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    • 9. 发明授权
    • High voltage resistance coupling structure
    • 高压电阻耦合结构
    • US08790985B2
    • 2014-07-29
    • US13538043
    • 2012-06-29
    • Uwe WahlMarkus HammerJens-Peer Stengl
    • Uwe WahlMarkus HammerJens-Peer Stengl
    • H01L21/76
    • H01L23/5227H01L23/3178H01L23/585H01L23/642H01L24/03H01L24/05H01L2224/02166H01L2224/03462H01L2224/03464H01L2224/05155H01L2224/05644H01L2924/01029H01L2924/13091H01L2924/14H01L2924/01015
    • The disclosed invention provides a structure and method for providing a high lateral voltage resistance between the electrical networks, sharing a lateral plane, of conductive elements (e.g., having different high voltage potentials) comprising a coupler. In one embodiment, an integrated coupler providing a high lateral voltage resistance comprises a primary conductive element and a secondary conductive element. An isolating material is laterally configured between the electrical network of the primary conductive element and an electrical network of the secondary conductive element. The isolating material may comprise a low-k dielectric layer and prevents any lateral barrier layers (e.g., etch stop layers, diffusion barrier layers, etc.) from extending between the first conductive element and the electrical network of the second conductive element. The structure therefore provides a galvanically isolated integrated coupler which avoids electrical shorting between circuits (e.g., at barrier layers) resulting in an improved high voltage resistance.
    • 所公开的发明提供了一种用于在包括耦合器的导电元件(例如,具有不同的高电压电位)的共享横向平面的电网之间提供高横向电压电阻的结构和方法。 在一个实施例中,提供高横向电压电阻的集成耦合器包括主导电元件和次导电元件。 隔离材料横向配置在主要导电元件的电网和次级导电元件的电网之间。 隔离材料可以包括低k电介质层,并且防止任何侧向阻挡层(例如,蚀刻停止层,扩散阻挡层等)在第一导电元件和第二导电元件的电网之间延伸。 因此,该结构提供了一种电隔离的集成耦合器,其避免了电路之间的电短路(例如,在阻挡层处),导致改进的高耐电压。