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1. 发明授权

US5747815A Micro-miniature ionizer for gas sensor applications and method of making micro-miniature ionizer 失效
标题翻译：用于气体传感器应用的微型离子发生器和微型离子发生器的制造方法
公开(公告)号：US5747815A
公开(公告)日：1998-05-05
申请号：US685649
申请日：1996-07-24
申请人： Robert M. Young , Carl B. Freidhoff , Timothy T. Braggins , Thomas V. Congedo
发明人： Robert M. Young , Carl B. Freidhoff , Timothy T. Braggins , Thomas V. Congedo
IPC分类号： H01J49/28 , B01D59/44 , H01J49/00
CPC分类号： H01J49/147 , H01J49/0018 , H01J49/288
摘要： A gas ionizer is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The gas ionizer is located in a cavity provided in a semiconductor substrate which includes an inlet for introducing the gas to be analyzed. The gas ionizer ionizes the sample of gas drawn into the cavity through the inlet to generate an ionized sample gas. The gas ionizer generates energetic particles or photons which bombard the gas to be sampled to produce ionized gas. The energetic particles or photons can be generated by reverse-bias p-n junctions, radioactive isotopes, electron discharges, point emitters, and thermionic electron emitters. A layer of cesium chloride or cesium iodide having a low work function is formed on top of the reverse-bias p-n junction gas ionizer to increase current emitted per junction area and so that the gas ionizer can be exposed to atmospheric oxygen during storage and can operate in reduced atmosphere with no additional treatments. The cesium chloride layer and the cesium iodide layer do not readily electromigrate. A fabrication process of the mass spectrograph includes using plural masks to ensure proper exposure of resist on both flat and wall surfaces of the semiconductor surface having severe topography.
摘要翻译：提供一种用于分析气体样品的固态质谱仪中使用的气体离子发生器。气体离子发生器位于设置在半导体衬底中的空腔中，该半导体衬底包括用于引入待分析气体的入口。气体离子发生器将通过入口吸入空腔的气体样品离子化，产生离子化样品气体。气体离子发生器产生能量粒子或光子，其轰击待采样的气体以产生电离气体。高能粒子或光子可以通过反向偏置p-n结，放射性同位素，电子放电，点发射体和热离子电子发射体产生。在反向偏压pn结气体离子发生器的顶部形成一层具有低功函数的氯化铯或碘化铯，以增加每个接合面积的电流，从而使气体离子发生器在储存过程中暴露于大气中的氧气，在减少的气氛，没有额外的治疗。氯化铯层和碘化铯层不容易电解。质谱仪的制造方法包括使用多个掩模以确保抗蚀剂在具有严重形貌的半导体表面的平坦表面和壁表面上的适当曝光。

2. 发明授权

US5492867A Method for manufacturing a miniaturized solid state mass spectrograph 失效
标题翻译：制造小型化固态质谱仪的方法
公开(公告)号：US5492867A
公开(公告)日：1996-02-20
申请号：US320619
申请日：1994-10-07
申请人： Joseph C. Kotvas , Timothy T. Braggins , Robert M. Young , Carl B. Freidhoff
发明人： Joseph C. Kotvas , Timothy T. Braggins , Robert M. Young , Carl B. Freidhoff
IPC分类号： H01J49/28 , H01L21/465
CPC分类号： H01J49/0018 , H01J49/288
摘要： A method for forming a solid state mass spectrograph for analyzing a sample gas is provided in which a plurality of cavities are formed in a substrate, preferably, a semiconductor. Each of these cavities forms a chamber into which a different component of the mass spectrograph is provided. A plurality of orifices are formed between each of the cavities, forming an interconnecting passageway between each of the chambers. A dielectric layer is provided inside the cavities to serve as a separator between the substrate and electrodes to be later deposited in the cavity. An ionizer is provided in one of the cavities and an ion detector is provided in another of the cavities. The formed substrate is provided in a circuit board which contains interfacing and controlling electronics for the mass spectrograph. Preferably, the substrate is formed in two halves and the chambers are formed in a corresponding arrangement in each of the substrate halves. The substrate halves are then bonded together after the components are provided therein.
摘要翻译：提供一种用于形成用于分析样品气体的固态质谱仪的方法，其中在衬底中优选形成多个空腔，优选为半导体。这些空腔中的每一个形成一个室，其中提供质谱仪的不同组分。在每个空腔之间形成多个孔，在每个室之间形成互连通道。介质层设置在空腔内，用作基板和电极之间的隔板，以便稍后将其沉积在空腔中。其中一个空腔设有电离器，离子检测器设置在另一个空腔中。形成的基板设置在电路板中，该电路板包含用于质谱仪的接口和控制电子器件。优选地，基板形成为两半，并且所述室以相应的布置形成在每个基板半部中。然后在其中提供部件之后将基板半部结合在一起。

