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    • 1. 发明授权
    • Micro-miniature ionizer for gas sensor applications and method of making
micro-miniature ionizer
    • 用于气体传感器应用的微型离子发生器和微型离子发生器的制造方法
    • US5747815A
    • 1998-05-05
    • US685649
    • 1996-07-24
    • Robert M. YoungCarl B. FreidhoffTimothy T. BragginsThomas V. Congedo
    • Robert M. YoungCarl B. FreidhoffTimothy T. BragginsThomas V. Congedo
    • H01J49/28B01D59/44H01J49/00
    • H01J49/147H01J49/0018H01J49/288
    • A gas ionizer is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The gas ionizer is located in a cavity provided in a semiconductor substrate which includes an inlet for introducing the gas to be analyzed. The gas ionizer ionizes the sample of gas drawn into the cavity through the inlet to generate an ionized sample gas. The gas ionizer generates energetic particles or photons which bombard the gas to be sampled to produce ionized gas. The energetic particles or photons can be generated by reverse-bias p-n junctions, radioactive isotopes, electron discharges, point emitters, and thermionic electron emitters. A layer of cesium chloride or cesium iodide having a low work function is formed on top of the reverse-bias p-n junction gas ionizer to increase current emitted per junction area and so that the gas ionizer can be exposed to atmospheric oxygen during storage and can operate in reduced atmosphere with no additional treatments. The cesium chloride layer and the cesium iodide layer do not readily electromigrate. A fabrication process of the mass spectrograph includes using plural masks to ensure proper exposure of resist on both flat and wall surfaces of the semiconductor surface having severe topography.
    • 提供一种用于分析气体样品的固态质谱仪中使用的气体离子发生器。 气体离子发生器位于设置在半导体衬底中的空腔中,该半导体衬底包括用于引入待分析气体的入口。 气体离子发生器将通过入口吸入空腔的气体样品离子化,产生离子化样品气体。 气体离子发生器产生能量粒子或光子,其轰击待采样的气体以产生电离气体。 高能粒子或光子可以通过反向偏置p-n结,放射性同位素,电子放电,点发射体和热离子电子发射体产生。 在反向偏压pn结气体离子发生器的顶部形成一层具有低功函数的氯化铯或碘化铯,以增加每个接合面积的电流,从而使气体离子发生器在储存过程中暴露于大气中的氧气, 在减少的气氛,没有额外的治疗。 氯化铯层和碘化铯层不容易电解。 质谱仪的制造方法包括使用多个掩模以确保抗蚀剂在具有严重形貌的半导体表面的平坦表面和壁表面上的适当曝光。
    • 2. 发明授权
    • Method for manufacturing a miniaturized solid state mass spectrograph
    • 制造小型化固态质谱仪的方法
    • US5492867A
    • 1996-02-20
    • US320619
    • 1994-10-07
    • Joseph C. KotvasTimothy T. BragginsRobert M. YoungCarl B. Freidhoff
    • Joseph C. KotvasTimothy T. BragginsRobert M. YoungCarl B. Freidhoff
    • H01J49/28H01L21/465
    • H01J49/0018H01J49/288
    • A method for forming a solid state mass spectrograph for analyzing a sample gas is provided in which a plurality of cavities are formed in a substrate, preferably, a semiconductor. Each of these cavities forms a chamber into which a different component of the mass spectrograph is provided. A plurality of orifices are formed between each of the cavities, forming an interconnecting passageway between each of the chambers. A dielectric layer is provided inside the cavities to serve as a separator between the substrate and electrodes to be later deposited in the cavity. An ionizer is provided in one of the cavities and an ion detector is provided in another of the cavities. The formed substrate is provided in a circuit board which contains interfacing and controlling electronics for the mass spectrograph. Preferably, the substrate is formed in two halves and the chambers are formed in a corresponding arrangement in each of the substrate halves. The substrate halves are then bonded together after the components are provided therein.
    • 提供一种用于形成用于分析样品气体的固态质谱仪的方法,其中在衬底中优选形成多个空腔,优选为半导体。 这些空腔中的每一个形成一个室,其中提供质谱仪的不同组分。 在每个空腔之间形成多个孔,在每个室之间形成互连通道。 介质层设置在空腔内,用作基板和电极之间的隔板,以便稍后将其沉积在空腔中。 其中一个空腔设有电离器,离子检测器设置在另一个空腔中。 形成的基板设置在电路板中,该电路板包含用于质谱仪的接口和控制电子器件。 优选地,基板形成为两半,并且所述室以相应的布置形成在每个基板半部中。 然后在其中提供部件之后将基板半部结合在一起。
    • 4. 发明授权
    • Solid state micro-machined mass spectrograph universal gas detection
sensor
    • 固态微加工质谱仪通用气体检测传感器
    • US5386115A
    • 1995-01-31
    • US124873
    • 1993-09-22
    • Carl B. FreidhoffRobert M. YoungSaptharishi Sriram
    • Carl B. FreidhoffRobert M. YoungSaptharishi Sriram
    • H01J49/28D01D59/44H01J49/00
    • H01J49/288H01J49/0018
    • A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.
