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1. 发明申请

US20160155612A1 FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS 审中-公开
标题翻译：等离子体加工设备的前级温度控制
公开(公告)号：US20160155612A1
公开(公告)日：2016-06-02
申请号：US15013795
申请日：2016-02-02
申请人： Applied Materials, Inc.
发明人： Chetan MAHADESWARASWAMY , Walter R. MERRY , Sergio Fukuda SHOJI , Chunlei ZHANG , Yashaswini PATTAR , Duy D. NGUYEN , Tina TSONG , Shane C. NEVIL , Douglas A. BUCHBERGER, JR. , Fernando M. SILVEIRA , Brad L. MAYS , Kartik RAMASWAMY , Hamid NOORBAKHSH
IPC分类号： H01J37/32 , G05B6/02
CPC分类号： H01J37/32009 , G05B6/02 , H01J37/3244 , H01J37/32715 , H01J37/32935 , H01J2237/334 , H05H1/0081
摘要： Methods and systems for controlling temperatures in plasma processing chamber with reduced controller response times and increased stability. Temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. A feedforward control signal compensating disturbances in the temperature attributable to the plasma power may be combined with a feedback control signal counteracting error between a measured and desired temperature.
摘要翻译：用于控制等离子体处理室中的温度的方法和系统，其具有减少的控制器响应时间和增加的稳定性。温度控制至少部分地基于从输入到处理室的等离子体功率得到的前馈控制信号。补偿由于等离子体功率引起的温度的干扰的前馈控制信号可以与测量温度和期望温度之间的反馈控制信号抵消误差相组合。

2. 发明授权

US09338871B2 Feedforward temperature control for plasma processing apparatus 有权
标题翻译：等离子体处理装置的前馈温度控制
公开(公告)号：US09338871B2
公开(公告)日：2016-05-10
申请号：US12905624
申请日：2010-10-15
申请人： Chetan Mahadeswaraswamy , Walter R. Merry , Sergio Fukuda Shoji , Chunlei Zhang , Yashaswini B. Pattar , Duy D. Nguyen , Tina Tsong , Shane C. Nevil , Douglas A. Buchberger, Jr. , Fernando M. Silveira , Brad L. Mays , Kartik Ramaswamy , Hamid Noorbakhsh
发明人： Chetan Mahadeswaraswamy , Walter R. Merry , Sergio Fukuda Shoji , Chunlei Zhang , Yashaswini B. Pattar , Duy D. Nguyen , Tina Tsong , Shane C. Nevil , Douglas A. Buchberger, Jr. , Fernando M. Silveira , Brad L. Mays , Kartik Ramaswamy , Hamid Noorbakhsh
IPC分类号： G01L21/30 , G01R31/00 , H01L21/302 , H01L21/461 , H01L21/306 , C23F1/00 , H05H1/00 , H01J37/32
CPC分类号： H01J37/32009 , G05B6/02 , H01J37/3244 , H01J37/32715 , H01J37/32935 , H01J2237/334 , H05H1/0081
摘要： Methods and systems for controlling temperatures in plasma processing chamber with reduced controller response times and increased stability. Temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. A feedforward control signal compensating disturbances in the temperature attributable to the plasma power may be combined with a feedback control signal counteracting error between a measured and desired temperature.
摘要翻译：用于控制等离子体处理室中的温度的方法和系统，其具有减少的控制器响应时间和增加的稳定性。温度控制至少部分地基于从输入到处理室的等离子体功率得到的前馈控制信号。补偿由于等离子体功率引起的温度的干扰的前馈控制信号可以与测量温度和期望温度之间的反馈控制信号抵消误差相组合。

3. 发明授权

US09254397B2 Plasma evaluation apparatus 有权
标题翻译：等离子体评估装置
公开(公告)号：US09254397B2
公开(公告)日：2016-02-09
申请号：US14359970
申请日：2012-10-22
申请人： NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
发明人： Hajime Sakakita , Yuzuru Ikehara , Satoru Kiyama
IPC分类号： A61B18/04 , A61N5/10 , H05H1/00 , A61B18/00 , A61B17/00
CPC分类号： A61N5/1064 , A61B18/042 , A61B2017/00057 , A61B2018/00642 , A61B2018/00827 , A61B2018/00892 , H05H1/0081
摘要： The present invention provides a plasma evaluation system and method for evaluating plasma, including: a treatment target material and a weak current measurement unit including a resistor unit and a differential amplifier, wherein the treatment target material is connected to the weak current measurement unit via a treatment target side measurement terminal, the resistor unit of the weak current measurement unit is connected to a ground side of a plasma generation current source, and the system and method evaluate plasma by receiving plasma generated by a plasma treatment equipment with the treatment target material, measuring a current by measuring a voltage across resistors of the resistor unit through the differential amplifier, and measuring an output voltage of the plasma generation power source.
摘要翻译：本发明提供一种用于评估等离子体的等离子体评估系统和方法，包括：处理对象材料和包括电阻单元和差分放大器的弱电流测量单元，其中处理对象材料经由微电流测量单元经由处理对象侧测量端子，将弱电流测量单元的电阻器单元连接到等离子体发生电流源的接地侧，并且系统和方法通过接收由等离子体处理设备产生的等离子体来处理等离子体，通过差分放大器测量电阻器单元的电阻器两端的电压，并测量等离子体发生电源的输出电压来测量电流。