3. 发明授权

US5466932A Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases 失效
标题翻译：微型压电隔膜泵用于低压泵送气体
公开(公告)号：US5466932A
公开(公告)日：1995-11-14
申请号：US320614
申请日：1994-10-07
申请人： Robert M. Young , Carl B. Freidhoff , Dennis L. Polla , Peter J. Schiller
发明人： Robert M. Young , Carl B. Freidhoff , Dennis L. Polla , Peter J. Schiller
IPC分类号： G01N27/62 , F04B43/02 , F04B43/04 , H01J49/24 , H01J49/28 , F04B17/00
CPC分类号： H01J49/288 , F04B43/046 , H01J49/0018
摘要： A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one piezoelectrically-actuated diaphragm. Upon piezoelectrical actuation, the diaphragm accomplishes a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a pair of electrodes sandwiching a piezoelectric layer.
摘要翻译：提供了一种用于固体质谱仪分析样品气体的泵。该光谱仪由具有入口的空腔的半导体衬底，与入口相邻的气体离子化部分，与气体离子化部分相邻的质量过滤部分和与质量过滤部分相邻的检测器部分形成。泵连接到所述腔的每个部分，并抽空空腔并将样品气体吸入腔中。泵包括至少一个压电致动隔膜。在压电致动时，隔膜实现抽吸行程，抽吸空腔并将样品气体吸入空腔。优选地，隔膜由夹着压电层的一对电极形成。

4. 发明授权

US5386115A Solid state micro-machined mass spectrograph universal gas detection sensor 失效
标题翻译：固态微加工质谱仪通用气体检测传感器
公开(公告)号：US5386115A
公开(公告)日：1995-01-31
申请号：US124873
申请日：1993-09-22
申请人： Carl B. Freidhoff , Robert M. Young , Saptharishi Sriram
发明人： Carl B. Freidhoff , Robert M. Young , Saptharishi Sriram
IPC分类号： H01J49/28 , D01D59/44 , H01J49/00
CPC分类号： H01J49/288 , H01J49/0018
摘要： A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.
摘要翻译：固态质谱仪包括全部形成在半导体衬底的空腔内的入口，气体离子发生器，质量过滤器和检测器阵列。气体离子发生器可以是具有离子光学器件的固态电子发射器，该离子光学器件由形成在空腔形成室中的多孔分隔壁上的电极提供，空腔通过差分泵送而被排空。质量过滤器优选为具有由基板外部的永磁体提供的磁场或在腔壁上的磁性膜提供的维恩滤波器。维恩滤波器的电场由形成在空腔的壁上的电极提供。检测器阵列是在质量过滤器的色散平面中定向的线性阵列，并且包括在用作法拉第笼的腔的端部处的会聚电极，其将电荷传递到信号发生器，例如形成在衬底中的电荷耦合器件，但是从腔。

