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91. 发明授权

US07319336B2 Charged particle beam device probe operation 有权
标题翻译：带电粒子束装置探头操作
公开(公告)号：US07319336B2
公开(公告)日：2008-01-15
申请号：US11064127
申请日：2005-02-23
申请人： Christof Baur , Robert J. Folaron , Adam Hartman , Philip C. Foster , Jay C. Nelson , Richard E. Stallcup, II
发明人： Christof Baur , Robert J. Folaron , Adam Hartman , Philip C. Foster , Jay C. Nelson , Richard E. Stallcup, II
IPC分类号： G01R31/305 , G01R31/02 , G01R31/26
CPC分类号： G01N1/28 , G01N1/32 , G01R31/307 , H01J37/3056 , H01J2237/20 , H01J2237/2008 , H01J2237/206 , H01J2237/24592 , H01J2237/2594 , H01J2237/28 , H01J2237/2817 , H01J2237/31745
摘要： An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.
摘要翻译：一种包括定位器控制装置，测量装置和控制程序的装置。定位器控制装置通信地耦合到带电粒子束装置（CPBD）的腔室，并且被配置为单独地操作CPBD室内的多个探针中的每一个，以建立多个探针中的一个探针和位于CPBD室中的样品的多个接触点。测量装置通信地耦合到CPBD和定位器控制装置，并被配置为执行与多个接触点之一相关联的特性的测量和检测中的一个。控制程序被配置为至少部分地自动化对CPBD，定位器控制装置和测量装置中的至少一个的控制。

92. 发明申请

US20070252091A1 METHOD AND APPARATUS FOR OBSERVING INSIDE STRUCTURES, AND SPECIMEN HOLDER 有权
标题翻译：用于观察内部结构的方法和装置，以及样本持有人
公开(公告)号：US20070252091A1
公开(公告)日：2007-11-01
申请号：US11775894
申请日：2007-07-11
申请人： Shohei Terada , Kazutoshi Kaji , Shigeto Isakozawa
发明人： Shohei Terada , Kazutoshi Kaji , Shigeto Isakozawa
IPC分类号： G01N23/00
CPC分类号： H01J37/20 , G01N23/2251 , G01N23/2252 , H01J37/26 , H01J2237/2008 , H01J2237/206 , H01J2237/2802
摘要： An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.
摘要翻译：本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以确定失败的机制。本发明是用于观察内部结构的方法。该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态部分。

93. 发明申请

US20070221845A1 Charged particle beam system 有权
标题翻译：带电粒子束系统
公开(公告)号：US20070221845A1
公开(公告)日：2007-09-27
申请号：US11723579
申请日：2007-03-21
申请人： Osamu Komuro , Osamu Nasu
发明人： Osamu Komuro , Osamu Nasu
IPC分类号： G21K7/00
CPC分类号： H01J37/268 , H01J2237/047 , H01J2237/2008 , H01J2237/2803
摘要： A charged particle beam system wherein the output of the secondary electron detector is detected while the retarding voltage is varied between the values for which the secondary electrons do not reach the sample and the values for which the secondary electrons reach the sample, and the surface potential of the sample is determined on the basis of the relationship between the retarding voltage and the detected output of the secondary electron detector.
摘要翻译：一种带电粒子束系统，其中在二次电子未到达样品的值和二次电子到达样品的值之间改变延迟电压并检测二次电子检测器的输出，并且表面电位基于延迟电压与二次电子检测器的检测输出之间的关系来确定样品。

94. 发明申请

US20060169916A1 Specimen stage for charged-particle scanning microscopy 失效
标题翻译：带电粒子扫描显微镜的试样阶段
公开(公告)号：US20060169916A1
公开(公告)日：2006-08-03
申请号：US11047979
申请日：2005-01-31
申请人： Summer Schneider
发明人： Summer Schneider
IPC分类号： G21K5/10
CPC分类号： H01J37/20 , H01J2237/2008
摘要： A specimen stage for charged-particle scanning microscopy comprises a non-magnetic platform for supporting a specimen, at least one probe pin assembly including a probe pin for contacting a selected portion of the specimen, the probe pin being electrically insulated from the platform and being electrically coupled to an output, and an elevator mechanism operable to move the platform for bringing the specimen into and out of electrical contact with the probe pin(s), substantially without moving the probe pin(s).
摘要翻译：用于带电粒子扫描显微镜的样品台包括用于支撑样本的非磁性平台，至少一个探针销组件，其包括用于接触所述样本的选定部分的探针，所述探针与所述平台电绝缘，电耦合到输出端，以及电梯机构，其可操作以移动所述平台，用于使所述试样进入和离开与所述探针的电接触，基本上不移动所述探针。

