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1. 发明授权

US09426873B2 System and method of determining effective glow discharge lamp current 有权
标题翻译：确定有效辉光放电灯电流的系统和方法
公开(公告)号：US09426873B2
公开(公告)日：2016-08-23
申请号：US14012760
申请日：2013-08-28
申请人： Leco Corporation
发明人： Ted J Casper , Sara K Casper , Kim Marshall
IPC分类号： H05H1/02 , H05H1/00
CPC分类号： H05H1/02 , H05H1/0081
摘要： The embodiments of the invention include a method for controlling plasma conditions of a glow discharge system using the integrated electron (or ion) pulse area extracted from the total lamp current. The method of using an integrated electron/ion pulse area for controlling plasma conditions allows for controlled analysis of conductive, non-conductive and layered materials without the need for estimation of plasma voltages. The method allows for control of sputter rates and plasma emissions that cannot be achieved using other methods such as capacitive divider calculations where actual thicknesses and dielectric constants are not known or predefined.
摘要翻译：本发明的实施例包括使用从总灯电流提取的积分电子（或离子）脉冲区域来控制辉光放电系统的等离子体条件的方法。使用集成电子/离子脉冲区域来控制等离子体条件的方法允许对导电，非导电和分层材料进行受控分析，而不需要估计等离子体电压。该方法允许控制溅射速率和等离子体发射，这些其他方法例如电容分压器计算不能实现，其中实际厚度和介电常数是未知的或预定义的。

2. 发明申请

US20140062306A1 SYSTEM AND METHOD OF DETERMINING EFFECTIVE GLOW DISCHARGE LAMP CURRENT 有权
标题翻译：确定有效玻璃放电灯电流的系统和方法
公开(公告)号：US20140062306A1
公开(公告)日：2014-03-06
申请号：US14012760
申请日：2013-08-28
申请人： Leco Corporation
发明人： Ted J Casper , Sara K Casper , Kim A Marshall
IPC分类号： H05H1/02
CPC分类号： H05H1/02 , H05H1/0081
摘要： The embodiments of the invention include a method for controlling plasma conditions of a glow discharge system using the integrated electron (or ion) pulse area extracted from the total lamp current. The method of using an integrated electron/ion pulse area for controlling plasma conditions allows for controlled analysis of conductive, non-conductive and layered materials without the need for estimation of plasma voltages. The method allows for control of sputter rates and plasma emissions that cannot be achieved using other methods such as capacitive divider calculations where actual thicknesses and dielectric constants are not known or predefined.
摘要翻译：本发明的实施例包括使用从总灯电流提取的积分电子（或离子）脉冲区域来控制辉光放电系统的等离子体条件的方法。使用集成电子/离子脉冲区域来控制等离子体条件的方法允许对导电，非导电和分层材料进行受控分析，而不需要估计等离子体电压。该方法允许控制溅射速率和等离子体发射，这些其他方法例如电容分压器计算不能实现，其中实际厚度和介电常数是未知的或预定义的。

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