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    • 99. 发明授权
    • Method for fabricating a field effect-controlled semiconductor component
    • 用于制造场效应控制半导体部件的方法
    • US06248620B1
    • 2001-06-19
    • US09491095
    • 2000-01-24
    • Helmut StrackHelmut GasselJoost Larik
    • Helmut StrackHelmut GasselJoost Larik
    • H01L218238
    • H01L29/7802H01L29/1095H01L29/41766H01L29/42376
    • A method for fabricating field effect-controlled semiconductor components, such as e.g. but not exclusively MIS power transistors. The field effect-controllable semiconductor component has a semiconductor substrate of a first conductivity type and a gate insulator layer on the surface of the semiconductor substrate. A well of a second conductivity type is produced in the semiconductor substrate by implanting first impurity atoms. A semiconductor layer having a first predetermined thickness is produced on the gate insulator layer prior to the production of the well. The semiconductor layer is reduced in a predtdermined region to obtain a residual layer having a second predetermined thickness, such that the semiconductor layer acts as an implantation barrier outside the predetermined region when the well is produced.
    • 一种用于制造场效应控制半导体部件的方法,例如, 但不是唯一的MIS功率晶体管。 场效应可控半导体元件在半导体衬底的表面上具有第一导电类型的半导体衬底和栅极绝缘体层。 通过注入第一杂质原子在半导体衬底中产生第二导电类型的阱。 在生产井之前,在栅极绝缘体层上产生具有第一预定厚度的半导体层。 半导体层在预制区域中被还原以获得具有第二预定厚度的残余层,使得当制造阱时,半导体层用作预定区域外的注入势垒。
    • 100. 发明授权
    • Thyristor having controllable emitter-base shorts
    • 晶闸管具有可控制的发射极 - 基极短路
    • US4760432A
    • 1988-07-26
    • US923867
    • 1986-10-28
    • Michael StoisiekHorst SchmidHelmut Strack
    • Michael StoisiekHorst SchmidHelmut Strack
    • H01L29/74H01L29/745H01L29/749
    • H01L29/7408H01L29/7455
    • A thyristor having a pnpn semiconductor body comprising MISFET structures 9 and 12 through 16 which serve as controllable emitter base shorts formed at the edge side relative to one of the emitter layers and each of the structures is composed of a semiconductor region 9 inserted into the emitter layer which is contacted by an electrode 6 for the emitter layer 1 and also includes a subregion 12 of the adjacent base layer 2 and of an intervening channel region 13 which is formed of an edge zone of the emitter layer 1 and is also composed of a gate covering the channel region in an insulated manner. The gate also convers the subregion 12 of the base layer 2 and forms a MIS capacitor C1. A voltage generator 23 drives the gate 15 with a voltage which alternates between first and second values. At the change from the first voltage value which lies below the threshold value of the channel region 13 to the second voltage level which is close to the threshold voltage of the subregion 12 of the base layer, the thyristor ignites due to the shift in current of the MIS capacitor C1 which serves as the ignition current and, thus, when the change from the second to the first voltage occurs, the thyristor is quenched.
    • 具有pnpn半导体本体的晶闸管包括MISFET结构9和12至16,其用作可控发射极基极短路,其形成在相对于一个发射极层的边缘侧,并且每个结构由插入发射极的半导体区域9 层,其由发射极层1的电极6接触,并且还包括相邻基极层2的子区域12和由发射极层1的边缘区域形成的中间沟道区域13,并且还由 栅极以绝缘方式覆盖沟道区域。 门也对基层2的子区域12进行通信,形成MIS电容器C1。 电压发生器23以在第一和第二值之间交替的电压驱动门15。 在从低于通道区域13的阈值的第一电压值变化到接近于基极层子区域12的阈值电压的第二电压电平的情况下,晶闸管由于电流的偏移而点燃 用作点火电流的MIS电容器C1,因此当从第二电压到第一电压的变化发生时,晶闸管被淬火。