5. 发明授权

US5659171A Micro-miniature diaphragm pump for the low pressure pumping of gases 失效
标题翻译：微型隔膜泵用于低压泵送气体
公开(公告)号：US5659171A
公开(公告)日：1997-08-19
申请号：US320618
申请日：1994-10-07
申请人： Robert M. Young , Carl B. Freidhoff
发明人： Robert M. Young , Carl B. Freidhoff
IPC分类号： H01J49/28 , B01D59/44 , H01J49/00
CPC分类号： H01J49/288 , H01J49/24
摘要： A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one diaphragm and electrically-actuated resistor. The resistor generates heat upon electrical actuation thereby causing the diaphragm to accomplish a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a bilayered metal material having different thermal expansion rates or from a shape memory alloy.
摘要翻译：提供了一种用于固体质谱仪分析样品气体的泵。该光谱仪由具有入口的空腔的半导体衬底，与入口相邻的气体离子化部分，与气体离子化部分相邻的质量过滤部分和与质量过滤部分相邻的检测器部分形成。泵连接到所述腔的每个部分，并抽空空腔并将样品气体吸入腔中。该泵包括至少一个隔膜和电致动电阻器。电阻器在电致动时产生热量，从而使隔膜实现抽吸行程，抽吸空腔并将样品气体吸入空腔。优选地，隔膜由具有不同热膨胀率的双层金属材料或形状记忆合金形成。

6. 发明授权

US5536939A Miniaturized mass filter 失效
标题翻译：小型化质量过滤器
公开(公告)号：US5536939A
公开(公告)日：1996-07-16
申请号：US320474
申请日：1994-10-07
申请人： Carl B. Freidhoff , Robert M. Young
发明人： Carl B. Freidhoff , Robert M. Young
IPC分类号： H01J49/28 , B01D59/44 , H01J49/00
CPC分类号： H01J49/0018 , H01J49/288
摘要： A mass filter is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The mass filter is located in a cavity provided in a semiconductor substrate. The mass filter generates an electromagnetic field in the cavity which filters by mass/charge ratio an ionized portion of the sample of gas. The substrate has an inlet through which the gas to be analyzed flows through prior to reaching the mass filter. The mass filter can be either a single-focussing Wien filter or magnetic sector filter or can be a double-focussing filter which uses both an electric field and a magnetic field to separate the ions.
摘要翻译：提供了用于分析气体样品的固态质谱仪中使用的质量过滤器。质量过滤器位于设置在半导体衬底中的空腔中。质量过滤器在空腔中产生电磁场，其通过质量/电荷比率将气体样品的电离部分过滤。衬底具有入口，待分析的气体在到达质量过滤器之前流过。质量过滤器可以是单聚焦维恩滤波器或磁性扇形滤波器，或者可以是使用电场和磁场来分离离子的双重聚焦滤波器。

7. 发明授权

US5330088A Electrical contact containing a braze diffusion barrier 失效
标题翻译：含有钎焊扩散阻挡层的电接点
公开(公告)号：US5330088A
公开(公告)日：1994-07-19
申请号：US54171
申请日：1993-04-30
申请人： Graham A. Whitlow , Carl B. Freidhoff , Philip E. Carpentier , Paul O. Wayland
发明人： Graham A. Whitlow , Carl B. Freidhoff , Philip E. Carpentier , Paul O. Wayland
IPC分类号： B23K35/00 , B23K35/30 , H01H1/02 , H01H11/04 , B23K31/02
CPC分类号： B23K35/007 , H01H1/0203 , H01H11/045 , B23K35/3006 , Y10S428/929 , Y10T428/12806
摘要： A layer selected from a group comprising: molybdenum, tantalum, tungsten, osmium, rhenium, ruthenium and an alloy of two or more thereof on the under surface of an electrical contact acts as a barrier to copper diffusion from the braze material into the contact structure. A thin nickel layer on the barrier facilitates the brazing of the barrier coated contact surface to the copper electrodes.
摘要翻译：选自包括钼，钽，钨，锇，铼，钌以及其中两个或更多个的合金在电接触的下表面上的层作为铜从铜焊材料扩散到接触结构中的屏障。屏障上的薄镍层有利于阻挡涂层的接触表面与铜电极的钎焊。

