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1. 发明申请

US20080203353A1 DRY-ETCHING GAS FOR SEMICONDUCTOR PROCESS 审中-公开
标题翻译：用于半导体工艺的干蚀气体
公开(公告)号：US20080203353A1
公开(公告)日：2008-08-28
申请号：US12013975
申请日：2008-01-14
申请人： Hae Seok JI , Ook Jae Cho , Jae Gug Ryu , Jong Yeol Yang , Young Hoon Ahn , Bong Suk Kim , Dong Hyun Kim
发明人： Hae Seok JI , Ook Jae Cho , Jae Gug Ryu , Jong Yeol Yang , Young Hoon Ahn , Bong Suk Kim , Dong Hyun Kim
IPC分类号： C09K13/00
CPC分类号： C07C17/208 , C07C17/38 , C07C17/383 , C07C23/08
摘要： The invention is a method for continuously preparing highly pure octafluorocyclopentene for use in dry-etching processes. The method includes reacting octachlorocyclopentene with KF in a continuous manner, and purifying crude octafluorocyclopentene. In the reacting step, two KF-charged filters are installed in parallel and allowed to communicate with a reactor containing octachlorocyclopentene in an alternating manner to produce crude octafluorocyclopentene. In the purifying step, organics having lower boiling points than octafluorocyclopentene are removed, and metal ingredients and organics having boiling points higher than octafluorocyclopentene are separated to recover octafluorocyclopentene as a gas. The gaseous octafluorocyclopentene composition contains C5F8 in an amount of 99.995 vol % or higher, nitrogen in an amount of 50 vol ppm or less, oxygen in an amount of 5 vol ppm or less, water in an amount of 5 vol ppm or less, and metal ingredients in an amount of 5 wt ppb or less.
摘要翻译：本发明是用于连续制备用于干蚀刻工艺的高纯度八氟环戊烯的方法。该方法包括使八氯环戊烯与KF连续反应，并纯化粗八氟环戊烯。在反应步骤中，平行安装两个带有KF的过滤器，并使其与含有八氯环戊烯的反应器以交替方式连通以产生粗制八氟环戊烯。在纯化步骤中，除去沸点低于八氟环戊烯的有机物，分离沸点高于八氟环戊烯的金属成分和有机物，以回收作为气体的八氟环戊烯。气态八氟环戊烯组合物含有99.995体积％以上的C 5 C 5 N 8 N 8，50体积ppm以下的氮，5重量％的氧体积ppm以下的水，5体积ppm以下的水，5重量ppm以下的金属成分。

2. 发明授权

US07319174B2 Dry-etching gas for semiconductor process and preparation method thereof 有权
标题翻译：用于半导体工艺的干蚀刻气体及其制备方法
公开(公告)号：US07319174B2
公开(公告)日：2008-01-15
申请号：US11535035
申请日：2006-09-25
申请人： Hae Seok Ji , Ook Jae Cho , Jae Gug Ryu , Jong Yeol Yang , Young Hoon Ahn , Bong Suk Kim , Dong Hyun Kim
发明人： Hae Seok Ji , Ook Jae Cho , Jae Gug Ryu , Jong Yeol Yang , Young Hoon Ahn , Bong Suk Kim , Dong Hyun Kim
IPC分类号： C07C17/20 , C09K13/00
CPC分类号： C07C17/208 , C07C17/38 , C07C17/383 , C07C23/08
摘要： The invention is a method for continuously preparing highly pure octafluorocyclopentene for use in dry-etching processes. The method includes reacting octachlorocyclopentene with KF in a continuous manner, and purifying crude octafluorocyclopentene. In the reacting step, two KF-charged filters are installed in parallel and allowed to communicate with a reactor containing octachlorocyclopentene in an alternating manner to produce crude octafluorocyclopentene. In the purifying step, organics having lower boiling points than octafluorocyclopentene are removed, and metal ingredients and organics having boiling points higher than octafluorocyclopentene are separated to recover octafluorocyclopentene as a gas. The gaseous octafluorocyclopentene composition contains C5F8 in an amount of 99.995 vol % or higher, nitrogen in an amount of 50 vol ppm or less, oxygen in an amount of 5 vol ppm or less, water in an amount of 5 vol ppm or less, and metal ingredients in an amount of 5 wt ppb or less.
摘要翻译：本发明是用于连续制备用于干蚀刻工艺的高纯度八氟环戊烯的方法。该方法包括使八氯环戊烯与KF连续反应，并纯化粗八氟环戊烯。在反应步骤中，平行安装两个带有KF的过滤器，并使其与含有八氯环戊烯的反应器以交替方式连通以产生粗制八氟环戊烯。在纯化步骤中，除去沸点低于八氟环戊烯的有机物，分离沸点高于八氟环戊烯的金属成分和有机物，以回收作为气体的八氟环戊烯。气态八氟环戊烯组合物含有99.995体积％以上的C 5 C 5 N 8 N 8，50体积ppm以下的氮，5重量％的氧体积ppm以下的水，5体积ppm以下的水，5重量ppm以下的金属成分。

