shield gap material is deposited it will be below or at the bottom of the write pole. Then a magnetic shield material can be deposited to form a shield having a leading edge that extends beyond the leading edge of the write pole.
摘要翻译：一种用于垂直磁记录的磁写头，具有写磁极和后屏蔽或侧屏蔽，其具有延伸到或超过写极的前沿的前沿，从而确保完全的侧磁屏蔽。写头可以通过在由可以通过反应离子蚀刻（RIE）容易地去除的材料构成的非磁性衬底上形成写极来形成。可以通过在衬底上沉积一层磁性写入磁极材料，然后在磁性写入磁极材料上形成掩模来形成写入极。可以执行离子磨以限定写入极，然后可以执行反应离子蚀刻以蚀刻衬底，使得当非磁性屏蔽间隙材料沉积时，它将在写入极的下方或底部。然后，可以沉积磁屏蔽材料以形成具有延伸超过写柱的前缘的前缘的屏蔽。

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