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    • 2. 发明申请
    • Method and apparatus for maskless photolithography
    • 无掩模光刻的方法和装置
    • US20060256307A1
    • 2006-11-16
    • US11398905
    • 2006-04-06
    • David Fries
    • David Fries
    • G03B27/42
    • G03F7/70291
    • A method and apparatus to create two dimensional and three dimensional structures using a maskless photolithography system that is semi-automated, directly reconfigurable, and does not require masks, templates or stencils to create each of the planes or layers on a multi layer two-dimensional or three dimensional structure. In an embodiment, the pattern generator comprises a micromirror array wherein the positioning of the mirrors in the micromirror array and the time duration of exposure can be modulated to produce gray scale patterns to photoform layers of continuously variable thickness. The desired pattern can be designed and stored using conventional computer aided drawing techniques and can be used to control the positioning of the individual mirrors in the micromirror array to reflect the corresponding desired pattern. A fixture for mounting of the substrate can be incorporated and can allow the substrate to be moved three dimensions. The fixture can be rotated in one, two, or three directions.
    • 使用半自动化,可直接重新配置的无掩模光刻系统来创建二维和三维结构的方法和装置,并且不需要掩模,模板或模板来在多层二维上形成每个平面或层 或三维结构。 在一个实施例中,图案生成器包括微镜阵列,其中可以调制微镜阵列中的反射镜的定位和曝光的持续时间,以产生灰度级图案,以形成连续可变厚度的成像层。 可以使用传统的计算机辅助绘图技术来设计和存储所需的图案,并且可以用于控制微镜阵列中的各个反射镜的定位以反映相应的期望图案。 可以结合用于安装基板的夹具,并且可以使基板移动三维。 夹具可以沿一个,两个或三个方向旋转。
    • 5. 发明申请
    • Method and apparatus for maskless photolithography
    • 无掩模光刻的方法和装置
    • US20080291418A9
    • 2008-11-27
    • US11818930
    • 2007-06-15
    • David Fries
    • David Fries
    • G03B27/42
    • G03F7/70291
    • A method and apparatus to create two dimensional and three dimensional structures using a maskless photolithography system that is semi-automated, directly reconfigurable, and does not require masks, templates or stencils to create each of the planes or layers on a multi layer two-dimensional or three dimensional structure. In an embodiment, the pattern generator comprises a micromirror array wherein the positioning of the mirrors in the micromirror array and the time duration of exposure can be modulated to produce gray scale patterns to photoform layers of continuously variable thickness. The desired pattern can be designed and stored using conventional computer aided drawing techniques and can be used to control the positioning of the individual mirrors in the micromirror array to reflect the corresponding desired pattern. A fixture for mounting of the substrate can be incorporated and can allow the substrate to be moved three dimensions. The fixture can be rotated in one, two, or three directions.
    • 使用半自动化,可直接重新配置的无掩模光刻系统来创建二维和三维结构的方法和装置,并且不需要掩模,模板或模板来在多层二维上形成每个平面或层 或三维结构。 在一个实施例中,图案生成器包括微镜阵列,其中可以调制微镜阵列中的反射镜的定位和曝光的持续时间,以产生灰度级图案,以形成连续可变厚度的成像层。 可以使用传统的计算机辅助绘图技术来设计和存储所需的图案,并且可以用于控制微镜阵列中的各个反射镜的定位以反映相应的期望图案。 可以结合用于安装基板的夹具,并且可以使基板移动三维。 夹具可以沿一个,两个或三个方向旋转。
    • 6. 发明申请
    • Phase Change on Demand Integrated Pressure Pump and Power Plant
    • 相变压力泵和发电厂
    • US20070071613A1
    • 2007-03-29
    • US11470854
    • 2006-09-07
    • David FriesChad Lembke
    • David FriesChad Lembke
    • F04F1/16
    • F04F1/16
    • A portable pressure-driven fluid pump and integrated power supply that relies on high pressure without the use of stored high pressure gases or liquids. A material transitions through a phase change in a constant volume container so that the pressure in the container increases. Programmability and sequential actuation are enabled by patterning the phase change material into the integrated device. The pressure generated may be used to activate an energy transducer such as a high pressure turbine, a piezoelectric material, and an elastic strain material. This provides a hybrid actuation system of electrical energy, pneumatic and hydraulic power. The pressure change in a constant volume container is also harnessed to provide a microbattery.