3. 发明授权

US07504547B2 Method of preparing perfluoroalkadiene 有权
标题翻译：制备全氟二烯的方法
公开(公告)号：US07504547B2
公开(公告)日：2009-03-17
申请号：US11797355
申请日：2007-05-02
申请人： Hae-Seok Ji , Ook-Jae Cho , Jae-Gug Ryu , Young-Hoon Ahn , Bong-Suk Kim , Dong-Hyun Kim
发明人： Hae-Seok Ji , Ook-Jae Cho , Jae-Gug Ryu , Young-Hoon Ahn , Bong-Suk Kim , Dong-Hyun Kim
IPC分类号： C07C17/00 , C07C21/18
CPC分类号： C07C17/23 , C07C21/19
摘要： Disclosed herein is a method of preparing a perfluoroalkadiene. A dihaloperfluorocarbon used as a starting material is added dropwise to a nonpolar organic solvent, a metal powder and an organic metal compound. The dihaloperfluorocarbon is slowly added dropwise in a temperature range from 30° C. to 150° C. for a certain period of time. Moreover, the nonpolar organic solvent used may be benzene, toluene, xylene, etc., and the organic metal compound is used by being dissolved in ethyl ether or tetrahydrofuran at a concentration of 1 to 3M. The metal powder used may be Mg, Zn, Cd, etc.
摘要翻译：本文公开了一种制备全氟二烯的方法。将用作起始原料的二卤碳氟化合物滴加到非极性有机溶剂，金属粉末和有机金属化合物中。在30℃至150℃的温度范围内缓慢滴加二卤氟碳化氢一段时间。此外，所用的非极性有机溶剂可以是苯，甲苯，二甲苯等，有机金属化合物以1〜3M的浓度溶解于乙醚或四氢呋喃中使用。使用的金属粉末可以是Mg，Zn，Cd等

4. 发明申请

US20070265478A1 DRY-ETCHING GAS FOR SEMICONDUCTOR PROCESS AND PREPARATION METHOD THEREOF 有权
标题翻译：用于半导体工艺的干式气体及其制备方法
公开(公告)号：US20070265478A1
公开(公告)日：2007-11-15
申请号：US11535035
申请日：2006-09-25
申请人： Hae Seok JI , Ook Jae Cho , Jae Gug Ryu , Jong Yeol Yang , Young Hoon Ahn , Bong Suk Kim , Dong Hyun Kim
发明人： Hae Seok JI , Ook Jae Cho , Jae Gug Ryu , Jong Yeol Yang , Young Hoon Ahn , Bong Suk Kim , Dong Hyun Kim
IPC分类号： C07C17/20
CPC分类号： C07C17/208 , C07C17/38 , C07C17/383 , C07C23/08
摘要： The invention is a method for continuously preparing highly pure octafluorocyclopentene for use in dry-etching processes. The method includes reacting octachlorocyclopentene with KF in a continuous manner, and purifying crude octafluorocyclopentene. In the reacting step, two KF-charged filters are installed in parallel and allowed to communicate with a reactor containing octachlorocyclopentene in an alternating manner to produce crude octafluorocyclopentene. In the purifying step, organics having lower boiling points than octafluorocyclopentene are removed, and metal ingredients and organics having boiling points higher than octafluorocyclopentene are separated to recover octafluorocyclopentene as a gas. The gaseous octafluorocyclopentene composition contains C5F8 in an amount of 99.995 vol % or higher, nitrogen in an amount of 50 vol ppm or less, oxygen in an amount of 5 vol ppm or less, water in an amount of 5 vol ppm or less, and metal ingredients in an amount of 5 wt ppb or less.
摘要翻译：本发明是用于连续制备用于干蚀刻工艺的高纯度八氟环戊烯的方法。该方法包括使八氯环戊烯与KF连续反应，并纯化粗八氟环戊烯。在反应步骤中，平行安装两个带有KF的过滤器，并使其与含有八氯环戊烯的反应器以交替方式连通以产生粗制八氟环戊烯。在纯化步骤中，除去沸点低于八氟环戊烯的有机物，分离沸点高于八氟环戊烯的金属成分和有机物，以回收作为气体的八氟环戊烯。气态八氟环戊烯组合物含有99.995体积％以上的C 5 C 5 N 8 N 8，50体积ppm以下的氮，5重量％的氧体积ppm以下的水，5体积ppm以下的水，5重量ppm以下的金属成分。

