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    • 91. 发明授权
    • Toroidal-type continuously variable transmission
    • 环形无级变速器
    • US06383112B1
    • 2002-05-07
    • US09418995
    • 1999-10-14
    • Hiroyuki ItohNobuo GotoMakoto FujinamiTakashi ImanishiHiroshi Kato
    • Hiroyuki ItohNobuo GotoMakoto FujinamiTakashi ImanishiHiroshi Kato
    • F16H1538
    • F16H15/38
    • In the toroidal-type continuously variable transmission, the torque transmission shaft 15 includes a flange portion 29a formed in one end thereof, while a securing portion 43 is formed in the end-face side half section of the flange portion 29a so as to be able to secure a tool thereto when tightly fastening a loading nut 19 to a external thread portion 40 formed in the torque transmission shaft 15. And, the outer peripheral surface of the securing portion 43 is formed as a polygonally cylindrical shape having four or more flat surfaces. Also, after the torque transmission shaft 15 is heat-carburized and the surface of a cylindrical portion 44 formed in the torque transmission shaft 15 is removed, the external thread portion 40 is worked, which makes it possible not only to secure the hardness of the adjoining portions of the external thread portion 40 but also to control the hardness of the external thread portion 40 itself. Further, branch oil supply passages 39 and 39 used to supply oil to ball splines 17 and 17 are formed at the positions of the torque transmission shaft 15 that are shifted in the axial direction of the torque transmission shaft 15 from the positions of balls 37, 37, which respectively construct the ball splines 17 and 17.
    • 在环形无级变速器中,扭矩传递轴15包括在其一端形成的凸缘部29a,而在凸缘部29a的端面侧半部形成有固定部43,从而能够 当将加载螺母19紧固到形成在扭矩传递轴15中的外螺纹部40上时,固定工具。固定部43的外周面形成为具有四个以上平面的多边形 。 此外,在转矩传递轴15被热渗碳并且形成在转矩传递轴15中的圆筒部44的表面被去除之后,外螺纹部40被加工,这不仅可以确保 外螺纹部分40的相邻部分,而且还用于控制外螺纹部分40本身的硬度。 此外,用于向滚珠花键17,17供给油的分支供油路39,39形成在转矩传递轴15的从转矩传递轴15的轴向偏移的位置, 37,分别构成球形花键17和17。
    • 96. 发明授权
    • Electron beam writing method and apparatus for carrying out the same
    • 电子束写入方法及其执行装置
    • US5759423A
    • 1998-06-02
    • US563329
    • 1995-11-28
    • Yasunari SohdaYasuhiro SomedaHiroyuki ItohKatsuhiro KawasakiNorio Saitou
    • Yasunari SohdaYasuhiro SomedaHiroyuki ItohKatsuhiro KawasakiNorio Saitou
    • G03F7/20H01J37/317H01L21/027B44C1/22H01L21/00
    • B82Y10/00B82Y40/00H01J37/3174H01J2237/31776
    • An electron beam writing apparatus comprises: an electron beam source for projecting an electron beam; a first mask provided with a first rectangular aperture for passing the electron beam projected by the electron beam source to shape the electron beam in a primary shaped beam having a rectangular cross section; a second mask provided with a second rectangular aperture for passing the primary shaped beam to shape the primary shaped beam in a secondary shaped beam having a rectangular cross section, and triangular apertures for passing the primary shaped beam to form a secondary shaped beam having a triangular cross section; a first electron beam deflecting system for moving the primary shaped beam on the surface of the second mask; and a second electron beam deflecting system for moving the secondary shaped beam on the surface of a workpiece on which a pattern is to be written. Each of the triangular apertures is formed in a size such that the triangular aperture can be entirely covered with a rectangular image formed by the first shaped beam on the surface of the second mask.
    • 电子束写入装置包括:用于投射电子束的电子束源; 第一掩模,设置有第一矩形孔,用于使由电子束源投影的电子束通过,以将电子束形成为具有矩形横截面的主要形状的梁; 第二掩模,其设置有第二矩形孔,用于使主要成形梁通过,以形成具有矩形截面的次级成形梁的主要成形梁,以及三角形孔,用于使初级成形梁通过以形成具有三角形的二次成形梁 横截面; 第一电子束偏转系统,用于将第一形状光束移动到第二掩模的表面上; 以及用于在待写入图案的工件的表面上移动二次成形光束的第二电子束偏转系统。 每个三角形孔形成为使得三角形孔可以被由第二掩模的表面上的第一成形束形成的矩形图像完全覆盖的尺寸。