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91. 发明授权

US06224952B1 Electrostatic-erasing abrasion-proof coating and method for forming the same 失效
标题翻译：静电消除耐磨涂层及其形成方法
公开(公告)号：US06224952B1
公开(公告)日：2001-05-01
申请号：US08847493
申请日：1997-04-25
申请人： Kenji Itoh
发明人： Kenji Itoh
IPC分类号： C23C1626
CPC分类号： C04B41/85 , C03C17/3441 , C03C17/3488 , C03C17/42 , C04B41/5001 , C04B41/52 , C04B41/89 , C23C16/26 , C23C16/509 , H01L31/02161 , Y10S427/103 , Y10S427/104 , Y10T428/12931 , Y10T428/24983 , Y10T428/30
摘要： An abrasion-proof and static-erasing coating is formed on the contact surface of a contact image sensor. The coating comprises a first film having a high hardness and a low conductivity, a second film formed on the first film and having a low hardness and a high conductivity, and a third film having a high hardness and a high resistivity providing an abrasion-proof insulating external surface.
摘要翻译：在接触图像传感器的接触表面上形成耐磨损和防静电涂层。涂层包括具有高硬度和低导电性的第一膜，形成在第一膜上并具有低硬度和高导电性的第二膜，以及具有高硬度和高电阻率的第三膜，提供耐磨性绝缘外表面。

92. 发明授权

US6086962A Method for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source 有权
标题翻译：从霍尔电流离子源沉积类金刚石碳和掺杂硅的金刚石碳涂层的方法
公开(公告)号：US6086962A
公开(公告)日：2000-07-11
申请号：US243913
申请日：1999-02-03
申请人： Leonard Joseph Mahoney , David Ward Brown , Rudolph Hugo Petrmichl
发明人： Leonard Joseph Mahoney , David Ward Brown , Rudolph Hugo Petrmichl
IPC分类号： H05H1/24 , C23C14/06 , C23C14/32 , C23C14/48 , C23C16/26 , C23C16/40 , C23C16/48 , G11B5/84 , H01J37/32 , H01L21/203 , H01L21/265 , H01L21/302 , H05H1/46
CPC分类号： C23C16/401 , C23C16/26 , C23C16/486 , G11B5/8408 , Y10S427/103 , Y10S427/104
摘要： A unique Hall-Current ion source apparatus is used for direct ion beam deposition of DLC coatings with hardness values greater than 10 GPa and at deposition rates greater than 10 .ANG. per second. This ion source has a unique fluid-cooled anode with a shadowed gap through which ion sources feed gases are introduced while depositing gases are injected into the plasma beam. The shadowed gap provides a well maintained, electrically active area at the anode surface which stays relatively free of non-conductive deposits. The anode discharge region is insulatively sealed to prevent discharges from migrating into the interior of the ion source. A method is described in which a substrate is disposed within a vacuum chamber, coated with a coating of DLC or Si-DLC at a high deposition rate using a Hall-Current ion source operating on carbon-containing or carbon-containing and silicon-containing precursor gases, respectively. The method is particularly advantageous for producing thin, hard, wear resistant DLC and Si-DLC coatings for magnetic transducers and media used for magnetic data storage applications.
摘要翻译：独特的霍尔电流离子源设备用于DLC涂层的直接离子束沉积，其硬度值大于10GPa，沉积速率大于10 ANGSTROM /秒。该离子源具有独特的流体冷却阳极，其具有阴影间隙，通过该阴极间隙引入离子源进料气体，同时将等离子体束注入沉积气体。阴影间隙在阳极表面处提供良好维护的电活性区域，其保持相对不含非导电沉积物。阳极放电区被绝对密封，以防止放电进入离子源的内部。描述了一种方法，其中使用在含碳或含碳和含硅的操作的霍尔电流离子源，将衬底设置在真空室内，以高沉积速率涂覆DLC或Si-DLC的涂层前体气体。该方法特别有利于生产用于磁性数据存储应用的磁性换能器和介质的薄的，硬的耐磨DLC和Si-DLC涂层。

