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    • 101. 发明申请
    • Apparatuses and methods for monitoring rotation of a conductive microfeature workpiece
    • 用于监测导电微特征工件旋转的装置和方法
    • US20060170413A1
    • 2006-08-03
    • US11376959
    • 2006-03-16
    • Suresh Ramarajan
    • Suresh Ramarajan
    • G01P3/46
    • G01P15/003G01P15/105
    • Apparatuses and methods for monitoring microfeature workpiece rotation during processing, such as brushing, by monitoring characteristics corresponding to a state of a magnetic field proximate to the rotating microfeature workpiece are disclosed herein. The characteristic can depend on the relative motion between the magnetic field and the conductive material of the microfeature workpiece. The characteristic can include the strength of the magnetic field, current in an electromagnet circuit used to create the magnetic field, force exerted on the magnetic field source, or movement of the magnetic field source. The apparatus can include a feedback control device to adjust the rotation speed of the microfeature workpiece based on the characteristic detected.
    • 本文公开了通过监视对应于靠近旋转微特征工件的磁场的状态的特性来监视处理过程中的微特征工件旋转的装置和方法,例如刷涂。 该特性可以取决于微型工件的磁场和导电材料之间的相对运动。 该特性可以包括磁场的强度,用于产生磁场的电磁体电路中的电流,施加在磁场源上的力或磁场源的移动。 该装置可以包括反馈控制装置,用于基于检测到的特性来调节微特征工件的转速。
    • 104. 发明授权
    • Acceleration rate meter
    • US06633233B1
    • 2003-10-14
    • US09715339
    • 2000-11-17
    • David P. Fries
    • David P. Fries
    • G08B2100
    • G01D5/145G01D5/2451G01P13/00G01P15/105G11B5/40
    • Each embodiment (10, 110 and 210) includes a magnetic element (12, 112 and 212) producing a magnetic field. In the first embodiment (10) of FIG. 1, the magnetic element (12) comprises a magnetic bit strip disposed extending in a circular arc on a fixed or stationary plate (14). In the second embodiment (110) of FIG. 2, the magnetic element (112) comprises a magnetic bit strip supported on a movable bar or rod (114). In the third embodiment (210) of FIG. 3, the magnetic element (212) comprises a magnetic bit strip disposed in a rectilinear path on a stationary plate (214). An electrical resistor (16, 116 and 216) is included for changing in electrical resistance in response to changes in the magnetic field produced by the magnetic element (12, 112 and 212). The resistor (16, 116 and 216) comprises a giant magnetoresistive sensor. A voltage sensor (18, 118 and 218) is included for sensing the voltage across the electrical resistor (16, 116 and 216), the sensors (18, 118 and 218) being connected to the resistors (16, 116 and 216) by electrical lead wires.
    • 107. 发明授权
    • Force detector
    • 力检测器
    • US5639973A
    • 1997-06-17
    • US647178
    • 1996-05-09
    • Kazuhiro Okada
    • Kazuhiro Okada
    • B81B3/00G01L1/14G01L5/16G01P15/08G01P15/09G01P15/105G01P15/125G01P15/18G02L3/00
    • G01P15/18G01L1/144G01L5/165G01L5/167G01P15/0802G01P15/0922G01P15/105G01P15/125G01P2015/084Y10S73/04Y10T29/43Y10T29/49005Y10T29/49007
    • An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
    • 在第一基板的上表面上形成电极层,进行部分除去基板的处理,以使基板具有挠性。 连接到第一基板的下表面,连接第二基板。 然后,通过切割第二基板,形成工作体和基座。 另一方面,在第三基板上形成槽。 在槽的底面上形成电极层。 第三基板连接到第一基板,使得两个电极以彼此之间的预定间隔彼此面对。 最后,第一,第二和第三基板分别切断各个单元区域以分别形成独立的传感器。 当对工作体施加加速度时,第一基板弯曲。 结果,两个电极之间的距离变化。 因此,通过两个电极之间的静电电容的变化来检测施加的加速度。
    • 108. 发明授权
    • Floating mass accelerometer
    • 浮动质量加速度计
