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1. 发明授权

US5466932A Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases 失效
标题翻译：微型压电隔膜泵用于低压泵送气体
公开(公告)号：US5466932A
公开(公告)日：1995-11-14
申请号：US320614
申请日：1994-10-07
申请人： Robert M. Young , Carl B. Freidhoff , Dennis L. Polla , Peter J. Schiller
发明人： Robert M. Young , Carl B. Freidhoff , Dennis L. Polla , Peter J. Schiller
IPC分类号： G01N27/62 , F04B43/02 , F04B43/04 , H01J49/24 , H01J49/28 , F04B17/00
CPC分类号： H01J49/288 , F04B43/046 , H01J49/0018
摘要： A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one piezoelectrically-actuated diaphragm. Upon piezoelectrical actuation, the diaphragm accomplishes a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a pair of electrodes sandwiching a piezoelectric layer.
摘要翻译：提供了一种用于固体质谱仪分析样品气体的泵。该光谱仪由具有入口的空腔的半导体衬底，与入口相邻的气体离子化部分，与气体离子化部分相邻的质量过滤部分和与质量过滤部分相邻的检测器部分形成。泵连接到所述腔的每个部分，并抽空空腔并将样品气体吸入腔中。泵包括至少一个压电致动隔膜。在压电致动时，隔膜实现抽吸行程，抽吸空腔并将样品气体吸入空腔。优选地，隔膜由夹着压电层的一对电极形成。

2. 发明授权

US5386115A Solid state micro-machined mass spectrograph universal gas detection sensor 失效
标题翻译：固态微加工质谱仪通用气体检测传感器
公开(公告)号：US5386115A
公开(公告)日：1995-01-31
申请号：US124873
申请日：1993-09-22
申请人： Carl B. Freidhoff , Robert M. Young , Saptharishi Sriram
发明人： Carl B. Freidhoff , Robert M. Young , Saptharishi Sriram
IPC分类号： H01J49/28 , D01D59/44 , H01J49/00
CPC分类号： H01J49/288 , H01J49/0018
摘要： A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.
摘要翻译：固态质谱仪包括全部形成在半导体衬底的空腔内的入口，气体离子发生器，质量过滤器和检测器阵列。气体离子发生器可以是具有离子光学器件的固态电子发射器，该离子光学器件由形成在空腔形成室中的多孔分隔壁上的电极提供，空腔通过差分泵送而被排空。质量过滤器优选为具有由基板外部的永磁体提供的磁场或在腔壁上的磁性膜提供的维恩滤波器。维恩滤波器的电场由形成在空腔的壁上的电极提供。检测器阵列是在质量过滤器的色散平面中定向的线性阵列，并且包括在用作法拉第笼的腔的端部处的会聚电极，其将电荷传递到信号发生器，例如形成在衬底中的电荷耦合器件，但是从腔。

3. 发明授权

US5659171A Micro-miniature diaphragm pump for the low pressure pumping of gases 失效
标题翻译：微型隔膜泵用于低压泵送气体
公开(公告)号：US5659171A
公开(公告)日：1997-08-19
申请号：US320618
申请日：1994-10-07
申请人： Robert M. Young , Carl B. Freidhoff
发明人： Robert M. Young , Carl B. Freidhoff
IPC分类号： H01J49/28 , B01D59/44 , H01J49/00
CPC分类号： H01J49/288 , H01J49/24
摘要： A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one diaphragm and electrically-actuated resistor. The resistor generates heat upon electrical actuation thereby causing the diaphragm to accomplish a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a bilayered metal material having different thermal expansion rates or from a shape memory alloy.
摘要翻译：提供了一种用于固体质谱仪分析样品气体的泵。该光谱仪由具有入口的空腔的半导体衬底，与入口相邻的气体离子化部分，与气体离子化部分相邻的质量过滤部分和与质量过滤部分相邻的检测器部分形成。泵连接到所述腔的每个部分，并抽空空腔并将样品气体吸入腔中。该泵包括至少一个隔膜和电致动电阻器。电阻器在电致动时产生热量，从而使隔膜实现抽吸行程，抽吸空腔并将样品气体吸入空腔。优选地，隔膜由具有不同热膨胀率的双层金属材料或形状记忆合金形成。