93. 发明授权

US5981000A Method for fabricating a thermally stable diamond-like carbon film 失效
标题翻译：制造热稳定类金刚石碳膜的方法
公开(公告)号：US5981000A
公开(公告)日：1999-11-09
申请号：US058651
申请日：1998-04-10
申请人： Alfred Grill , Christopher Vincent Jahnes , Vishnubhai Vitthalbhai Patel
发明人： Alfred Grill , Christopher Vincent Jahnes , Vishnubhai Vitthalbhai Patel
IPC分类号： C23C16/26 , C23C16/509 , C23C16/56 , H01L21/314 , B05D3/06
CPC分类号： C23C16/5096 , C23C16/26 , C23C16/56 , H01L21/3146 , Y10S427/103 , Y10S427/104
摘要： A method for fabricating a thermally stable carbon-based low dielectric constant film such as a hydrogenated amorphous carbon film or a diamond-like carbon film in a parallel plate chemical vapor deposition process utilizing plasma enhanced chemical vapor deposition process is disclosed. Electronic devices containing insulating layers of thermally stable carbon-based low dielectric constant materials that are prepared by the method are further disclosed. In order to render the carbon-based low dielectric constant film thermally stable, i.e., at a temperature of at least 400.degree. C., the films are heat treated at a temperature of not less than 350.degree. C. for at least 0.5 hour. To enable the fabrication of thermally stable carbon-based low dielectric constant film, specific precursor materials such as cyclic hydrocarbons should be used, for instance, cyclohexane or benzene. The geometry of the chemical vapor deposition chamber is important in making the present invention thermally stable low dielectric constant films in order to achieve a specific bias voltage on the substrate onto which the electronic structure is formed.
摘要翻译：公开了一种利用等离子体增强化学气相沉积工艺在平行板化学气相沉积工艺中制造热稳定性碳基低介电常数膜的方法，例如氢化无定形碳膜或类金刚石碳膜。还公开了通过该方法制备的含有热稳定性碳基低介电常数材料绝缘层的电子器件。为了使碳基低介电常数膜热稳定，即在至少400℃的温度下，将膜在不低于350℃的温度下热处理至少0.5小时。为了制造热稳定性的碳系低介电常数膜，可以使用环状烃等环状烃等特定的前体材料。化学气相沉积室的几何形状对于使本发明热稳定的低介电常数膜是重要的，以便在其上形成电子结构的基板上实现特定的偏置电压。

94. 发明授权

US5952060A Use of carbon-based films in extending the lifetime of substrate processing system components 失效
标题翻译：使用碳基膜延长基板加工系统部件的使用寿命
公开(公告)号：US5952060A
公开(公告)日：1999-09-14
申请号：US664948
申请日：1996-06-14
申请人： Kramadhati Ravi
发明人： Kramadhati Ravi
IPC分类号： C23C16/44 , B01J19/02 , C23C16/27 , H01L21/205 , H01L21/302 , H01L21/3065 , H05H1/00
CPC分类号： C23C16/4404 , C23C16/26 , Y10S427/103
摘要： An apparatus for processing substrates that includes a processing chamber having an interior surface at least partially coated with a carbon-based coating. The carbon-based coating protects the interior of the chamber from etching gases and other reactants used during substrate processing. The coating also resists accumulation of residues, does not generate particulates and seals in impurities residing in the coated materials. In preferred embodiments the carbon-based coating is either diamond or a diamond-like carbon (DLC) coating. Also described is a process for protecting a processing chamber's interior surface from the reactants used in substrate processing by coating at least portions of the surface with such a carbon-based coating.
摘要翻译：一种用于处理基板的设备，其包括具有至少部分涂覆有碳基涂层的内表面的处理室。碳基涂层保护室内部不会侵蚀衬底处理期间使用的气体和其他反应物。涂层也抵抗残留物的积聚，不会在涂覆材料中的杂质中产生颗粒和密封。在优选的实施方案中，碳基涂层是金刚石或类金刚石碳（DLC）涂层。还描述了通过用这种碳基涂层涂覆表面的至少一部分来保护处理室的内表面免受用于基板加工的反应物的过程。

