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101. 发明申请

US20050002434A1 Cooled mirror for a laser beam 审中-公开
标题翻译：用于激光束的冷却镜
公开(公告)号：US20050002434A1
公开(公告)日：2005-01-06
申请号：US10892082
申请日：2004-07-15
申请人： Karl-Heinz Armier , Klaus Kopke , Jurgen Peters
发明人： Karl-Heinz Armier , Klaus Kopke , Jurgen Peters
IPC分类号： G02B5/08 , G02B7/18 , G02B7/182 , H01S3/04 , H01S3/041 , H01S3/08
CPC分类号： G02B7/1815 , H01S3/0401
摘要： A mirror for a laser beam, in which at least one first cooling channel for a cooling fluid is disposed for cooling a zone that is thermally impinged by a laser beam. The cooling channel extends in the interior of the mirror such that the zone is cooled at least substantially symmetrically to its center and that the cooling fluid heated up in this zone is directed to thermally unaffected zones of the mirror to compensate for thermally caused stresses.
摘要翻译：一种用于激光束的反射镜，其中设置用于冷却流体的至少一个第一冷却通道以冷却由激光束热冲击的区域。冷却通道在反射镜的内部延伸，使得该区域至少基本对称地冷却至其中心，并且在该区域中被加热的冷却流体被引导到反射镜的热不受影响的区域以补偿热引起的应力。

102. 发明授权

US6434181B2 Gas laser oscillator 有权
标题翻译：气体激光振荡器
公开(公告)号：US6434181B2
公开(公告)日：2002-08-13
申请号：US84395001
申请日：2001-04-30
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： HAYASHIKAWA HIROYUKI , EGUCHI SATOSHI , YAMASHITA TAKAYUKI
IPC分类号： H01S3/041 , H01S3/07 , H01S3/097
CPC分类号： H01S3/073 , H01S3/041 , H01S3/097
摘要： A gas laser oscillator having at least three discharge tubes disposed along the optical axis, and a spacer having an opening centered on the optical axis. The spacer is disposed between a partially reflective mirror and the closest discharge tube. Further, the discharge tubes are disposed in series along the optical axis, and satisfy the following three formulas simultaneously:where the sum of lengths of a pair of discharge tubes disposed at both ends in optical axis direction is L1, the inside diameter of these discharge tubes is r1, the sum of lengths of the other discharge tubes in the optical axis direction is L2, the inside diameter of these discharge tubes is r2, and the inside diameter of the opening of the spacer is r3.
摘要翻译：一种气体激光振荡器，具有沿着光轴布置的至少三个放电管，以及具有以光轴为中心的开口的间隔物。间隔件设置在部分反射镜和最近的放电管之间。此外，放电管沿着光轴串联布置，并且同时满足以下三个公式：其中设置在光轴方向两端的一对放电管的长度之和为这些放电的内径管为r1，其他放电管的光轴方向的长度之和为L2，这些放电管的内径为r2，间隔物的开口内径为r3。

103. 发明授权

US5848089A Excimer laser with magnetic bearings supporting fan 失效
标题翻译：准分子激光器带磁轴承支持风扇
公开(公告)号：US5848089A
公开(公告)日：1998-12-08
申请号：US893904
申请日：1997-07-11
申请人： Kamal Sarkar , Richard C. Ujazdowski , Palash P. Das , Donald G. Larson
发明人： Kamal Sarkar , Richard C. Ujazdowski , Palash P. Das , Donald G. Larson
IPC分类号： F04D25/08 , F04D29/04 , F04D29/056 , F04D29/058 , G03F7/20 , H01S3/036 , H01S3/041 , H01S3/225
CPC分类号： G03F7/70575 , H01S3/036 , H01S3/041
摘要： An electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported by an active magnetic bearing system and driven by a brushless DC motor in which the rotor of the motor and at least two magnetic bearings sealed within the gas environment of the laser cavity and the motor stator and the coils of the bearing magnets are located outside the gas environment.
摘要翻译：一种具有激光腔的放电气体激光器，其中包含激光气体和用于使激光气体循环的风扇。风扇由主动磁轴承系统支撑，由无刷直流电动机驱动，电动机的转子和至少两个磁性轴承密封在激光腔的气体环境中，电动机定子和轴承磁体的线圈位于天然气环境之外。

