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    • 91. 发明授权
    • Method of operating vacuum deposition apparatus and vacuum deposition apparatus
    • 操作真空沉积设备和真空沉积设备的方法
    • US07871667B2
    • 2011-01-18
    • US11593619
    • 2006-11-07
    • Hideaki AwataKatsuji EmuraKentaro Yoshida
    • Hideaki AwataKatsuji EmuraKentaro Yoshida
    • C23C16/00C23C16/52
    • C23C14/30C23C14/16C23C14/20C23C14/546C23C14/562
    • In a previous experiment of a deposition work of depositing a film with a uniform thickness on a long strip base material in the longitudinal direction thereof, an elapsed time from the start of the deposition work and an output of a power supply at the elapsed time are measured. The resulting relation between the elapsed time and the output is stored in a storage device. Subsequent deposition on a long strip base material is performed by a method in which first, the output of the power supply is controlled to be stabilized at a desired value using a crystal oscillator thickness gauge in a pre-heating step before the start of the deposition work, and then, a base material transport device is driven to start the deposition work on the long strip base material after a desired deposition rate is obtained. After the start of the deposition work, the output of the power supply is controlled to coincide with the output at the elapsed time stored in the storage device.
    • 在上述的长条状基材长度方向上沉积厚度均匀的膜的沉积工作的实验中,从开始沉积工作起的经过时间和经过时间的电源的输出为止 测量。 经过时间与输出之间的关系存储在存储装置中。 在长条状基材上的后续沉积是通过以下方法进行的:首先,在开始沉积之前,使用晶体振荡器厚度计在预热步骤中将电源的输出控制为稳定在期望值 然后,在获得期望的沉积速率之后,驱动基材输送装置在长条状基材上开始沉积工作。 在开始沉积工作之后,电源的输出被控制成与存储在存储装置中的经过时间的输出一致。
    • 98. 发明申请
    • COATING METHOD AND APPARATUS, A PERMANENT MAGNET, AND MANUFACTURING METHOD THEREOF
    • 涂料方法和设备,永磁体及其制造方法
    • US20100159129A1
    • 2010-06-24
    • US12710949
    • 2010-02-23
    • Hiroshi NagataYoshinori Shingaki
    • Hiroshi NagataYoshinori Shingaki
    • B05D3/02B05D5/00B05D7/14
    • C23C14/16C23C14/243C23C14/541H01F1/0571H01F10/126H01F41/0293H01F41/20
    • The object of the present invention is to improve the productivity of a permanent magnet and to manufacture it at a low cost by effectively coating Dy and Tb on a surface of the magnet of Fe—B-rare earth elements having a predetermined configuration. The permanent magnet of the present invention is manufactured by a coating step for coating Dy on the surface of the magnet of Fe—B-rare earth elements having a predetermined configuration and a diffusing step for diffusing Dy coated on the surface of the magnet into crystal grain boundary phases of the magnet with being heat treated at a predetermined temperature. In this case, the coating step comprises a first step for heating a process chamber used for carrying out the coating step and generating metallic vapor atmosphere within the process chamber by vaporizing vaporizable metallic material previously arranged within the process chamber, and a second step for introducing into the process chamber the magnet held at a temperature lower than that within the process chamber and then selectively depositing the vaporizable metallic material on a surface of the magnet by an effect of temperature difference between the temperature within the process chamber and that of the magnet by the magnet reaches a predetermined temperature.
    • 本发明的目的是通过在具有预定构造的Fe-B-稀土元素的磁体的表面上有效地涂覆Dy和Tb来提高永磁体的生产率并以低成本制造。 本发明的永磁体通过涂布步骤制造,该涂覆步骤用于在具有预定结构的Fe-B-稀土元素的磁体的表面上涂覆Dy,并将用于将涂覆在磁体表面上的Dy扩散到晶体的扩散步骤 在预定温度下进行热处理的磁体的晶界相。 在这种情况下,涂覆步骤包括:第一步骤,用于加热用于进行涂覆步骤的处理室,并通过蒸发预先设置在处理室内的可蒸发金属材料,在处理室内产生金属蒸汽气氛;以及第二步骤,用于引入 进入处理室,磁体保持在低于处理室​​内的温度,然后通过处理室内的温度与磁体的温度之间的温度差的选择性地将可蒸发的金属材料沉积在磁体的表面上 磁体达到预定温度。