    • 固态质谱仪包括全部形成在半导体衬底的空腔内的入口,气体离子发生器,质量过滤器和检测器阵列。 气体离子发生器可以是具有离子光学器件的固态电子发射器,该离子光学器件由形成在空腔形成室中的多孔分隔壁上的电极提供,空腔通过差分泵送而被排空。 质量过滤器优选为具有由基板外部的永磁体提供的磁场或在腔壁上的磁性膜提供的维恩滤波器。 维恩滤波器的电场由形成在空腔的壁上的电极提供。 检测器阵列是在质量过滤器的色散平面中定向的线性阵列,并且包括在用作法拉第笼的腔的端部处的会聚电极,其将电荷传递到信号发生器,例如形成在衬底中的电荷耦合器件,但是从腔 。
    • 5. 发明授权
    • Micro-miniature diaphragm pump for the low pressure pumping of gases
    • 微型隔膜泵用于低压泵送气体
    • US5659171A
    • 1997-08-19
    • US320618
    • 1994-10-07
    • Robert M. YoungCarl B. Freidhoff
    • Robert M. YoungCarl B. Freidhoff
    • H01J49/28B01D59/44H01J49/00
    • H01J49/288H01J49/24
    • A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one diaphragm and electrically-actuated resistor. The resistor generates heat upon electrical actuation thereby causing the diaphragm to accomplish a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a bilayered metal material having different thermal expansion rates or from a shape memory alloy.
    • 提供了一种用于固体质谱仪分析样品气体的泵。 该光谱仪由具有入口的空腔的半导体衬底,与入口相邻的气体离子化部分,与气体离子化部分相邻的质量过滤部分和与质量过滤部分相邻的检测器部分形成。 泵连接到所述腔的每个部分,并抽空空腔并将样品气体吸入腔中。 该泵包括至少一个隔膜和电致动电阻器。 电阻器在电致动时产生热量,从而使隔膜实现抽吸行程,抽吸空腔并将样品气体吸入空腔。 优选地,隔膜由具有不同热膨胀率的双层金属材料或形状记忆合金形成。
    • 6. 发明授权
    • Miniaturized mass filter
    • 小型化质量过滤器
    • US5536939A
    • 1996-07-16
    • US320474
    • 1994-10-07
    • Carl B. FreidhoffRobert M. Young
    • Carl B. FreidhoffRobert M. Young
    • H01J49/28B01D59/44H01J49/00
    • H01J49/0018H01J49/288
    • A mass filter is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The mass filter is located in a cavity provided in a semiconductor substrate. The mass filter generates an electromagnetic field in the cavity which filters by mass/charge ratio an ionized portion of the sample of gas. The substrate has an inlet through which the gas to be analyzed flows through prior to reaching the mass filter. The mass filter can be either a single-focussing Wien filter or magnetic sector filter or can be a double-focussing filter which uses both an electric field and a magnetic field to separate the ions.
    • 提供了用于分析气体样品的固态质谱仪中使用的质量过滤器。 质量过滤器位于设置在半导体衬底中的空腔中。 质量过滤器在空腔中产生电磁场,其通过质量/电荷比率将气体样品的电离部分过滤。 衬底具有入口,待分析的气体在到达质量过滤器之前流过。 质量过滤器可以是单聚焦维恩滤波器或磁性扇形滤波器,或者可以是使用电场和磁场来分离离子的双重聚焦滤波器。
    • 8. 发明授权
    • Miniature mass spectrometer for the analysis of biological small molecules
    • 微型质谱仪用于分析生物小分子
    • US07649171B1
    • 2010-01-19
    • US11802183
    • 2007-05-21
    • Carl B. Freidhoff
    • Carl B. Freidhoff
    • H01J49/26
    • H01J49/165H01J49/0018
    • Analysis of biological small molecules such as toxins, spores or cells is achieved by miniature mass spectrometer apparatus and apparatus attached thereto for vaporizing and ionizing a liquid sample fed into an evacuated vaporization chamber as an electrospray. The mass spectrometer apparatus includes: a collimation chamber, a repeller assembly, an internal ionization chamber, a mass filter and ion separation chamber, a drift space region, and a multi-channel ion detection array so as to permit the collection and analysis of ions formed over a wide mass range simultaneously. The vaporization chamber includes an output port adjacent the input to the collimation chamber so as to maximize the amount of vaporized material being fed into the mass spectrometer apparatus.
    • 生物小分子如毒素,孢子或细胞的分析是通过附着于其上的微型质谱仪装置和装置实现的,用于蒸发和电离作为电喷雾送入真空蒸发室的液体样品。 质谱仪装置包括:准直室,推斥器组件,内部电离室,质量过滤器和离子分离室,漂移空间区域和多通道离子检测阵列,以便允许离子的收集和分析 同时在宽质量范围内形成。 蒸发室包括与准直室的输入相邻的输出端口,以便使进料到质谱仪装置中的汽化材料的量最大化。