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1. 发明授权

US10998485B1 Cooler device with superconductor shunts 有权
公开(公告)号：US10998485B1
公开(公告)日：2021-05-04
申请号：US16741341
申请日：2020-01-13
申请人： John X. Przybysz , Robert M. Young , Aaron Ashley Hathaway , Edward R. Engbrecht , Monica P. Lilly
发明人： John X. Przybysz , Robert M. Young , Aaron Ashley Hathaway , Edward R. Engbrecht , Monica P. Lilly
IPC分类号： H01L39/18 , H01L39/02 , H01L23/00 , H01L39/24
摘要： A solid state cooler device is disclosed that includes a first superconductor shunt, a first normal metal pad disposed on the first superconductor shunt, and a first insulator layer and a second insulator layer disposed on the normal metal pad and separated from one another by a gap. The solid state cooler device also includes a first superconductor pad disposed on the first insulator layer and a second superconductor pad disposed on the second insulator layer, a first conductive pad coupled to the first superconductor pad, and a second conductive pad coupled to the second superconductor pad. Hot electrons are removed from the first normal metal pad when a bias voltage is applied between the first conductive pad and the second conductive pad, wherein the first superconductor shunt facilitates even current distribution through the device.

2. 发明申请

US20090194870A1 Method and Apparatus for Solid State Cooling System 有权
标题翻译：固态冷却系统的方法和装置
公开(公告)号：US20090194870A1
公开(公告)日：2009-08-06
申请号：US12023831
申请日：2008-01-31
申请人： Harvey C. Nathanson , Robert M. Young , Joseph T. Smith , Robert S. Howell , Archer S. Mitchell
发明人： Harvey C. Nathanson , Robert M. Young , Joseph T. Smith , Robert S. Howell , Archer S. Mitchell
IPC分类号： H01L23/34 , H01L35/00
CPC分类号： H01L35/00 , H01L23/34 , H01L2924/0002 , H01L2924/00
摘要： The disclosure relates to a Point Cooler based on a combination of principles, including large area, low current density PN junction cooling, and electron emission from heavily doped shallowly-depleted P tips. Using Junction Cooling rather than thermoelectric cooling enables an all silicon device to be made that favorably competes with the commercial thermoelectric cooling systems. Theoretical values of THOT/TCOLD of 6 or more (in contrast to about 1.5 for other solid state refrigerators) predict this single-stage solid state vacuum electronic cooler can approach 50K at light loading, significantly lower than conventional Bismuth Telluride based thermo electrics. The high Z values for PN junction cooling with wire connection and Tunnel heat extraction opens up solid state vibration-less form fit and function replacement cooling.
摘要翻译：本公开涉及基于原理组合的点冷却器，包括大面积，低电流密度PN结冷却和来自重掺杂的浅耗尽P尖端的电子发射。使用接合冷却而不是热电冷却使得所有的硅器件能够被制造成与商业热电冷却系统相竞争。 THOT / TCOLD的理论值为6以上（与其他固态冰箱的1.5倍相比）预测，这种单级固态真空电子式冷却器在轻载时可达到50K，明显低于传统的碲化铋基热电。通过电线连接和隧道热提取的PN结冷却的高Z值打开固态无振动形式配合和功能更换冷却。

3. 发明授权

US07102472B1 MEMS device 有权
标题翻译： MEMS器件
公开(公告)号：US07102472B1
公开(公告)日：2006-09-05
申请号：US10839241
申请日：2004-05-06
申请人： Harvey C. Nathanson , Christopher Kirby , Robert Tranchini , Robert M. Young
发明人： Harvey C. Nathanson , Christopher Kirby , Robert Tranchini , Robert M. Young
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2001/0084 , H01H2059/0018
摘要： A MEMS device having a support frame positioned on a substrate surrounding a first electrode. A rigid flange portion at the top of the support frame is closely space from, and is connected to, a second electrode by relatively short spring members. RF conductors connected to respective first and second electrodes complete an RF switch. A dielectric layer on the first electrode forms a capacitive type device and includes an electrostatic shield layer on its surface. This electrostatic shield layer is connected to ground by a multi megohm bleeder resistance.
摘要翻译： MEMS器件具有位于围绕第一电极的基板上的支撑框架。支撑框架顶部的刚性凸缘部分通过相对较短的弹簧构件与第二电极紧密地隔开并与之连接。连接到相应的第一和第二电极的RF导体完成RF开关。第一电极上的电介质层形成电容型器件，并且在其表面上包括静电屏蔽层。该静电屏蔽层通过多兆欧放电电阻连接到地面。