104. 发明授权

US5754575A Free-space gas slab laser 失效
公开(公告)号：US5754575A
公开(公告)日：1998-05-19
申请号：US842156
申请日：1997-04-23
申请人： Yefim P. Sukhman , Mikhail E. Ryskin , Christian Julian Risser
发明人： Yefim P. Sukhman , Mikhail E. Ryskin , Christian Julian Risser
IPC分类号： H05K7/20 , H01S3/03 , H01S3/038 , H01S3/041 , H01S3/042 , H01S3/081 , H01S3/0975 , H01S3/04
CPC分类号： H01S3/0975 , H01S3/0315 , H01S3/038 , H01S3/041
摘要： A pair of elongated, parallel electrodes (91,92) are insulatively mounted within a tubular housing (111) filled with a laser gas mixture between an arrangement of reflective optical elements (120,150) sealingly mounted at each end of the housing. The electrodes form a rectangular gas discharge area (40) the minimum spacing (a) between which is the diameter of the fundamental free-space mode of the stable, laser resonator (17) formed in the gap when the electrodes are rf excited (13). A multi-pass optical configuration (30,50) uses the full width (b) of the active medium to produce a high power, compact laser (10,200). Deformable support rings (97) are compressed to push the electrodes apart against small cylindrical spacers (99) abutting the inner walls of the housing to maintain the electrodes' spatial relationship. The rf feeds (103) sealingly (112) connected to the electrodes through the housing without disturbing the uniform distribution of forces on the electrodes. Air cooled heatsinks (161,162, 176,177) are held tightly against while being flexibly mounted to the laser tube assembly reducing mechanical and operational torsional distortion, misalignment and instability.

105. 发明授权

US5748656A Laser having improved beam quality and reduced operating cost 失效
标题翻译：激光器具有改善的光束质量和降低的操作成本
公开(公告)号：US5748656A
公开(公告)日：1998-05-05
申请号：US583302
申请日：1996-01-05
申请人： Tom A. Watson , William N. Partlo , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
发明人： Tom A. Watson , William N. Partlo , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
IPC分类号： H01S3/03 , H01S3/036 , H01S3/04 , H01S3/041 , H01S3/225 , H01S3/045
CPC分类号： H01S3/036 , H01S3/04 , H01S3/041 , F28D2021/0077 , H01S3/225
摘要： Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.
摘要翻译：公开了一种可用于例如光刻或医疗手术中的激光。在一个实施例中，激光器包括放电室和发热电子器件，其封闭在挡板外壳中，其需要较少的冷却空气以可靠地冷却外壳中的部件比先前的未封闭的外壳。还提供了减少调节空气量的方法。在另一个实施例中，激光器具有热交换系统，其响应于激光气体温度的变化而快速作用，通过调节调节通过热交换器的水流的流量比例阀，由此通过所述热交换系统提供连续可变的热交换速率热交换器保持激光温度恒定。公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。

106. 发明授权

US5712723A Second harmonic generator 失效
标题翻译：二次谐波发生器
公开(公告)号：US5712723A
公开(公告)日：1998-01-27
申请号：US592450
申请日：1996-01-26
申请人： Jin-ho Lee
发明人： Jin-ho Lee
IPC分类号： G02F1/37 , H01S3/00 , H01S3/02 , H01S3/041 , H01S3/0941 , H01S3/109
CPC分类号： H01S3/109 , H01S3/0014 , H01S3/025 , H01S3/0401 , H01S3/0405 , H01S3/042 , H01S3/09415 , H01S5/02469
摘要： A second harmonic generator includes a laser diode mount, a laser diode on the mount for producing pumping light, a resonator for generating second harmonic light from the pumping light output from the laser diode, a lock connecting the resonator and the laser diode mount, a thermal controller including a thermoelectric cooling device for controlling the temperature of the resonator, a housing housing the resonator and coupled to the laser diode mount, a beam splitter for reflecting part of the second harmonic light emitted from the resonator, and a photodetector for detecting light reflected from the beam splitter. The thermoelectric cooling device is interposed between the housing and resonator so that the resonator and the housing are thermally connected. The second harmonic generator separates a thermally unrelated element from a thermal control path to reduce the heat control burden. Since the path of heat flow is only from the resonator to the housing, temperature control of the resonator is accomplished rapidly and precisely.
摘要翻译：二次谐波发生器包括激光二极管安装件，用于产生泵浦光的安装座上的激光二极管，用于从激光二极管输出的泵浦光产生二次谐波的谐振器，连接谐振器和激光二极管安装座的锁，热控制器，包括用于控制谐振器的温度的热电冷却装置，容纳谐振器并耦合到激光二极管安装座的壳体，用于反射从谐振器发射的二次谐波光的一部分的分束器和用于检测光的光电检测器从分束器反射。热电冷却装置插入在壳体和谐振器之间，使得谐振器和壳体被热连接。二次谐波发生器将热不相关元件与热控制路径分离，以减少热控负担。由于热流的路径仅从谐振器到壳体，所以谐振器的温度控制被快速且精确地实现。