95. 发明授权

US5124645A Transmission electron microscope (TEM) power probe for in-situ viewing of electromigration and operation of an integrated circuit or microprocessor 失效
标题翻译：透射电子显微镜（TEM）功率探头，用于原位观察电迁移和集成电路或微处理器的运行
公开(公告)号：US5124645A
公开(公告)日：1992-06-23
申请号：US690462
申请日：1991-04-24
申请人： William E. Rhoden , Donald R. Kitchen , James V. Maskowitz
发明人： William E. Rhoden , Donald R. Kitchen , James V. Maskowitz
IPC分类号： G01Q30/02 , G01Q30/16 , G01Q70/02 , G01R1/04 , G01R31/305 , H01J37/20
CPC分类号： H01J37/20 , G01R1/0416 , G01R31/305 , H01J2237/2008 , H01J2237/2594
摘要： A power probe for in-situ electron microscope viewing of electromigration in aluminum thin films has a probe holder, a detachable probe tip and, mounted on the probe tip, a quartz power distributor. A test specimen, such as an integrated circuit component, can be viewed inside the electron microscope while logic gates or other components are exercised. The probe holder is shaped to mate to a conventional electron microscope side entry port. The probe tip attaches to the end of the probe holder and extends into the electron beam path. The test specimen mounts on the power distributor which is in turn mounted inside a trough at the end of the detachable probe tip. The probe tip and power distributor include mutually aligned openings, over which the test specimen mounts, for the electron beam path. The power probe is vacuum sealed on the outside by a convention O-ring seal and inside by a female electrical connector mounted on the front end of the probe holder and a male electrical connector mounted on the back end of the probe tip, both electrical connectors being cemented in place with a high-vacuum glue. The power distributor includes bonding pads and a grounding pad for mounting test specimens.
摘要翻译：用于在铝薄膜中电迁移的原位电子显微镜的功率探测器具有探针支架，可拆卸的探针尖端，并且安装在探针尖端上的石英功率分配器。可以在电子显微镜的内部观察诸如集成电路部件的测试样本，同时执行逻辑门或其它组件。探针支架成形为与常规电子显微镜侧入口相配合。探针尖端附着在探头支架的端部并延伸到电子束路径中。测试样品安装在功率分配器上，分配器依次安装在可拆卸探针针尖端部的槽内。探针尖端和功率分配器包括用于电子束路径的测试样本安置的相互对准的开口。功率探头通过常规的O型圈密封件在内部被真空密封，并且内部由安装在探针保持器前端上的阴电连接器和安装在探针尖端的后端上的阳电连接器，两个电连接器用高真空胶水胶合到位。电源分配器包括接合焊盘和用于安装测试样品的接地垫。

96. 发明授权

US09984850B2 Microscopy support structures 有权
公开(公告)号：US09984850B2
公开(公告)日：2018-05-29
申请号：US15051210
申请日：2016-02-23
申请人： PROTOCHIPS, INC.
发明人： John Damiano, Jr. , Stephen E. Mick , David P. Nackashi
IPC分类号： H01J37/26 , H01J37/20
CPC分类号： H01J37/20 , H01J37/26 , H01J37/261 , H01J2237/188 , H01J2237/2001 , H01J2237/2002 , H01J2237/2003 , H01J2237/2007 , H01J2237/2008 , H01J2237/2602 , H01J2237/28 , H01J2237/2802
摘要： Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and semiconductor manufacturing processes. The temperature of the support structure may be controlled and/or gases or liquids may be confined in the observation region for reactions and/or imaging.

97. 发明授权

US09837746B2 Method for forming an electrical connection to a sample support in an electron microscope holder 有权
公开(公告)号：US09837746B2
公开(公告)日：2017-12-05
申请号：US15254522
申请日：2016-09-01
申请人： PROTOCHIPS, INC.
发明人： John Damiano, Jr. , David P. Nackashi , Stephen E. Mick
IPC分类号： H01J37/20 , H01R13/24 , H01J37/26 , H01R12/79 , H01R12/72
CPC分类号： H01R13/24 , H01J37/20 , H01J37/26 , H01J2237/2003 , H01J2237/2007 , H01J2237/2008 , H01J2237/206 , H01R12/721 , H01R12/79
摘要： An electrical connector for use in electron microscopy sample holders. The electrical connector provides electrical contacts to the sample support devices which are positioned in the sample holders for electrical, temperature and/or electrochemical control.