5. 发明申请

US20080262195A1 Method of preparing perfluoroalkadiene 有权
标题翻译：制备全氟二烯的方法
公开(公告)号：US20080262195A1
公开(公告)日：2008-10-23
申请号：US11797355
申请日：2007-05-02
申请人： Hae-Seok Ji , Ook-Jae Cho , Jae-Gug Ryu , Young-Hoon Ahn , Bong-Suk Kim , Dong-Hyun Kim
发明人： Hae-Seok Ji , Ook-Jae Cho , Jae-Gug Ryu , Young-Hoon Ahn , Bong-Suk Kim , Dong-Hyun Kim
IPC分类号： C08G61/00 , C08G79/00
CPC分类号： C07C17/23 , C07C21/19
摘要： Disclosed herein is a method of preparing a perfluoroalkadiene. A dihaloperfluorocarbon used as a starting material is added dropwise to a nonpolar organic solvent, a metal powder and an organic metal compound. The dihaloperfluorocarbon is slowly added dropwise in a temperature range from 30° C. to 150° C. for a certain period of time. Moreover, the nonpolar organic solvent used may be benzene, toluene, xylene, etc., and the organic metal compound is used by being dissolved in ethyl ether or tetrahydrofuran at a concentration of 1 to 3M. The metal powder used may be Mg, Zn, Cd, etc.
摘要翻译：本文公开了一种制备全氟二烯的方法。将用作起始原料的二卤碳氟化合物滴加到非极性有机溶剂，金属粉末和有机金属化合物中。在30℃至150℃的温度范围内缓慢滴加二卤氟碳化氢一段时间。此外，所用的非极性有机溶剂可以是苯，甲苯，二甲苯等，有机金属化合物以1〜3M的浓度溶解于乙醚或四氢呋喃中使用。使用的金属粉末可以是Mg，Zn，Cd等。

6. 发明授权

US6162955A Manufacturing method for perfluoroethane 有权
标题翻译：全氟乙烷的制造方法
公开(公告)号：US6162955A
公开(公告)日：2000-12-19
申请号：US591852
申请日：2000-06-12
申请人： Doo-Chan Na , Ook-Jae Cho , Jae-Gug Ryu
发明人： Doo-Chan Na , Ook-Jae Cho , Jae-Gug Ryu
IPC分类号： B01J27/128 , C07B61/00 , C07C17/10 , C07C19/08
CPC分类号： C07C17/10 , C07C19/08
摘要： A method for producing a high purity of perfluoroethane from hydrofluoroethane (C.sub.2 F.sub.x H.sub.y 1.ltoreq.x, 1.ltoreq.y.ltoreq.5, x+y=6). Cobalt difluoride (CoF.sub.2) as a catalyst is activated into cobalt trifluoride (CoF.sub.3) as a result of the contact reaction with fluorine gas in a reactor. The reactor is purged by removing the fluorine gas remaining in the reactor. The remaining gas is allowed to react with sulfur to give sulfur hexafluoride (SF.sub.6) which is then removed. The hydrofluoroethane is converted into perfluoroethane as a result of the catalyst of the activated cobalt trifluoride at 300-350.degree. C. The feedstock is safer and less corrosive than triple bond-containing compounds such as acetylene. In the method of the present invention, the formation of CF.sub.4 is extremely restrained and no inert gases are employed, so that a very high purity of C.sub.2 F.sub.6 can be obtained at a high conversion rate.
摘要翻译：一种从氢氟乙烷制备高纯度全氟乙烷的方法（C2FxHy1，x，1，y = 5，x + y = 6）。作为催化剂的二氟化碳（CoF 2）由于与反应器中的氟气接触反应而被活化成三氟化钴（CoF 3）。通过除去残留在反应器中的氟气来清除反应器。剩余的气体与硫反应得到六氟化硫（SF6），然后将其除去。由于活化的三氟化钴的催化剂在300-350℃，氢氟乙烷被转化为全氟乙烷。原料比三炔化合物如乙炔更安全，腐蚀性更差。在本发明的方法中，CF4的形成被极度地抑制，并且不使用惰性气体，从而可以以高转化率获得非常高纯度的C2F6。

7. 发明授权

US06841705B2 Method of producing difluoromethane 失效
标题翻译：生产二氟甲烷的方法
公开(公告)号：US06841705B2
公开(公告)日：2005-01-11
申请号：US10372430
申请日：2003-02-24
申请人： Iikubo Yuichi , Hae Seok Ji , Ook Jae Cho
发明人： Iikubo Yuichi , Hae Seok Ji , Ook Jae Cho
IPC分类号： C07C17/20 , C07C19/08 , C07C17/00
CPC分类号： C07C19/08 , C07C17/206 , C07C19/10
摘要： A method of producing difluoromethane (HFC-32), which includes firstly reacting methylene chloride with hydrogen fluoride in gas phase at 280 to 340° C. in the presence of a fluorination catalyst to produce chlorofluoro methane, and secondly reacting the chlorofluoro methane with hydrogen fluoride in liquid phase at 60 to 80° C. in the presence of an antimony chloride catalyst. The method is advantageous in that HFC-32 is produced in high yield under mild reaction conditions using a relatively small amount of energy.
摘要翻译：一种生产二氟甲烷（HFC-32）的方法，其包括在氟化催化剂的存在下，首先使二氯甲烷与氟化氢在气相中在280〜340℃下反应，生成氯氟甲烷，其次使氯氟甲烷与氢气反应氟化物在液相中在60至80℃下在氯化锑催化剂存在下进行。该方法的优点在于，在温和的反应条件下使用相对少量的能量可以高产率生产HFC-32。

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