    • US5524489A
    • 1996-06-11
    • US198867
    • 1994-02-18
    • Robert D. Twigg
    • Robert D. Twigg
    • B60T8/171G01P1/12G01P15/08G01P15/093G01P15/105G01P15/18G01V1/18
    • B60T8/171G01P1/127G01P15/08G01P15/093G01P15/105G01P15/18G01V1/18
    • A floating mass accelerometer having a plurality of curved elastic members tangentially contacting a mass that is supported by a low friction surface is disclosed. Proximity sensors are located adjacent the mass and provide an output based upon the distance between the sensor and the mass as regulated by the degree of elastic member compression or extension. Acceleration forces acting upon the mass cause the mass to move in response thereto, thereby causing deflection of at least one elastic member. The change in distance between the mass and at least one proximity sensor is relayed to a digital signal processor which processes the acceleration information and sends this information to a display and/or memory unit. In a preferred embodiment, a two axis accelerometer is disclosed wherein acceleration values greater than a predetermined level are stored in memory and may be recalled later to provide an indication as to acceleration forces encountered by the device. Alternative embodiments provide for an pre-impact monitor wherein a buffer holds acceleration information for the last time period; a shipping monitor wherein acceleration forces are time-tagged for later retrieval; a seismic monitor with an optional output relay capable of remote operations.
    • 公开了一种浮动质量加速度计,其具有与由低摩擦表面支撑的质量块切向接触的多个弯曲弹性构件。 接近传感器位于质量块附近,并根据弹性构件压缩或伸展程度来调节传感器和质量之间的距离,并提供输出。 作用在质量上的加速力使质量响应于此移动,从而引起至少一个弹性构件的偏转。 将质量与至少一个接近传感器之间的距离变化中继到处理加速度信息的数字信号处理器,并将该信息发送到显示和/或存储单元。 在优选实施例中,公开了一种双轴加速度计,其中大于预定水平的加速度值被存储在存储器中,并且可以稍后调用以提供关于装置遇到的加速力的指示。 替代实施例提供一种预冲击监视器,其中缓冲器保持最后时间段的加速度信息; 运送监视器,其中加速力被时间标记以供稍后检索; 具有可选远程操作的输出继电器的地震监视器。
    • 109. 发明授权
    • Low-profile magnetohydrodynamic motion sensor for an electronic system
    • 用于电子系统的低剖面磁流体动力传感器
    • US5461919A
    • 1995-10-31
    • US141869
    • 1993-10-22
    • Darren R. Laughlin
    • Darren R. Laughlin
    • G01P3/46G01P15/08G01P15/105G11B33/08
    • G01P15/105G01P15/0891G01P3/46G11B33/08
    • Angular motion sensor for sensing angular velocity components at higher frequencies. A first lower case member open at the top thereof supports a magnet therein for establishing a magnetic field oriented parallel to a central axis of the lower case. An insulating surface covers the magnet and a conductive liquid is disposed in a channel defined by the insulating surface and the lower case sidewalls. An upper case having an insulated inner surface including a sidewall structure complementary to the lower case sidewall structure forms a lid for the channel and is insulated from the lower case. The upper case is insulated from the conductive liquid, except at a hole in the insulation lying along a central axis of the lower case and upper case. Relative motion between the liquid mass and upper and lower case structures generates a voltage potential between the upper and lower cases, representing the relative velocity.
    • 角运动传感器,用于在较高频率下感测角速度分量。 在其顶部开口的第一下壳构件在其中支撑磁体,用于建立平行于下壳体的中心轴定向的磁场。 绝缘表面覆盖磁体,并且导电液体设置在由绝缘表面和下壳体侧壁限定的通道中。 具有包括与下壳体侧壁结构互补的侧壁结构的绝缘内表面的上壳体形成用于通道的盖并且与下壳绝缘。 除了沿着下壳体和上壳体的中心轴线的绝缘体中的孔之外,上壳体与导电液体绝缘。 液体质量与上下壳体结构之间的相对运动产生上下壳体之间的电压电位,代表相对速度。