4. 发明授权

US09087677B2 Methods of electrical signaling in an ion energy analyzer 有权
标题翻译：离子能量分析仪中电信号的方法
公开(公告)号：US09087677B2
公开(公告)日：2015-07-21
申请号：US13433078
申请日：2012-03-28
申请人： Merritt Funk , Lee Chen , Barton Lane , Jianping Zhao , Radha Sundararajan
发明人： Merritt Funk , Lee Chen , Barton Lane , Jianping Zhao , Radha Sundararajan
IPC分类号： H01J3/14 , H01J37/32 , H01J49/48 , H05H1/00
CPC分类号： H01J37/32935 , H01J49/488 , H05H1/0081 , Y10T29/49002
摘要： A method of generating a signal representing with an ion energy analyzer for use in determining an ion energy distribution of a plasma. The ion energy analyzer, used for determining an ion energy distribution of a plasma, includes a first grid and a second grid that is spaced away from and electrically isolated from the first grid. The first grid forms a first surface of the ion energy analyzer and is positioned to be exposed to the plasma. The first grid includes a first plurality of openings, which are dimensioned to be less than a Debye length for the plasma. A voltage source and an ion current meter are operably coupled to the second grid, the latter of which is configured to measure an ion flux onto the ion collector and to transmit a signal that represents the measured ion flux. The method includes selectively and variably biasing the second grid relative to the first grid.
摘要翻译：一种产生用离子能量分析仪表示的用于确定等离子体的离子能量分布的信号的方法。用于确定等离子体的离子能量分布的离子能量分析器包括与第一格栅隔开并与之隔离的第一格栅和第二栅格。第一栅格形成离子能量分析器的第一表面并定位成暴露于等离子体。第一栅格包括第一多个开口，其尺寸被设计成小于等离子体的德拜长度。电压源和离子电流计可操作地耦合到第二栅极，第二栅极被配置为测量离子收集器上的离子通量并传输表示所测量的离子通量的信号。该方法包括相对于第一格栅选择性地和可变地偏置第二格栅。

5. 发明申请

US20140062306A1 SYSTEM AND METHOD OF DETERMINING EFFECTIVE GLOW DISCHARGE LAMP CURRENT 有权
标题翻译：确定有效玻璃放电灯电流的系统和方法
公开(公告)号：US20140062306A1
公开(公告)日：2014-03-06
申请号：US14012760
申请日：2013-08-28
申请人： Leco Corporation
发明人： Ted J Casper , Sara K Casper , Kim A Marshall
IPC分类号： H05H1/02
CPC分类号： H05H1/02 , H05H1/0081
摘要： The embodiments of the invention include a method for controlling plasma conditions of a glow discharge system using the integrated electron (or ion) pulse area extracted from the total lamp current. The method of using an integrated electron/ion pulse area for controlling plasma conditions allows for controlled analysis of conductive, non-conductive and layered materials without the need for estimation of plasma voltages. The method allows for control of sputter rates and plasma emissions that cannot be achieved using other methods such as capacitive divider calculations where actual thicknesses and dielectric constants are not known or predefined.
摘要翻译：本发明的实施例包括使用从总灯电流提取的积分电子（或离子）脉冲区域来控制辉光放电系统的等离子体条件的方法。使用集成电子/离子脉冲区域来控制等离子体条件的方法允许对导电，非导电和分层材料进行受控分析，而不需要估计等离子体电压。该方法允许控制溅射速率和等离子体发射，这些其他方法例如电容分压器计算不能实现，其中实际厚度和介电常数是未知的或预定义的。