4. 发明授权

US5659171A Micro-miniature diaphragm pump for the low pressure pumping of gases 失效
标题翻译：微型隔膜泵用于低压泵送气体
公开(公告)号：US5659171A
公开(公告)日：1997-08-19
申请号：US320618
申请日：1994-10-07
申请人： Robert M. Young , Carl B. Freidhoff
发明人： Robert M. Young , Carl B. Freidhoff
IPC分类号： H01J49/28 , B01D59/44 , H01J49/00
CPC分类号： H01J49/288 , H01J49/24
摘要： A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one diaphragm and electrically-actuated resistor. The resistor generates heat upon electrical actuation thereby causing the diaphragm to accomplish a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a bilayered metal material having different thermal expansion rates or from a shape memory alloy.
摘要翻译：提供了一种用于固体质谱仪分析样品气体的泵。该光谱仪由具有入口的空腔的半导体衬底，与入口相邻的气体离子化部分，与气体离子化部分相邻的质量过滤部分和与质量过滤部分相邻的检测器部分形成。泵连接到所述腔的每个部分，并抽空空腔并将样品气体吸入腔中。该泵包括至少一个隔膜和电致动电阻器。电阻器在电致动时产生热量，从而使隔膜实现抽吸行程，抽吸空腔并将样品气体吸入空腔。优选地，隔膜由具有不同热膨胀率的双层金属材料或形状记忆合金形成。

5. 发明授权

US5492867A Method for manufacturing a miniaturized solid state mass spectrograph 失效
标题翻译：制造小型化固态质谱仪的方法
公开(公告)号：US5492867A
公开(公告)日：1996-02-20
申请号：US320619
申请日：1994-10-07
申请人： Joseph C. Kotvas , Timothy T. Braggins , Robert M. Young , Carl B. Freidhoff
发明人： Joseph C. Kotvas , Timothy T. Braggins , Robert M. Young , Carl B. Freidhoff
IPC分类号： H01J49/28 , H01L21/465
CPC分类号： H01J49/0018 , H01J49/288
摘要： A method for forming a solid state mass spectrograph for analyzing a sample gas is provided in which a plurality of cavities are formed in a substrate, preferably, a semiconductor. Each of these cavities forms a chamber into which a different component of the mass spectrograph is provided. A plurality of orifices are formed between each of the cavities, forming an interconnecting passageway between each of the chambers. A dielectric layer is provided inside the cavities to serve as a separator between the substrate and electrodes to be later deposited in the cavity. An ionizer is provided in one of the cavities and an ion detector is provided in another of the cavities. The formed substrate is provided in a circuit board which contains interfacing and controlling electronics for the mass spectrograph. Preferably, the substrate is formed in two halves and the chambers are formed in a corresponding arrangement in each of the substrate halves. The substrate halves are then bonded together after the components are provided therein.
摘要翻译：提供一种用于形成用于分析样品气体的固态质谱仪的方法，其中在衬底中优选形成多个空腔，优选为半导体。这些空腔中的每一个形成一个室，其中提供质谱仪的不同组分。在每个空腔之间形成多个孔，在每个室之间形成互连通道。介质层设置在空腔内，用作基板和电极之间的隔板，以便稍后将其沉积在空腔中。其中一个空腔设有电离器，离子检测器设置在另一个空腔中。形成的基板设置在电路板中，该电路板包含用于质谱仪的接口和控制电子器件。优选地，基板形成为两半，并且所述室以相应的布置形成在每个基板半部中。然后在其中提供部件之后将基板半部结合在一起。

