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    • 92. 发明申请
    • Shielded gate trench (SGT) MOSFET devices and manufacturing processes
    • 屏蔽栅极沟槽(SGT)MOSFET器件和制造工艺
    • US20070194374A1
    • 2007-08-23
    • US11356944
    • 2006-02-17
    • Anup BhallaSik K. Lui
    • Anup BhallaSik K. Lui
    • H01L29/94H01L21/336
    • H01L29/7813H01L29/0696H01L29/407H01L29/66734H01L29/7811
    • This invention discloses a semiconductor power device that includes a plurality of power transistor cells surrounded by a trench opened in a semiconductor substrate. At least one of the cells constituting an active cell has a source region disposed next to a trenched gate electrically connecting to a gate pad and surrounding the cell. The trenched gate further has a bottom-shielding electrode filled with a gate material disposed below and insulated from the trenched gate. At least one of the cells constituting a source-contacting cell surrounded by the trench with a portion functioning as a source connecting trench is filled with the gate material for electrically connecting between the bottom-shielding electrode and a source metal disposed directly on top of the source connecting trench. The semiconductor power device further includes an insulation protective layer disposed on top of the semiconductor power device having a plurality of source openings on top of the source region and the source connecting trench provided for electrically connecting to the source metal and at least a gate opening provided for electrically connecting the gate pad to the trenched gate.
    • 本发明公开了一种半导体功率器件,其包括由在半导体衬底中开口的沟槽围绕的多个功率晶体管单元。 构成活性单元的单元中的至少一个具有与沟槽栅极相邻设置的源极区域,该沟槽栅极电连接到栅极焊盘并围绕电池。 沟槽栅极还具有填充有栅极材料的底部屏蔽电极,栅极材料设置在沟槽栅极下方并与沟槽栅极绝缘。 构成由沟槽围绕的源极接触单元中的至少一个具有用作源极连接沟槽的部分的单元填充有栅极材料,用于电连接底部屏蔽电极和直接设置在源极连接沟槽顶部的源极金属 源连接沟槽。 半导体功率器件还包括设置在半导体功率器件的顶部上的绝缘保护层,其具有在源极区域的顶部上的多个源极开口和设置用于电连接到源极金属的源极连接沟槽和至少提供的栅极开口 用于将栅极焊盘电连接到沟槽栅极。
    • 93. 发明申请
    • Configurations and method for carrying out wafer level unclamped inductive switching (UIS) tests
    • 执行晶圆级无钳位感应开关(UIS)测试的配置和方法
    • US20070182435A1
    • 2007-08-09
    • US11300082
    • 2005-12-14
    • Sik LuiAnup Bhalla
    • Sik LuiAnup Bhalla
    • G01R31/26
    • G01R31/2621G01R31/2831G01R31/327
    • This invention discloses a circuit for performing an unclamped inductive test on a metal oxide semiconductor field effect transistor (MOSFET) device driven by a gate driver. The circuit includes a current sense circuit for measuring an unclamped inductive testing (UIS) current that increases with an increase of a pulse width inputted from the gate driver to the MOSFET device wherein the current sensing circuit is provided to turn off the gate driver when a predefined UIS current is reached. The test circuit further includes a MOSFET failure detection circuit connected to a drain terminal of the MOSFET device for measuring a drain voltage change for detecting the MOSFET failure during the UIS test. The test circuit further includes a first switch for switching ON/OFF a power supply to the MOSFET device to and a second switch connected between a drain and source terminal of the MOSFET. Furthermore, the test circuit further includes a timing and make before break (MBB) circuit for receiving an MOSFET failure signal from the MOSFET failure detection circuit and for controlling the first and second switches for switching off a power supply to the MOSFET device upon a detection of an UIS failure under the UIS test to prevent damages to a probe