95. 发明授权

US5931368A Long life bonding tool 失效
标题翻译：长寿命焊接工具
公开(公告)号：US5931368A
公开(公告)日：1999-08-03
申请号：US828914
申请日：1997-03-28
申请人： Ilan Hadar , Beni Sonnenreich
发明人： Ilan Hadar , Beni Sonnenreich
IPC分类号： B23K20/00 , C23C14/06 , C23C14/35 , C23C14/50 , H01L21/00 , H05K13/06
CPC分类号： C23C14/50 , B23K20/005 , C23C14/06 , C23C14/35 , H01L24/78 , H01L2224/45015 , H01L2224/45144 , H01L2224/78302 , H01L2224/78313 , H01L2224/78318 , H01L24/45 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/0104 , H01L2924/01042 , H01L2924/01051 , H01L2924/01058 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01076 , H01L2924/01079 , H01L2924/01082 , H01L2924/04941 , H01L2924/09701 , H01L2924/20752 , Y10S427/103 , Y10S427/106
摘要： The present invention relates to post manufacturing operations for improving the working life of known bonding tools such as capillaries, wedges and single point TAB tools of the type used in the semiconductor industry to make fine wire or TAB finger interconnections. After the desired bonding tool is manufactured to predetermined specifications, dimensions and tolerances, it is placed in a sputtering chamber with hard target material with an ionizing gas. A controlled volume of sputtered hard material is generated at high temperature by plasma ion bombardment and deposited onto the working face of the bonding tool while the tool is held at a temperature that prevents distortion. A very thin amorphous hard layer is bonded onto the working face of the bonding tool which increases the working life of most tools by an order of magnitude and there is no requirement for additional processing.
摘要翻译：本发明涉及用于提高诸如用于半导体工业中的类型的毛细管，楔形物和单点TAB工具的已知接合工具的工作寿命的后制造操作，以制造细线或TAB手指互连。在将期望的焊接工具制造成预定规格，尺寸和公差之后，将其放置在具有电离气体的具有硬靶材料的溅射室中。通过等离子体离子轰击在高温下产生受控体积的溅射硬质材料，并将其保存在防止变形的温度下，并沉积到接合工具的工作面上。非常薄的无定形硬质层被粘合到粘合工具的工作面上，这使得大多数工具的使用寿命提高了一个数量级，并且不需要额外的加工。

96. 发明授权

US5648127A Method of applying, sculpting, and texturing a coating on a substrate and for forming a heteroepitaxial coating on a surface of a substrate 失效
标题翻译：在基材上施加，雕刻和纹理化涂层并在基材表面上形成异质外延涂层的方法
公开(公告)号：US5648127A
公开(公告)日：1997-07-15
申请号：US465589
申请日：1995-06-05
申请人： Manuel C. Turchan , Pravin Mistry
发明人： Manuel C. Turchan , Pravin Mistry
IPC分类号： B81C99/00 , C23C14/06 , C23C14/22 , C23C14/28 , C23C16/26 , C23C16/27 , C23C16/44 , C23C26/00 , C30B23/02 , C30B25/10 , C30B25/18 , C08J7/18
CPC分类号： C30B25/18 , C23C14/0605 , C23C14/22 , C23C14/28 , C23C16/26 , C23C16/27 , C23C16/4418 , C23C26/00 , C30B23/02 , C30B25/105 , F41A21/04 , F16C33/62 , Y10S427/103 , Y10S427/104
摘要： Energy, such as from one or more lasers, is directed at the surface of a substrate to mobilize and vaporize a constituent element (e.g., carbide) within the substrate (e.g., steel). The vaporized constituent element is reacted by the energy to alter its physical structure (e.g., from carbon to diamond) to that of a composite material which is diffused back into the substrate as a composite material. An additional secondary element, which can be the same as or different from the constituent element, may optionally be directed (e.g., sprayed) onto the substrate to augment, enhance and/or modify the formation of the composite material, as well as to supply sufficient or additional material for fabricating one or more coatings on the surface of the substrate. The process can be carried out in an ambient environment (e.g., without a vacuum), and without pre-heating or post-cooling of the substrate. Articles formed by the disclosed processes are described, including three-dimensional objects.
摘要翻译：诸如来自一个或多个激光器的能量被引导到衬底的表面以便移动和汽化衬底（例如钢）内的构成元件（例如，碳化物）。蒸发的构成元素通过能量反应以改变其物理结构（例如，从碳到金刚石）到作为复合材料漫反射到基底中的复合材料的物理结构。另外可以与构成元件相同或不同的次要元件可任选地被引导（例如喷涂）到基底上以增强，增强和/或改变复合材料的形成，以及供应用于在衬底的表面上制造一个或多个涂层的足够的或附加的材料。该方法可以在周围环境（例如，没有真空）中进行，并且不需要对基材进行预热或后冷却。描述由所公开的方法形成的物品，包括三维物体。