4. 发明授权

US5492867A Method for manufacturing a miniaturized solid state mass spectrograph 失效
标题翻译：制造小型化固态质谱仪的方法
公开(公告)号：US5492867A
公开(公告)日：1996-02-20
申请号：US320619
申请日：1994-10-07
申请人： Joseph C. Kotvas , Timothy T. Braggins , Robert M. Young , Carl B. Freidhoff
发明人： Joseph C. Kotvas , Timothy T. Braggins , Robert M. Young , Carl B. Freidhoff
IPC分类号： H01J49/28 , H01L21/465
CPC分类号： H01J49/0018 , H01J49/288
摘要： A method for forming a solid state mass spectrograph for analyzing a sample gas is provided in which a plurality of cavities are formed in a substrate, preferably, a semiconductor. Each of these cavities forms a chamber into which a different component of the mass spectrograph is provided. A plurality of orifices are formed between each of the cavities, forming an interconnecting passageway between each of the chambers. A dielectric layer is provided inside the cavities to serve as a separator between the substrate and electrodes to be later deposited in the cavity. An ionizer is provided in one of the cavities and an ion detector is provided in another of the cavities. The formed substrate is provided in a circuit board which contains interfacing and controlling electronics for the mass spectrograph. Preferably, the substrate is formed in two halves and the chambers are formed in a corresponding arrangement in each of the substrate halves. The substrate halves are then bonded together after the components are provided therein.
摘要翻译：提供一种用于形成用于分析样品气体的固态质谱仪的方法，其中在衬底中优选形成多个空腔，优选为半导体。这些空腔中的每一个形成一个室，其中提供质谱仪的不同组分。在每个空腔之间形成多个孔，在每个室之间形成互连通道。介质层设置在空腔内，用作基板和电极之间的隔板，以便稍后将其沉积在空腔中。其中一个空腔设有电离器，离子检测器设置在另一个空腔中。形成的基板设置在电路板中，该电路板包含用于质谱仪的接口和控制电子器件。优选地，基板形成为两半，并且所述室以相应的布置形成在每个基板半部中。然后在其中提供部件之后将基板半部结合在一起。

5. 发明授权

US5747815A Micro-miniature ionizer for gas sensor applications and method of making micro-miniature ionizer 失效
标题翻译：用于气体传感器应用的微型离子发生器和微型离子发生器的制造方法
公开(公告)号：US5747815A
公开(公告)日：1998-05-05
申请号：US685649
申请日：1996-07-24
申请人： Robert M. Young , Carl B. Freidhoff , Timothy T. Braggins , Thomas V. Congedo
发明人： Robert M. Young , Carl B. Freidhoff , Timothy T. Braggins , Thomas V. Congedo
IPC分类号： H01J49/28 , B01D59/44 , H01J49/00
CPC分类号： H01J49/147 , H01J49/0018 , H01J49/288
摘要： A gas ionizer is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The gas ionizer is located in a cavity provided in a semiconductor substrate which includes an inlet for introducing the gas to be analyzed. The gas ionizer ionizes the sample of gas drawn into the cavity through the inlet to generate an ionized sample gas. The gas ionizer generates energetic particles or photons which bombard the gas to be sampled to produce ionized gas. The energetic particles or photons can be generated by reverse-bias p-n junctions, radioactive isotopes, electron discharges, point emitters, and thermionic electron emitters. A layer of cesium chloride or cesium iodide having a low work function is formed on top of the reverse-bias p-n junction gas ionizer to increase current emitted per junction area and so that the gas ionizer can be exposed to atmospheric oxygen during storage and can operate in reduced atmosphere with no additional treatments. The cesium chloride layer and the cesium iodide layer do not readily electromigrate. A fabrication process of the mass spectrograph includes using plural masks to ensure proper exposure of resist on both flat and wall surfaces of the semiconductor surface having severe topography.
摘要翻译：提供一种用于分析气体样品的固态质谱仪中使用的气体离子发生器。气体离子发生器位于设置在半导体衬底中的空腔中，该半导体衬底包括用于引入待分析气体的入口。气体离子发生器将通过入口吸入空腔的气体样品离子化，产生离子化样品气体。气体离子发生器产生能量粒子或光子，其轰击待采样的气体以产生电离气体。高能粒子或光子可以通过反向偏置p-n结，放射性同位素，电子放电，点发射体和热离子电子发射体产生。在反向偏压pn结气体离子发生器的顶部形成一层具有低功函数的氯化铯或碘化铯，以增加每个接合面积的电流，从而使气体离子发生器在储存过程中暴露于大气中的氧气，在减少的气氛，没有额外的治疗。氯化铯层和碘化铯层不容易电解。质谱仪的制造方法包括使用多个掩模以确保抗蚀剂在具有严重形貌的半导体表面的平坦表面和壁表面上的适当曝光。