    • 便携式压力驱动流体泵和集成电源,在不使用储存的高压气体或液体的情况下,依赖于高压。 材料通过恒定容积容器中的相变而转变,使得容器中的压力增加。 通过将相变材料图案化成集成器件,能够实现可编程性和顺序驱动。 产生的压力可以用于激活诸如高压涡轮机,压电材料和弹性应变材料的能量换能器。 这提供了电能,气动和液压动力的混合动力系统。 恒定容积的容器中的压力变化也被利用来提供微电池。
    • 7. 发明申请
    • METHOD AND APPARATUS FOR MASKLESS PHOTOLITHOGRAPHY
    • 方法和装置用于MASKLESS光刻技术
    • US20060192932A1
    • 2006-08-31
    • US10408696
    • 2003-04-07
    • David Fries
    • David Fries
    • G03B27/54
    • G03F7/70291
    • A method and apparatus to create two dimensional and three dimensional structures using a maskless photolithography system that is semi-automated, directly reconfigurable, and does not require masks, templates or stencils to create each of the planes or layers on a multi layer two-dimensional or three dimensional structure. In an embodiment, the pattern generator comprises a micromirror array wherein the positioning of the mirrors in the micromirror array and the time duration of exposure can be modulated to produce gray scale patterns to photoform layers of continuously variable thickness. The desired pattern can be designed and stored using conventional computer aided drawing techniques and can be used to control the positioning of the individual mirrors in the micromirror array to reflect the corresponding desired pattern. A fixture for mounting of the substrate can be incorporated and can allow the substrate to be moved three dimensions. The fixture can be rotated in one, two, or three directions.
    • 使用半自动化,可直接重新配置的无掩模光刻系统来创建二维和三维结构的方法和装置,并且不需要掩模,模板或模板来在多层二维上形成每个平面或层 或三维结构。 在一个实施例中,图案生成器包括微镜阵列,其中可以调制微镜阵列中的反射镜的定位和曝光的持续时间,以产生灰度级图案,以形成连续可变厚度的成像层。 可以使用传统的计算机辅助绘图技术来设计和存储所需的图案,并且可以用于控制微镜阵列中的各个反射镜的定位以反映相应的期望图案。 可以结合用于安装基板的夹具,并且可以使基板移动三维。 夹具可以沿一个,两个或三个方向旋转。
    • 9. 发明申请
    • Micro-Patterned SiO2/TiO2 Films through Photo and Chemical Reactions
    • 通过照相和化学反应的微图案化的SiO2 / TiO2薄膜
    • US20070184358A1
    • 2007-08-09
    • US11539987
    • 2006-10-10
    • Xiaoling DingDavid Fries
    • Xiaoling DingDavid Fries
    • G03F1/00
    • G03F7/0043G03F7/405
    • A method for making a patterned SiO2 films over TiO2 (SiO2/TiO2) under ambient atmospheric conditions, including room temperature, through photo and chemical reactions. The method is simple, convenient and can be performed in a short period of time, typically less than two hours. The patterned TiO2 film is fabricated through photo-irradiation of a photosensitive organic-titanium film using a mask. Silica particles are generated from silicate solution by adjusting pH values to 10 to 8 with hydrochloric acid. The pre-deposited TiO2 film has a strong attraction for the SiO2 particles, leading to the instant formation of SiO2 film over the TiO2 film. The silica films are also amino-silylated with 3-aminopropyltriethoxysilane toward applications such as patternable, location-specific silica-based separation and purification.
    • 在环境大气下在TiO 2(SiO 2 / TiO 2)上制造图案化SiO 2膜的方法 条件,包括室温,通过照相和化学反应。 该方法简单,方便,可在短时间内进行,通常少于两小时。 通过使用掩模通过光敏有机钛膜的光照射来制造图案化的TiO 2膜。 通过用盐酸将pH值调节至10至8,由硅酸盐溶液产生二氧化硅颗粒。 预沉积的TiO 2膜对SiO 2颗粒具有很强的吸引力,导致在TiO 2上立即形成SiO 2膜 2 膜。 二氧化硅膜也用3-氨基丙基三乙氧基硅烷进行氨基甲硅烷基化,以应用于可图案化的位置特异性二氧化硅基分离和纯化。