8. 发明授权

US07649171B1 Miniature mass spectrometer for the analysis of biological small molecules 有权
标题翻译：微型质谱仪用于分析生物小分子
公开(公告)号：US07649171B1
公开(公告)日：2010-01-19
申请号：US11802183
申请日：2007-05-21
申请人： Carl B. Freidhoff
发明人： Carl B. Freidhoff
IPC分类号： H01J49/26
CPC分类号： H01J49/165 , H01J49/0018
摘要： Analysis of biological small molecules such as toxins, spores or cells is achieved by miniature mass spectrometer apparatus and apparatus attached thereto for vaporizing and ionizing a liquid sample fed into an evacuated vaporization chamber as an electrospray. The mass spectrometer apparatus includes: a collimation chamber, a repeller assembly, an internal ionization chamber, a mass filter and ion separation chamber, a drift space region, and a multi-channel ion detection array so as to permit the collection and analysis of ions formed over a wide mass range simultaneously. The vaporization chamber includes an output port adjacent the input to the collimation chamber so as to maximize the amount of vaporized material being fed into the mass spectrometer apparatus.
摘要翻译：生物小分子如毒素，孢子或细胞的分析是通过附着于其上的微型质谱仪装置和装置实现的，用于蒸发和电离作为电喷雾送入真空蒸发室的液体样品。质谱仪装置包括：准直室，推斥器组件，内部电离室，质量过滤器和离子分离室，漂移空间区域和多通道离子检测阵列，以便允许离子的收集和分析同时在宽质量范围内形成。蒸发室包括与准直室的输入相邻的输出端口，以便使进料到质谱仪装置中的汽化材料的量最大化。

9. 发明授权

US07576844B2 Systems and methods for use in detecting harmful aerosol particles 有权
公开(公告)号：US07576844B2
公开(公告)日：2009-08-18
申请号：US11349340
申请日：2006-02-08
申请人： Peter P. Hairston , Carl B. Freidhoff
发明人： Peter P. Hairston , Carl B. Freidhoff
IPC分类号： G01N21/00
CPC分类号： G01J3/32 , G01J3/02 , G01J3/0218 , G01J3/10 , G01J3/36 , G01J3/427 , G01J3/4406 , G01J2003/1213 , G01J2003/1217 , G01N15/1459 , G01N15/1463 , G01N21/53 , G01N21/645 , G01N21/6486 , G01N21/65 , G01N21/85 , G01N2015/0088 , G01N2015/144 , G01N2021/6417 , G01N2021/6419 , G01N2021/6421 , G01N2021/6467 , G01N2021/6482 , G01N2021/6484 , G01N2021/8592
摘要： The invention provides systems and methods for detecting aerosols. The systems and methods can be used to detect harmful aerosols, such as, bio-aerosols.

10. 发明申请

US20090081828A1 MEMS Fabrication Method 审中-公开
标题翻译： MEMS制造方法
公开(公告)号：US20090081828A1
公开(公告)日：2009-03-26
申请号：US11861523
申请日：2007-09-26
申请人： Carl B. Freidhoff , Silai V. Krishnaswamy , William K. Sterrett
发明人： Carl B. Freidhoff , Silai V. Krishnaswamy , William K. Sterrett
IPC分类号： H01L21/50
CPC分类号： B81C1/00888
摘要： The present invention provides methods for singulating microelectromechanical systems (MEMS) die from a wafer. A plurality of MEMS devices are formed on the top surface of a wafer, and a plurality of intersecting scribe lanes are then formed, on the bottom surface of the wafer, to define a plurality of dies, each including at least one MEMS device. The intersecting scribe lanes penetrate the wafer to a depth of about 80%, and the wafer is cleaved along the scribe lanes to separate each of the plurality of dies from the wafer.
摘要翻译：本发明提供了从晶片分离微机电系统（MEMS）管芯的方法。在晶片的顶表面上形成多个MEMS器件，然后在晶片的底表面上形成多个相交的划线，以限定多个芯片，每个芯片包括至少一个MEMS器件。相交的划线通道将晶片穿透到约80％的深度，并且晶片沿着划线切割，以将多个管芯中的每一个与晶片分离。

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