会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 102. 发明申请
    • DRY-ETCHING GAS FOR SEMICONDUCTOR PROCESS
    • 用于半导体工艺的干蚀气体
    • US20080203353A1
    • 2008-08-28
    • US12013975
    • 2008-01-14
    • Hae Seok JIOok Jae ChoJae Gug RyuJong Yeol YangYoung Hoon AhnBong Suk KimDong Hyun Kim
    • Hae Seok JIOok Jae ChoJae Gug RyuJong Yeol YangYoung Hoon AhnBong Suk KimDong Hyun Kim
    • C09K13/00
    • C07C17/208C07C17/38C07C17/383C07C23/08
    • The invention is a method for continuously preparing highly pure octafluorocyclopentene for use in dry-etching processes. The method includes reacting octachlorocyclopentene with KF in a continuous manner, and purifying crude octafluorocyclopentene. In the reacting step, two KF-charged filters are installed in parallel and allowed to communicate with a reactor containing octachlorocyclopentene in an alternating manner to produce crude octafluorocyclopentene. In the purifying step, organics having lower boiling points than octafluorocyclopentene are removed, and metal ingredients and organics having boiling points higher than octafluorocyclopentene are separated to recover octafluorocyclopentene as a gas. The gaseous octafluorocyclopentene composition contains C5F8 in an amount of 99.995 vol % or higher, nitrogen in an amount of 50 vol ppm or less, oxygen in an amount of 5 vol ppm or less, water in an amount of 5 vol ppm or less, and metal ingredients in an amount of 5 wt ppb or less.
    • 本发明是用于连续制备用于干蚀刻工艺的高纯度八氟环戊烯的方法。 该方法包括使八氯环戊烯与KF连续反应,并纯化粗八氟环戊烯。 在反应步骤中,平行安装两个带有KF的过滤器,并使其与含有八氯环戊烯的反应器以交替方式连通以产生粗制八氟环戊烯。 在纯化步骤中,除去沸点低于八氟环戊烯的有机物,分离沸点高于八氟环戊烯的金属成分和有机物,以回收作为气体的八氟环戊烯。 气态八氟环戊烯组合物含有99.995体积%以上的C 5 C 5 N 8 N 8,50体积ppm以下的氮,5重量%的氧 体积ppm以下的水,5体积ppm以下的水,5重量ppm以下的金属成分。
    • 104. 发明授权
    • Dry-etching gas for semiconductor process and preparation method thereof
    • 用于半导体工艺的干蚀刻气体及其制备方法
    • US07319174B2
    • 2008-01-15
    • US11535035
    • 2006-09-25
    • Hae Seok JiOok Jae ChoJae Gug RyuJong Yeol YangYoung Hoon AhnBong Suk KimDong Hyun Kim
    • Hae Seok JiOok Jae ChoJae Gug RyuJong Yeol YangYoung Hoon AhnBong Suk KimDong Hyun Kim
    • C07C17/20C09K13/00
    • C07C17/208C07C17/38C07C17/383C07C23/08
    • The invention is a method for continuously preparing highly pure octafluorocyclopentene for use in dry-etching processes. The method includes reacting octachlorocyclopentene with KF in a continuous manner, and purifying crude octafluorocyclopentene. In the reacting step, two KF-charged filters are installed in parallel and allowed to communicate with a reactor containing octachlorocyclopentene in an alternating manner to produce crude octafluorocyclopentene. In the purifying step, organics having lower boiling points than octafluorocyclopentene are removed, and metal ingredients and organics having boiling points higher than octafluorocyclopentene are separated to recover octafluorocyclopentene as a gas. The gaseous octafluorocyclopentene composition contains C5F8 in an amount of 99.995 vol % or higher, nitrogen in an amount of 50 vol ppm or less, oxygen in an amount of 5 vol ppm or less, water in an amount of 5 vol ppm or less, and metal ingredients in an amount of 5 wt ppb or less.
    • 本发明是用于连续制备用于干蚀刻工艺的高纯度八氟环戊烯的方法。 该方法包括使八氯环戊烯与KF连续反应,并纯化粗八氟环戊烯。 在反应步骤中,平行安装两个带有KF的过滤器,并使其与含有八氯环戊烯的反应器以交替方式连通以产生粗制八氟环戊烯。 在纯化步骤中,除去沸点低于八氟环戊烯的有机物,分离沸点高于八氟环戊烯的金属成分和有机物,以回收作为气体的八氟环戊烯。 气态八氟环戊烯组合物含有99.995体积%以上的C 5 C 5 N 8 N 8,50体积ppm以下的氮,5重量%的氧 体积ppm以下的水,5体积ppm以下的水,5重量ppm以下的金属成分。
    • 107. 发明授权
    • System for supporting fire fighting for building and fire fighting
method using the same
    • 支持消防建筑和消防方式的系统
    • US5905450A
    • 1999-05-18
    • US7819
    • 1998-01-15
    • Dong Hyun KimByung Tae JangJung Sik KimSoo Ile ParkJu Wan KimHae Dong Kim
    • Dong Hyun KimByung Tae JangJung Sik KimSoo Ile ParkJu Wan KimHae Dong Kim
    • G08B25/00G08B23/00
    • A62B3/00
    • A system for supporting a fire fighting for a building and a fire fighting method using the same which are capable of more effectively performing a fire fighting operation by providing, in real time. The system includes a tracker for extracting a moving direction and speed of a fire fighter in a building, a see-through type HMD device for extracting a seeing direction of the fire fighter and providing a current position information of the fire fighter including a graphic and text information to the fire fighter, an externally connected PC for storing an information database corresponding to a structure of a building and information related thereto, tracing a position of the fire fighter in the building based on the moving direction of the fire fighter extracted by the tracker and the information database, judging an additional information with respect to a structure of the interior of the building and the structure which are seen by the fire fighter based on the seeing direction information of the fire fighter extracted by the see-through HMD device and the information database, and transmitting the same to the see-through HMD device, and a wireless data transmitting and receiving apparatus for communicating between the tracker, the see-through HMD device and the externally connected computer.
    • 用于支持建筑物的消防的系统和使用该系统的消防方法,其能够通过实时提供能够更有效地执行消防操作。 该系统包括用于提取建筑物中的消防员的移动方向和速度的跟踪器,用于提取消防员的观察方向的透视型HMD装置,并提供包括图形的消防员的当前位置信息,以及 向消防员提供文本信息,外部连接的PC,用于存储与建筑物的结构相对应的信息数据库及与其相关的信息,基于由消防员提取的消防员的移动方向,在消防员的位置追踪消防员的位置 跟踪器和信息数据库,根据由穿透HMD装置提取的消防员的观察方向信息,判断关于建筑物内部结构和消防员看到的结构的附加信息,以及 信息数据库,并将其发送到直通式HMD设备,以及无线数据发送和接收 用于在跟踪器,透视HMD设备和外部连接的计算机之间进行通信的设备。