    • 本发明公开了一种用于对由栅极驱动器驱动的金属氧化物半导体场效应晶体管(MOSFET)器件执行未钳位电感测试的电路。 该电路包括电流检测电路,用于测量从栅极驱动器输入到MOSFET器件的脉冲宽度增加而增加的未钳位电感测试(UIS)电流,其中提供电流检测电路以在栅极驱动器 达到预定义的UIS电流。 测试电路还包括连接到MOSFET器件的漏极端子的MOSFET故障检测电路,用于测量在UIS测试期间检测MOSFET故障的漏极电压变化。 测试电路还包括用于将MOSFET器件的电源接通/断开的第一开关和连接在MOSFET的漏极和源极端子之间的第二开关。 此外,测试电路还包括用于从MOSFET故障检测电路接收MOSFET故障信号的定时和断开前(MBB)电路,并且用于在检测时控制用于关断到MOSFET器件的电源的第一和第二开关 在统计研究所测试下的统计研究所失败,以防止探针受损
    • 95. 发明申请
    • Power MOS device
    • 功率MOS器件
    • US20060180855A1
    • 2006-08-17
    • US11056346
    • 2005-02-11
    • Anup BhallaSik LuiTiesheng Li
    • Anup BhallaSik LuiTiesheng Li
    • H01L29/94
    • H01L29/7813H01L29/1095H01L29/4236H01L29/456H01L29/47H01L29/66727H01L29/66734H01L29/7806H01L29/7811
    • A semiconductor device comprises a drain, a body disposed over the drain, having a body top surface, a source embedded in the body, extending downward from the body top surface into the body, a gate trench extending through the source and the body into the drain, a gate disposed in the gate trench, a source body contact trench having a trench wall and an anti-punch through implant that is disposed along the trench wall. A method of fabricating a semiconductor device comprises forming a hard mask on a substrate having a top substrate surface, forming a gate trench in the substrate, through the hard mask, depositing gate material in the gate trench, removing the hard mask to leave a gate structure, forming a source body contact trench having a trench wall and forming an anti-punch through implant.
    • 半导体器件包括漏极,设置在漏极上的主体,具有主体顶表面,嵌入在主体中的源,从主体顶表面向下延伸到主体中;延伸穿过源和主体的栅沟槽, 漏极,设置在栅极沟槽中的栅极,具有沟槽壁的源体接触沟槽和沿着沟槽壁布置的抗穿孔植入物。 制造半导体器件的方法包括在具有顶部衬底表面的衬底上形成硬掩模,在衬底中形成栅极沟槽,通过硬掩模,在栅极沟槽中沉积栅极材料,去除硬掩模以留下栅极 形成具有沟槽壁并形成抗穿孔植入物的源体接触沟槽。
    • 97. 发明授权
    • IGBT gate drive circuit with short circuit protection
    • IGBT栅极驱动电路具有短路保护功能
    • US06275093B1
    • 2001-08-14
    • US09030871
    • 1998-02-25
    • Sampat Singh ShekhawatJon GladishAnup Bhalla
    • Sampat Singh ShekhawatJon GladishAnup Bhalla
    • H03K17687
    • H03K17/0828
    • An IGBT gate driver circuit includes means for detecting when the collector-to-emitter voltage (Vce) of a turned-on IGBT, intended to be operated in the saturation region, increases above a preset level, indicative of a fault condition, such as a short circuit. In response to such an increase in the Vce of a turned on IGBT, the IGBT is turned-off in two steps. First, the turn-on gate drive is decreased to a level that is still above the threshold (turn-on) voltage of the IGBT in order to decrease the current flowing through the IGBT and hence, the peak power dissipation. This decrease in the current through the IGBT and the peak power dissipation increases the length of time the IGBT can withstand a fault condition such as a short circuit. Then, after decreasing the gate drive to the IGBT, the gate drive is gradually decreased until the IGBT is completely turned off.
    • IGBT栅极驱动器电路包括用于检测旨在在饱和区域中操作的导通IGBT的集电极 - 发射极电压(Vce)何时增加到指示故障状态的预设电平以上的装置,例如 短路。 响应于导通IGBT的Vce的这种增加,IGBT分两个阶段关断。 首先,导通栅极驱动被降低到仍然高于IGBT的阈值(导通)电压的电平,以便减小流过IGBT的电流,并因此降低峰值功耗。 通过IGBT的电流的降低和峰值功率耗散增加了IGBT能够经受诸如短路的故障状态的时间长度。 然后,在将栅极驱动减少到IGBT之后,栅极驱动逐渐减小,直到IGBT完全关断。