107. 发明授权

US5661746A Free-space gas slab laser 失效
标题翻译：自由空间气体板坯激光器
公开(公告)号：US5661746A
公开(公告)日：1997-08-26
申请号：US543924
申请日：1995-10-17
申请人： Yefim P. Sukhman , Mikhail E. Ryskin , Christian Julian Risser
发明人： Yefim P. Sukhman , Mikhail E. Ryskin , Christian Julian Risser
IPC分类号： H05K7/20 , H01S3/03 , H01S3/038 , H01S3/041 , H01S3/042 , H01S3/081 , H01S3/0975 , H01S3/097
CPC分类号： H01S3/0975 , H01S3/0315 , H01S3/038 , H01S3/041
摘要： A pair of elongated, parallel electrodes (91,92) are insulatively mounted within a tubular housing (111) filled with a laser gas mixture between an arrangement of reflective optical elements (120,150) sealingly mounted at each end of the housing. The electrodes form a rectangular gas discharge area (40) the minimum spacing (a) between which is the diameter of the fundamental free-space mode of the stable, laser resonator (17) formed in the gap when the electrodes are rf excited (13). A multi-pass optical configuration (30,50) uses the full width (b) of the active medium to produce a high power, compact laser (10,200). Deformable support rings (97) are compressed to push the electrodes apart against small cylindrical spacers (99) abutting the inner walls of the housing to maintain the electrodes' spatial relationship. The rf feeds (103) sealingly (112) connected to the electrodes through the housing Without disturbing the uniform distribution of forces on the electrodes. Air cooled heatsinks (161,162, 176,177) are held tightly against while being flexibly mounted to the laser tube assembly reducing mechanical and operational torsional distortion, misalignment and instability.
摘要翻译：一对细长的平行电极（91,92）被绝缘地安装在填充有激光气体混合物的管状壳体（111）中，所述管状壳体密封地安装在壳体的每个端部处的反射光学元件（120,150）的布置。电极形成矩形气体放电区域（40），最小间隔（a）之间是在电极被激发时在间隙中形成的稳定的激光谐振器（17）的基本自由空间模式的直径（13））。多路光学配置（30,50）使用活动介质的全宽（b）来产生高功率紧凑型激光（10,200）。可变形的支撑环（97）被压缩以将电极分开抵靠抵靠壳体的内壁的小的圆柱形间隔件（99），以保持电极的空间关系。 rf馈送（103）密封地（112）通过壳体连接到电极，而不会扰乱电极上的均匀分布的力。空气冷却的散热器（161,162,171,177）紧紧地保持抵抗，同时柔性地安装到激光管组件，减少机械和操作的扭转变形，不对准和不稳定性。

108. 发明授权

US5596597A Laser oscillator with stabilized pointing 失效
标题翻译：具有稳定指示的激光振荡器
公开(公告)号：US5596597A
公开(公告)日：1997-01-21
申请号：US432946
申请日：1995-05-01
申请人： Satoshi Nishida , Akihiro Otani
发明人： Satoshi Nishida , Akihiro Otani
IPC分类号： H01S3/02 , H01S3/036 , H01S3/04 , H01S3/041 , H01S3/0971 , H01S3/08
CPC分类号： H01S3/036 , H01S3/02 , H01S3/041 , H01S3/0407 , H01S3/0971
摘要： A laser oscillator has a casing 10. A cooling medium is supplied from an inlet port 134 to a heat exchanger 8 via a pipe 35, and discharged form it via a pipe 37 and an outlet port 136. The ports 134 and 136 are symmetrically positioned relative to a center line of the casing when seen from upward. An inlet port 340 and an outlet port 342 have a similar positional relation ship thereto.
摘要翻译：激光振荡器具有壳体10.冷却介质经由管道35从入口端口134供应到热交换器8，并且经由管道37和出口端口136从其排出。端口134和136对称地定位相对于从上方看的壳体的中心线。入口端口340和出口端口342具有与其相似的位置关系。

109. 发明授权

US5430753A Stripline laser having composite electrodes 失效
标题翻译：带激光器的复合电极
公开(公告)号：US5430753A
公开(公告)日：1995-07-04
申请号：US115413
申请日：1993-08-31
申请人： Wolfgang Welsch , Hans Krueger , Peter Mammach , Klemens Huebner , Karlheinz Arndt
发明人： Wolfgang Welsch , Hans Krueger , Peter Mammach , Klemens Huebner , Karlheinz Arndt
IPC分类号： H01S3/03 , H01S3/038 , H01S3/041 , H01S3/097
CPC分类号： H01S3/0315 , H01S3/038 , H01S3/041
摘要： In a stripline laser, each electrode is fashioned as a composite of a carrier part having a mechanically stable profile and a plate-shaped electrode part having integrated cooling that is hard-soldered or welded thereto and faces toward the discharge gap.
摘要翻译：在带状线激光器中，每个电极被形成为具有机械稳定轮廓的载体部件和具有整体冷却的板状电极部件的复合材料，该部件具有硬焊接或焊接到其上并面向放电间隙。

110. 发明授权

US5359614A Variable emissivity laser thermal control system 失效
标题翻译：可变发射率激光热控制系统
公开(公告)号：US5359614A
公开(公告)日：1994-10-25
申请号：US311
申请日：1993-01-04
申请人： Joseph R. Milner
发明人： Joseph R. Milner
IPC分类号： H01S3/03 , H01S3/041 , H01S3/04 , H01S3/22
CPC分类号： H01S3/041 , H01S3/031
摘要： A laser thermal control system for a metal vapor laser maintains the wall mperature of the laser at a desired level by changing the effective emissivity of the water cooling jacket. This capability increases the overall efficiency of the laser.
摘要翻译：用于金属蒸汽激光器的激光热控制系统通过改变水冷套管的有效辐射率将激光器的壁温度保持在期望的水平。这种能力提高了激光的整体效率。

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