6. 发明申请

US20130124124A1 ATOMIC FLUX MEASUREMENT DEVICE 有权
标题翻译：原子通量测量装置
公开(公告)号：US20130124124A1
公开(公告)日：2013-05-16
申请号：US13733594
申请日：2013-01-03
申请人： THE DOSHISHA , ARIOS INC.
发明人： Tadashi OHACHI , Motoi WADA , Osamu ARIYADA , Nobuhiko YAMABE
IPC分类号： G01N27/70 , G06F17/00
CPC分类号： G01N27/70 , C23C14/543 , C30B23/005 , G06F17/00 , H05H1/0081
摘要： An atomic flux measurement device for measuring the amount of dissociated atomic flux produced by discharge and emitted from a plasma generation cell into a vacuum camber. The atomic flux measurement device includes a counter electrode body including a pair of first and second sheet-like electrodes that are arranged substantially parallel to each other with a predetermined spacing between them, a direct-current power supply configured to maintain the first sheet-like electrode at a negative potential so that atoms attached to the inner surface of the sheet-like electrode undergo self-ionization and to apply a direct-current voltage between the first and second sheet-like electrodes so that a current flows between the first and second sheet-like electrodes, and a direct-current ammeter configured to measure a current flowing due to electrons emitted by the self-ionization of the dissociated atoms attached to the inner surface of the first sheet-like electrode.
摘要翻译：一种原子通量测量装置，用于测量由等离子体发生电池放电并发射到真空弧中产生的离解原子通量的量。原子通量测量装置包括对电极体，其包括一对第一和第二片状电极，该第一和第二片状电极以它们之间的预定间隔彼此大致平行地布置;直流电源，被配置为保持第一片状电极电极，使得附着到片状电极的内表面的原子经历自电离并且在第一和第二片状电极之间施加直流电压，使得电流在第一和第二电极之间流动片状电极和直流电流表，其被配置为测量由于附着到第一片状电极的内表面的解离原子的自电离而发射的电子流动的电流。

7. 发明授权

US08427168B2 Plasma monitoring method 有权
标题翻译：等离子体监测方法
公开(公告)号：US08427168B2
公开(公告)日：2013-04-23
申请号：US12725815
申请日：2010-03-17
申请人： Tomohiko Tatsumi , Seiji Samukawa
发明人： Tomohiko Tatsumi , Seiji Samukawa
IPC分类号： G01N27/62
CPC分类号： G01R19/0061 , H05H1/0081
摘要： A plasma monitoring method measures in-situ a resistance of and a current flowing in a side wall. A monitoring system has two sensors in a plasma chamber, each having upper and lower electrodes. An external resistance element is connected only to one of the two sensors, in parallel to the wires extending from the upper and lower electrodes of the sensor concerned. Consequently, a resistance between the upper and lower electrodes is different in the two sensors, and two different values of potential difference between the upper and lower electrodes are obtained in-situ. Because a resistance value of the external resistance element is known, a resistance value of a side wall of a contact hole per one contact hole is obtained in-situ, and consequently an electric current flowing in the side wall of the contact hole per one contact hole can be obtained.
摘要翻译：等离子体监测方法原位测量在侧壁中流动的电阻和电流。监测系统在等离子体室中具有两个传感器，每个具有上电极和下电极。外部电阻元件仅与两个传感器中的一个平行地连接到从相关传感器的上部和下部电极延伸的电线。因此，两个传感器之间的上下电极之间的电阻是不同的，并且原位获得上下电极之间的两个不同的电位差值。由于外部电阻元件的电阻值是已知的，所以每个接触孔的接触孔的侧壁的电阻值被原位获得，因此在每个触头的接触孔的侧壁中流动的电流可以获得孔。

8. 发明申请

US20120248310A1 ION ENERGY ANALYZER 有权
标题翻译：离子能量分析仪
公开(公告)号：US20120248310A1
公开(公告)日：2012-10-04
申请号：US13433071
申请日：2012-03-28
申请人： Lee Chen , Barton Lane , Merritt Funk , Jianping Zhao , Radha Sundararajan
发明人： Lee Chen , Barton Lane , Merritt Funk , Jianping Zhao , Radha Sundararajan
IPC分类号： G01T1/185
CPC分类号： H01J37/32935 , H01J49/488 , H05H1/0081 , Y10T29/49002
摘要： An ion energy analyzer for determining an ion energy distribution of a plasma and comprising an entrance grid, a selection grid, and an ion collector. The entrance grid includes a first plurality of openings dimensioned to be less than a Debye length for the plasma. The ion collector is coupled to the entrance grid via a first voltage source. The selection grid is positioned between the entrance grid and the ion collector and is coupled to the entrance grid via a second voltage source. An ion current meter is coupled to the ion collector to measure an ion flux onto the ion collector and transmit a signal related thereto.
摘要翻译：一种用于确定等离子体的离子能量分布并包括入口格栅，选择栅格和离子收集器的离子能量分析器。入口格栅包括尺寸小于等离子体的德拜长度的第一多个开口。离子收集器通过第一电压源耦合到入口电网。选择网格位于入口格栅和离子收集器之间，并通过第二电压源耦合到入口格栅。离子电流计耦合到离子收集器以测量离子收集器上的离子通量并传输与其相关的信号。

