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    • 1. 发明授权
    • Image pickup unit and image pickup apparatus
    • 图像拾取单元和图像拾取装置
    • US08428455B2
    • 2013-04-23
    • US12871654
    • 2010-08-30
    • Yoshikazu AsaiMasanori Sakai
    • Yoshikazu AsaiMasanori Sakai
    • G03B17/02
    • G03B17/02
    • An apparatus includes an image sensor unit, a retaining member configured to retain the image sensor unit on a photographer side and to retain an optical member on an object side, a first sealing member configured, when the image sensor unit is mounted on the retaining member, to form a closely sealed space by sealing between the image sensor unit and the retaining member, the first sealing member being provided on the photographer side of the retaining member, and a second sealing member configured, when the optical member is mounted on the retaining member, to form a closely sealed space by sealing between the optical member and the retaining member, the second sealing member being provided on the object side.
    • 一种装置,包括图像传感器单元,保持构件,其被配置为将图像传感器单元保持在拍摄者侧并将光学构件保持在物体侧;第一密封构件,当图像传感器单元安装在保持构件上时, 通过密封图像传感器单元和保持构件之间形成密封空间,第一密封构件设置在保持构件的摄影者侧上,第二密封构件构成为当光学构件安装在保持构件 通过密封在光学构件和保持构件之间形成密封的空间,第二密封构件设置在物体侧。
    • 2. 发明申请
    • IMAGE PICKUP UNIT AND IMAGE PICKUP APPARATUS
    • 图像拾取单元和图像拾取装置
    • US20110058805A1
    • 2011-03-10
    • US12871654
    • 2010-08-30
    • Yoshikazu AsaiMasanori Sakai
    • Yoshikazu AsaiMasanori Sakai
    • G03B17/02
    • G03B17/02
    • An apparatus includes an image sensor unit, a retaining member configured to retain the image sensor unit on a photographer side and to retain an optical member on an object side, a first sealing member configured, when the image sensor unit is mounted on the retaining member, to form a closely sealed space by sealing between the image sensor unit and the retaining member, the first sealing member being provided on the photographer side of the retaining member, and a second sealing member configured, when the optical member is mounted on the retaining member, to form a closely sealed space by sealing between the optical member and the retaining member, the second sealing member being provided on the object side.
    • 一种装置,包括图像传感器单元,保持构件,其被配置为将图像传感器单元保持在拍摄者侧并将光学构件保持在物体侧;第一密封构件,当图像传感器单元安装在保持构件上时, 通过密封图像传感器单元和保持构件之间形成密封空间,第一密封构件设置在保持构件的摄影者侧上,第二密封构件构成为当光学构件安装在保持构件 通过密封在光学构件和保持构件之间形成密封的空间,第二密封构件设置在物体侧。
    • 10. 发明授权
    • Substrate processing apparatus
    • 基板加工装置
    • US08211802B2
    • 2012-07-03
    • US12954369
    • 2010-11-24
    • Kazuyuki OkudaToru KagayaMasanori Sakai
    • Kazuyuki OkudaToru KagayaMasanori Sakai
    • H01L21/306B08B13/00
    • B08B5/00C23C16/4405C23C16/4412H01L21/02057H01L21/67253
    • A substrate processing apparatus cleaning method that includes: containing a cleaning gas in a reaction tube without generating a gas flow of the cleaning gas in the reaction tube by supplying the cleaning gas into the reaction tube and by completely stopping exhaustion of the cleaning gas from the reaction tube or by exhausting the cleaning gas at an exhausting rate which substantially does not affect uniform diffusion of the cleaning gas in the reaction tube from at a point of time of a period from a predetermined point of time before the cleaning gas is supplied into the reaction tube to a point of time when several seconds are elapsed after starting of supply of the cleaning gas into the reaction tube; and thereafter exhausting the cleaning gas from the reaction tube.
    • 一种基板处理装置的清洗方法,其特征在于,包括:在反应管内容纳清洗气体,在反应管内不产生清洗气体的气流,将清洗气体供给反应管, 反应管或通过以排气速率排出清洁气体,其排气速率基本上不影响清洁气体在反应管中的均匀扩散从在清洁气体被供给到预定时间之前的预定时间点的时间点 反应管到开始向反应管供给清洁气体后经过几秒钟的时间点; 然后从反应管中排出清洗气体。