97. 发明授权

US5635245A Process of making abrasion wear resistant coated substrate product 失效
标题翻译：制造耐磨损涂层基材的工艺
公开(公告)号：US5635245A
公开(公告)日：1997-06-03
申请号：US588530
申请日：1996-01-18
申请人： Fred M. Kimock , Bradley J. Knapp , Steven J. Finke
发明人： Fred M. Kimock , Bradley J. Knapp , Steven J. Finke
IPC分类号： B32B17/06 , C03C17/06 , C03C17/34 , C03C17/36 , C23C14/02 , C23C14/06 , C23C14/08 , C23C14/10 , C23C14/18 , C23C16/02 , C23C16/26 , G02B1/10 , C23C16/00
CPC分类号： C03C17/3613 , B32B17/06 , C03C17/06 , C03C17/3417 , C03C17/3435 , C03C17/3441 , C03C17/3452 , C03C17/347 , C03C17/3476 , C03C17/36 , C03C17/3618 , C03C17/3621 , C03C17/3626 , C03C17/3628 , C03C17/3634 , C03C17/3642 , C23C14/02 , C23C14/021 , C23C14/024 , C23C14/025 , C23C14/06 , C23C14/0605 , C23C14/0629 , C23C14/0635 , C23C14/0641 , C23C14/0647 , C23C14/0676 , C23C14/08 , C23C14/081 , C23C14/082 , C23C14/083 , C23C14/086 , C23C14/10 , C23C14/18 , C23C16/0227 , C23C16/0272 , C23C16/0281 , C23C16/26 , G02B1/105 , C03C2217/734 , C03C2217/78 , Y10S427/103 , Y10S428/913 , Y10T428/24975 , Y10T428/265 , Y10T428/30
摘要： The coated substrate product finds particular application in eyeglass and sunglass lenses, architectural glass, analytical instrument windows, automotive windshields and laser bar code scanners for use in retail stores and supermarkets. The product has greatly improved wear resistance for severe abrasive environments and comprises a substantially optically transparent substrate, one or more chemically vapor deposited interlayers bonded to the substrate and a chemically vapor deposited outer layer of optically transparent or substantially optically transparent hard and low friction material bonded to the interlayer and away from the substrate.
摘要翻译：涂覆的基材产品特别适用于眼镜和太阳镜，建筑玻璃，分析仪器窗，汽车挡风玻璃和激光条码扫描仪，用于零售商店和超市。该产品在严格的磨蚀环境中大大改善了耐磨性，并且包括基本上光学透明的基底，一个或多个结合到基底的化学气相沉积的中间层和化学气相沉积的光学透明或基本上光学透明的硬和低摩擦材料的外层，到中间层并远离基板。

98. 发明授权

US5366556A Process and apparatus for production of diamond-like films 失效
标题翻译：用于生产类金刚石薄膜的方法和设备
公开(公告)号：US5366556A
公开(公告)日：1994-11-22
申请号：US821416
申请日：1982-01-14
申请人： Robert Prince , Elisa Bourdon
发明人： Robert Prince , Elisa Bourdon
IPC分类号： C23C14/06 , C23C14/28 , C23C14/54 , C23C14/00
CPC分类号： C23C14/28 , C23C14/0605 , C23C14/54 , Y10S427/103
摘要： A process for production of diamond-like films comprising the steps of physically ablating a source of carbon in the vicinity of a substrate such that a carbon film grows on the substrate through bonding of carbon atoms in graphitic form and aliphatic form; and physically discriminating the carbon film during growth thereof by supressing or etching the graphitic form within the carbon film while permitting the aliphatic form to remain thereby resulting in a diamond-like film.
摘要翻译：一种用于生产金刚石薄膜的方法，包括以下步骤：物理消除基底附近的碳源，使得碳膜通过石墨形式和脂族形式的碳原子键合而在基底上生长; 并且通过抑制或蚀刻碳膜内的石墨形式，在生长期间物理地区分碳膜，同时允许脂族形式保留，从而形成类金刚石膜。