6. 发明授权

US5536939A Miniaturized mass filter 失效
标题翻译：小型化质量过滤器
公开(公告)号：US5536939A
公开(公告)日：1996-07-16
申请号：US320474
申请日：1994-10-07
申请人： Carl B. Freidhoff , Robert M. Young
发明人： Carl B. Freidhoff , Robert M. Young
IPC分类号： H01J49/28 , B01D59/44 , H01J49/00
CPC分类号： H01J49/0018 , H01J49/288
摘要： A mass filter is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The mass filter is located in a cavity provided in a semiconductor substrate. The mass filter generates an electromagnetic field in the cavity which filters by mass/charge ratio an ionized portion of the sample of gas. The substrate has an inlet through which the gas to be analyzed flows through prior to reaching the mass filter. The mass filter can be either a single-focussing Wien filter or magnetic sector filter or can be a double-focussing filter which uses both an electric field and a magnetic field to separate the ions.
摘要翻译：提供了用于分析气体样品的固态质谱仪中使用的质量过滤器。质量过滤器位于设置在半导体衬底中的空腔中。质量过滤器在空腔中产生电磁场，其通过质量/电荷比率将气体样品的电离部分过滤。衬底具有入口，待分析的气体在到达质量过滤器之前流过。质量过滤器可以是单聚焦维恩滤波器或磁性扇形滤波器，或者可以是使用电场和磁场来分离离子的双重聚焦滤波器。

7. 发明申请

US20210066571A1 SUPERCONDUCTOR THERMAL FILTER 有权
公开(公告)号：US20210066571A1
公开(公告)日：2021-03-04
申请号：US16554155
申请日：2019-08-28
申请人： Aaron A. Hathaway , Robert M. Young , John X. Przybysz , Greg Boyd , Zachary Keane
发明人： Aaron A. Hathaway , Robert M. Young , John X. Przybysz , Greg Boyd , Zachary Keane
IPC分类号： H01L39/22 , H01L39/12 , H01L39/24 , F25B21/02
摘要： A superconductor thermal filter is disclosed that includes a normal metal layer having a first side, an insulating layer overlying the first side of the normal metal layer, and a multilayer superconductor structure having a first side overlying a side of the insulting layer opposite the side that overlies the normal metal layer. The multilayer superconductor structure is comprised of a plurality of superconductor layers with each superconductor layer having a smaller superconducting energy band gap than the preceding superconductor as the superconductor layers extend away from the normal metal layer. The thermal filter further includes a normal metal layer quasiparticle trap having a first side and a second side with the first side being disposed on a second side of the multilayer superconductor. A bias voltage is applied between the normal metal layer and the normal metal layer quasiparticle trap to remove hot electrons from the normal metal layer.