9. 发明申请

US20100229372A1 METHODS FOR MEASURING A SET OF ELECTRICAL CHARACTERISTICS IN A PLASMA 有权
标题翻译：用于测量等离子体中的一组电气特性的方法
公开(公告)号：US20100229372A1
公开(公告)日：2010-09-16
申请号：US12786405
申请日：2010-05-24
申请人： Christopher Kimball , Eric Hudson , Douglas Keil , Alexei Marakhtanov
发明人： Christopher Kimball , Eric Hudson , Douglas Keil , Alexei Marakhtanov
IPC分类号： H05K13/00
CPC分类号： H01J37/32431 , H01J37/32935 , H05H1/0081 , Y10T29/49002
摘要： Methods using a probe apparatus configured to measure a set of electrical characteristics in a plasma include providing a chamber wall including at least a set of plasma chamber surfaces configured to be exposed to a plasma, the plasma having a set of electrical characteristics. The method includes installing a collection disk structure configured to be exposed to the plasma, wherein the collection disk structure having at least a body disposed within the chamber wall and a collection disk structure surface that is either coplanar or recessed with at least one of the set of plasma chamber surfaces and providing a conductive path configured to transmit the set of electrical characteristics from the collection disk structure to a set of transducers. The method may includes coupling a thermal grounding element with the conductive path for providing thermal grounding to at least the conductive path and may alternatively or additionally include disposing an insulation barrier configured to substantially electrically separate at least one of the collection disk and the conductive path.
摘要翻译：使用构造成测量等离子体中的一组电特性的探针装置的方法包括提供包括至少一组被配置为暴露于等离子体的等离子体室表面的室壁，所述等离子体具有一组电特性。该方法包括安装被配置为暴露于等离子体的收集盘结构，其中所述收集盘结构具有至少一个设置在所述室壁内的主体和与所述集合中的至少一个共面或凹入的收集盘结构表面的等离子体室表面，并且提供导电路径，其被配置为将所述一组电特性从所述收集盘结构传输到一组换能器。该方法可以包括将热接地元件与导电路径耦合，以便至少提供导电路径的热接地，并且可替代地或另外地包括设置绝缘屏障，该隔离屏障构造成基本上电分离收集盘和导电路径中的至少一个。

10. 发明授权

US07696758B2 Plasma diagnostic apparatus and method 有权
标题翻译：等离子体诊断仪和方法
公开(公告)号：US07696758B2
公开(公告)日：2010-04-13
申请号：US12114043
申请日：2008-05-02
申请人： Chin-Wook Chung , Min-Hyung Lee , Sung-Ho Jang
发明人： Chin-Wook Chung , Min-Hyung Lee , Sung-Ho Jang
IPC分类号： G01N27/62
CPC分类号： H05H1/0081
摘要： Provided is a plasma diagnostic apparatus having a probe unit, which is inserted into a plasma or disposed at boundary of a plasma, the apparatus including: a signal supplying unit having a signal supplying source; a current detecting/voltage converting unit for applying a periodic voltage signal applied from the signal supplying unit to the probe unit, detecting the magnitude of the current flowing through the probe unit, and converting the detected current into a voltage; and a by-frequency measurement unit for computing the magnitude and phase of individual frequency components of the current flowing through the probe unit by receiving the voltage output from the current detecting/voltage converting unit as an input.
摘要翻译：本发明提供一种等离子体诊断装置，其具有被插入等离子体中或设置在等离子体的边界的探针单元，该装置包括：信号供给单元，具有信号供给源; 电流检测/电压转换单元，用于将从信号提供单元施加的周期性电压信号施加到探针单元，检测流过探针单元的电流的大小，并将检测到的电流转换成电压; 以及逐频测量单元，用于通过接收从电流检测/电压转换单元输出的电压作为输入来计算流过探针单元的电流的各个频率分量的幅度和相位。

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