98. 发明申请

US20170054239A1 METHOD FOR FORMING AN ELECTRICAL CONNECTION TO A SAMPLE SUPPORT IN AN ELECTRON MICROSCOPE HOLDER 有权
标题翻译：在电子显微镜支架中形成电气连接到样品支持的方法
公开(公告)号：US20170054239A1
公开(公告)日：2017-02-23
申请号：US15254522
申请日：2016-09-01
申请人： PROTOCHIPS, INC.
发明人： John DAMIANO, JR. , David P. NACKASHI , Daniel Stephen Gardiner , Franklin Stampley WALDEN, II , William Bradford CARPENTER
IPC分类号： H01R13/24 , H01J37/20
CPC分类号： H01R13/24 , H01J37/20 , H01J37/26 , H01J2237/2003 , H01J2237/2007 , H01J2237/2008 , H01J2237/206 , H01R12/721 , H01R12/79
摘要： An electrical connector for use in electron microscopy sample holders. The electrical connector provides electrical contacts to the sample support devices which are positioned in the sample holders for electrical, temperature and/or electrochemical control.
摘要翻译：用于电子显微镜样品架的电连接器。电连接器为位于样品保持器中的样品支撑装置提供电接触，用于电气，温度和/或电化学控制。

99. 发明申请

US20160307726A1 INSPECTION DEVICE 审中-公开
标题翻译：检查装置
公开(公告)号：US20160307726A1
公开(公告)日：2016-10-20
申请号：US15195665
申请日：2016-06-28
申请人： EBARA CORPORATION
发明人： Masahiro Hatakeyama , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Yoshihiko Naito , Yasushi Toma , Tsutomu Karimata , Takehide Hayashi , Kiwamu Tsukamoto , Tatsuya Kohama , Noboru Kobayashi
IPC分类号： H01J37/09 , G01N23/225 , H01J37/28 , H01J37/22 , H01J37/10
CPC分类号： H01J37/073 , G01N23/22 , G01N23/223 , G01N23/2251 , G01N2223/611 , H01J1/34 , H01J37/09 , H01J37/10 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/265 , H01J37/28 , H01J37/29 , H01J2237/0048 , H01J2237/022 , H01J2237/032 , H01J2237/038 , H01J2237/045 , H01J2237/0458 , H01J2237/0473 , H01J2237/0492 , H01J2237/061 , H01J2237/06333 , H01J2237/166 , H01J2237/186 , H01J2237/2002 , H01J2237/2007 , H01J2237/2008 , H01J2237/2448 , H01J2237/2482 , H01J2237/2485 , H01J2237/2817 , H01J2237/2855 , H01J2237/2857
摘要： An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a beam, a primary optical system capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system capable of including a first movable numerical aperture and a first detector which detects secondary charge particles generated from the inspection object, the secondary charge particles passing through the first movable numerical aperture, an image processing system capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector arranged between the first movable numerical aperture and the first detector and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object.
摘要翻译：用于使用光束检查检查对象的表面的检查装置包括能够产生电荷粒子或电磁波之一作为光束的光束发生器，能够将所述光束引导并照射到被检查对象的主光学系统在工作室内，能够包括第一可移动数值孔径的二次光学系统和检测从检查对象产生的二次电荷粒子的第一检测器，通过第一可移动数值孔径的二次电荷粒子，能够基于由所述第一检测器检测到的次级电荷粒子形成图像; 以及第二检测器，其布置在第一可移动数值孔径和第一检测器之间，并且检测在从检查对象生成的次级充电颗粒的交叉位置处的位置和形状。

100. 发明申请

US20150325402A1 Method and System for Inspecting an EUV Mask 有权
标题翻译：检查EUV面罩的方法和系统
公开(公告)号：US20150325402A1
公开(公告)日：2015-11-12
申请号：US14796565
申请日：2015-07-10
申请人： Hermes Microvision Inc.
发明人： Guochong Weng , Youjin Wang , Chiyan Kuan , Chung-Shih Pan
IPC分类号： H01J37/02 , H01J37/28
CPC分类号： H01J37/026 , H01J37/20 , H01J2237/0041 , H01J2237/0044 , H01J2237/2008 , H01J2237/2811
摘要： A structure for grounding an extreme ultraviolet mask (EUV mask) is provided to discharge the EUV mask during the inspection by an electron beam inspection tool. The structure for grounding an EUV mask includes at least one grounding pin to contact conductive areas on the EUV mask, wherein the EUV mask may have further conductive layer on sidewalls or/and back side. The inspection quality of the EUV mask is enhanced by using the electron beam inspection system because the accumulated charging on the EUV mask is grounded. The reflective surface of the EUV mask on a continuously moving stage is scanned by using the electron beam simultaneously. The moving direction of the stage is perpendicular to the scanning direction of the electron beam.
摘要翻译：提供一种用于接地极紫外线掩模（EUV掩模）的结构，用于通过电子束检查工具在检查期间对EUV掩模进行放电。用于将EUV掩模接地的结构包括至少一个接地引脚以接触EUV掩模上的导电区域，其中EUV掩模可以在侧壁或/或背侧上具有另外的导电层。通过使用电子束检查系统来增强EUV掩模的检查质量，因为EUV掩模上的累积充电是接地的。通过同时使用电子束扫描连续移动台上的EUV掩模的反射表面。舞台的移动方向垂直于电子束的扫描方向。

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