8. 发明授权

US08278666B1 Method and apparatus for growing high purity 2H-silicon carbide 有权
标题翻译：生长高纯度2H-碳化硅的方法和装置
公开(公告)号：US08278666B1
公开(公告)日：2012-10-02
申请号：US12821877
申请日：2010-06-23
申请人： Narsingh B. Singh , Sean R. McLaughlin , Thomas J. Knight , Robert M. Young , Brian P. Wagner , David A. Kahler , Andre E. Berghmans , David J. Knuteson , Ty R. McNutt , Jerry W. Hedrick, Jr. , George M. Bates , Kenneth Petrosky
发明人： Narsingh B. Singh , Sean R. McLaughlin , Thomas J. Knight , Robert M. Young , Brian P. Wagner , David A. Kahler , Andre E. Berghmans , David J. Knuteson , Ty R. McNutt , Jerry W. Hedrick, Jr. , George M. Bates , Kenneth Petrosky
IPC分类号： H01L29/15 , H01L31/0312
CPC分类号： H01L21/02381 , C30B23/02 , C30B25/02 , C30B25/183 , C30B29/36 , C30B29/403 , H01L21/02447 , H01L21/02502 , H01L21/0254 , H01L21/0262
摘要： The disclosure relates to a high purity 2H-SiC composition and methods for making same. The embodiments represented herein apply to both thin film and bulk growth of 2H-SiC. According to one embodiment, the disclosure relates to doping an underlying substrate or support layer with one or more surfactants to nucleate and grow high purity 2H-SiC. In another embodiment, the disclosure relates to a method for preparing 2H-SiC compositions by nucleating 2H-SiC on another SiC polytype using one or more surfactants. The surfactants can include AlN, Te, Sb and similar compositions. These nucleate SiC into disc form which changes to hexagonal 2H-SiC material.
摘要翻译：本公开涉及高纯度2H-SiC组合物及其制备方法。这里所示的实施方案适用于2H-SiC的薄膜和体积生长。根据一个实施方案，本公开涉及用一种或多种表面活性剂掺杂下面的基底或支撑层以使高纯度2H-SiC成核和生长。在另一个实施方案中，本公开内容涉及通过使用一种或多种表面活性剂在其它SiC多型体上成核2H-SiC制备2H-SiC组合物的方法。表面活性剂可以包括AlN，Te，Sb和类似组合物。这些将SiC成核转变成六角形2H-SiC材料的盘形。

9. 发明授权

US08018053B2 Heat transfer device 有权
标题翻译：传热装置
公开(公告)号：US08018053B2
公开(公告)日：2011-09-13
申请号：US12023831
申请日：2008-01-31
申请人： Harvey C. Nathanson , Robert M. Young , Joseph T. Smith , Robert S. Howell , Archer S. Mitchell
发明人： Harvey C. Nathanson , Robert M. Young , Joseph T. Smith , Robert S. Howell , Archer S. Mitchell
IPC分类号： H01L23/34 , H01L35/00
CPC分类号： H01L35/00 , H01L23/34 , H01L2924/0002 , H01L2924/00
摘要： One example discloses a heat transfer device that can comprise a semiconductor material having a first region and a second region. The first region and the second region are doped to propel a charged carrier from the first region to the second region. The heat transfer device can also comprise an array of pointed tips thermoelectrically communicating with the second region. A heat sink faces the array, and a vacuum tunneling region is formed between the pointed tips and the heat sink. The heat transfer device further can further comprise a power source for biasing the heat sink with respect to the first region. The first region defines an N-type semiconductor material and the second region defines a P-type semiconductor material.
摘要翻译：一个实例公开了一种传热装置，其可以包括具有第一区域和第二区域的半导体材料。第一区域和第二区域被掺杂以将带电载体从第一区域推动到第二区域。传热装置还可以包括与第二区域热电连通的尖端的阵列。散热器面向阵列，并且在尖端和散热器之间形成真空隧道区域。传热装置还可以进一步包括用于相对于第一区域偏置散热器的电源。第一区域限定N型半导体材料，第二区域限定P型半导体材料。

10. 发明授权

US10998485B1 Cooler device with superconductor shunts 有权
公开(公告)号：US10998485B1
公开(公告)日：2021-05-04
申请号：US16741341
申请日：2020-01-13
申请人： John X. Przybysz , Robert M. Young , Aaron Ashley Hathaway , Edward R. Engbrecht , Monica P. Lilly
发明人： John X. Przybysz , Robert M. Young , Aaron Ashley Hathaway , Edward R. Engbrecht , Monica P. Lilly
IPC分类号： H01L39/18 , H01L39/02 , H01L23/00 , H01L39/24
摘要： A solid state cooler device is disclosed that includes a first superconductor shunt, a first normal metal pad disposed on the first superconductor shunt, and a first insulator layer and a second insulator layer disposed on the normal metal pad and separated from one another by a gap. The solid state cooler device also includes a first superconductor pad disposed on the first insulator layer and a second superconductor pad disposed on the second insulator layer, a first conductive pad coupled to the first superconductor pad, and a second conductive pad coupled to the second superconductor pad. Hot electrons are removed from the first normal metal pad when a bias voltage is applied between the first conductive pad and the second conductive pad, wherein the first superconductor shunt facilitates even current distribution through the device.

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