99. 发明授权

US5268217A Abrasion wear resistant coated substrate product 失效
标题翻译：磨损耐磨涂层基材产品
公开(公告)号：US5268217A
公开(公告)日：1993-12-07
申请号：US924297
申请日：1992-08-03
申请人： Fred M. Kimock , Bradley J. Knapp , Steven J. Finke
发明人： Fred M. Kimock , Bradley J. Knapp , Steven J. Finke
IPC分类号： B32B18/00 , B32B17/06 , C03C17/06 , C03C17/34 , C03C17/36 , C23C14/02 , C23C14/06 , C23C14/08 , C23C14/10 , C23C14/18 , C23C16/00 , C23C16/02 , C23C16/26 , C23C16/27 , G02B1/10
CPC分类号： C23C14/06 , B32B17/06 , C03C17/06 , C03C17/3417 , C03C17/3435 , C03C17/3441 , C03C17/3452 , C03C17/347 , C03C17/3476 , C03C17/36 , C03C17/3613 , C03C17/3618 , C03C17/3621 , C03C17/3626 , C03C17/3628 , C03C17/3634 , C03C17/3642 , C23C14/02 , C23C14/021 , C23C14/024 , C23C14/025 , C23C14/0605 , C23C14/0629 , C23C14/0635 , C23C14/0641 , C23C14/0647 , C23C14/0676 , C23C14/08 , C23C14/081 , C23C14/082 , C23C14/083 , C23C14/086 , C23C14/10 , C23C14/18 , C23C16/0227 , C23C16/0272 , C23C16/0281 , C23C16/26 , G02B1/105 , C03C2217/734 , C03C2217/78 , Y10S427/103 , Y10S428/913 , Y10T428/24975 , Y10T428/265 , Y10T428/30
摘要： The coated substrate product finds particular application in eyeglass and sunglass lenses, architectural glass, analytical instrument windows, automotive windshields and laser bar code scanners for use in retail stores and supermarkets. The product has greatly improved wear resistance for severe abrasive environments and comprises a substantially optically transparent substrate, a chemicaly vapor deposited first interlayer bonded to the substrate and a chemically vapor deposited outer layer of substantially optically transparent diamond-like carbon bonded to the interlayer and away from the substrate.
摘要翻译：涂覆的基材产品特别适用于眼镜和太阳镜，建筑玻璃，分析仪器窗，汽车挡风玻璃和激光条码扫描仪，用于零售商店和超市。该产品极大地改善了严酷的磨蚀环境的耐磨性，并且包括基本上光学透明的基材，结合到基材上的化学气相沉积的第一中间层和结合到中间层并远离的基本上光学透明的类金刚石碳的化学气相沉积外层从底物。

100. 发明授权

US5242710A Methods for making self-supporting composite bodies and articles produced thereby 失效
标题翻译：制造自支撑复合体及其制品的方法
公开(公告)号：US5242710A
公开(公告)日：1993-09-07
申请号：US880479
申请日：1992-05-06
申请人： Terry D. Claar , Vilupanur A. Ravi , Philip J. Roach
发明人： Terry D. Claar , Vilupanur A. Ravi , Philip J. Roach
IPC分类号： C04B35/65 , C04B41/50 , C04B41/87 , C23C10/08 , C23C10/16
CPC分类号： C04B41/87 , C04B35/652 , C04B41/5053 , C04B41/5057 , C23C10/08 , C23C10/16 , Y10S427/103
摘要： This invention relates generally to a novel directed metal oxidation process which is utilized to produce self-supporting bodies. In some of the more specific aspects of the invention, a parent metal vapor is induced to react with a solid oxidant to result in the directed growth of a reaction product which is formed from a reaction between the parent metal vapor and the solid oxidant. The inventive process can be utilized to form bodies having substantially homogeneous compositions, graded compositions, and macrocomposite bodies.
摘要翻译：本发明一般涉及用于生产自支撑体的新颖的定向金属氧化方法。在本发明的一些更具体的方面，诱导母体金属蒸气与固体氧化剂反应，导致由母体金属蒸气和固体氧化剂之间的反应形成的反应产物的定向生长。本发明的方法可以用于形成具有基本上均匀的组合物，分级组合物和大复合体的本体。

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