会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 93. 发明授权
    • Apparatus and method for radio frequency de-coupling and bias voltage control in a plasma reactor
    • 等离子体反应器中射频去耦和偏压控制的装置和方法
    • US07153444B2
    • 2006-12-26
    • US10871428
    • 2004-06-17
    • Andreas Fischer
    • Andreas Fischer
    • G01R31/00B44C1/22
    • H01J37/32091H01J37/32165H01J37/32174H01J37/32706
    • Provided is a method and apparatus for controlling a bias voltage over a wide range and for de-coupling dual radio frequency (RF) currents to allow for independent control of plasma density and ion energy of a plasma for processing a substrate. An exemplary apparatus provides a plasma processing chamber which includes a bottom electrode configured to hold a substrate and first and second RF power supplies being connected to the bottom electrode. Also included is a top electrode which is electrically isolated from a top ground extension. A filter array defining a set of filter settings is included. A switch is coupled to the top electrode and the switch is configured to interconnect the top electrode to one of the filter settings. The filter settings are configured to enable or disable RF current generated from one or both of the RF power supplies from passing through the top electrode.
    • 提供了一种用于在宽范围内控制偏置电压并且用于去耦合双射频(RF)电流以允许对用于处理衬底的等离子体的等离子体密度和离子能的独立控制的方法和装置。 一种示例性装置提供一种等离子体处理室,其包括配置成保持基板的底部电极和连接到底部电极的第一和第二RF电源。 还包括与顶部接地延伸部电隔离的顶部电极。 包括定义一组过滤器设置的过滤器阵列。 开关耦合到顶部电极,并且开关被配置为将顶部电极与滤波器设置之一互连。 滤波器设置被配置为启用或禁用从一个或两个RF电源产生的RF电流通过顶部电极。
    • 98. 发明授权
    • Filling system for robot-capable filling of a vehicle with fuel
    • 用于机器人装填燃料车辆的灌装系统
    • US5725033A
    • 1998-03-10
    • US706560
    • 1996-09-05
    • Reinhard SteinkaemperAdolf KremerRonald SchmidAndreas FischerAndreas Mueller
    • Reinhard SteinkaemperAdolf KremerRonald SchmidAndreas FischerAndreas Mueller
    • B60K15/04F16L37/62B65B1/04B60K15/05
    • B60K15/04F16L37/62Y10S220/33
    • A filling system for robot-capable filling of a motor vehicle with fuel has a filler nozzle and a tank filler neck, with a docking extension provided with a central opening being provided on the neck on the filling side of the vehicle. The extension is rotatable by an upper section around the axis of symmetry to open and close a tank closure. The filler nozzle is dockable by its outlet end to form a positive connection between the filler nozzle and the docking extension. When the filler nozzle is ready for filling, positive elements distributed around the circumference of the filler nozzle and the docking extension mesh positively with one another. In order to achieve a simple docking of the filler nozzle on the filler neck of the vehicle fuel tank for a filling that is always functionally reliable and unimpeded, the positive elements of one docking partner are radially movable and actuatable in the radial direction fluidically, and the positive elements of the other docking partner are rigid. In the former, the movable positive elements are lockable in a locked position that acts in the circumferential direction and produces axial locking. The elements are completely retracted into the docking partner on which they are mounted in the unlocked position of the docking partner.
    • 用于机动车能够用燃料填充机动车辆的填充系统具有填充喷嘴和加油口颈部,对接延伸部设置有设置在车辆的填充侧的颈部上的中心开口。 延伸部分可绕着对称轴线的上部部分旋转,以打开和关闭罐盖。 填充喷嘴可由其出口端对接,以在填充喷嘴和对接延伸部之间形成正连接。 当填料喷嘴准备好填充时,分布在填充喷嘴周围的阳极元件和对接延伸部彼此正确地啮合。 为了实现填充喷嘴在车辆燃料箱的填充管颈上的简单对接,用于总是功能可靠和不受阻碍的填充,一个对接伙伴的正元件可径向移动并在径向方向上可流动地驱动,并且 其他对接伙伴的积极因素是僵硬的。 在前者中,可移动的正元件可锁定在沿圆周方向作用的锁定位置并产生轴向锁定。 这些元件完全缩回到其对接对象中,它们被安装在对接对象的解锁位置。