6. 发明申请

US20210066571A1 SUPERCONDUCTOR THERMAL FILTER 有权
公开(公告)号：US20210066571A1
公开(公告)日：2021-03-04
申请号：US16554155
申请日：2019-08-28
申请人： Aaron A. Hathaway , Robert M. Young , John X. Przybysz , Greg Boyd , Zachary Keane
发明人： Aaron A. Hathaway , Robert M. Young , John X. Przybysz , Greg Boyd , Zachary Keane
IPC分类号： H01L39/22 , H01L39/12 , H01L39/24 , F25B21/02
摘要： A superconductor thermal filter is disclosed that includes a normal metal layer having a first side, an insulating layer overlying the first side of the normal metal layer, and a multilayer superconductor structure having a first side overlying a side of the insulting layer opposite the side that overlies the normal metal layer. The multilayer superconductor structure is comprised of a plurality of superconductor layers with each superconductor layer having a smaller superconducting energy band gap than the preceding superconductor as the superconductor layers extend away from the normal metal layer. The thermal filter further includes a normal metal layer quasiparticle trap having a first side and a second side with the first side being disposed on a second side of the multilayer superconductor. A bias voltage is applied between the normal metal layer and the normal metal layer quasiparticle trap to remove hot electrons from the normal metal layer.

7. 发明授权

US5466932A Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases 失效
标题翻译：微型压电隔膜泵用于低压泵送气体
公开(公告)号：US5466932A
公开(公告)日：1995-11-14
申请号：US320614
申请日：1994-10-07
申请人： Robert M. Young , Carl B. Freidhoff , Dennis L. Polla , Peter J. Schiller
发明人： Robert M. Young , Carl B. Freidhoff , Dennis L. Polla , Peter J. Schiller
IPC分类号： G01N27/62 , F04B43/02 , F04B43/04 , H01J49/24 , H01J49/28 , F04B17/00
CPC分类号： H01J49/288 , F04B43/046 , H01J49/0018
摘要： A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one piezoelectrically-actuated diaphragm. Upon piezoelectrical actuation, the diaphragm accomplishes a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a pair of electrodes sandwiching a piezoelectric layer.
摘要翻译：提供了一种用于固体质谱仪分析样品气体的泵。该光谱仪由具有入口的空腔的半导体衬底，与入口相邻的气体离子化部分，与气体离子化部分相邻的质量过滤部分和与质量过滤部分相邻的检测器部分形成。泵连接到所述腔的每个部分，并抽空空腔并将样品气体吸入腔中。泵包括至少一个压电致动隔膜。在压电致动时，隔膜实现抽吸行程，抽吸空腔并将样品气体吸入空腔。优选地，隔膜由夹着压电层的一对电极形成。

8. 发明授权

US5386115A Solid state micro-machined mass spectrograph universal gas detection sensor 失效
标题翻译：固态微加工质谱仪通用气体检测传感器
公开(公告)号：US5386115A
公开(公告)日：1995-01-31
申请号：US124873
申请日：1993-09-22
申请人： Carl B. Freidhoff , Robert M. Young , Saptharishi Sriram
发明人： Carl B. Freidhoff , Robert M. Young , Saptharishi Sriram
IPC分类号： H01J49/28 , D01D59/44 , H01J49/00
CPC分类号： H01J49/288 , H01J49/0018
摘要： A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.
摘要翻译：固态质谱仪包括全部形成在半导体衬底的空腔内的入口，气体离子发生器，质量过滤器和检测器阵列。气体离子发生器可以是具有离子光学器件的固态电子发射器，该离子光学器件由形成在空腔形成室中的多孔分隔壁上的电极提供，空腔通过差分泵送而被排空。质量过滤器优选为具有由基板外部的永磁体提供的磁场或在腔壁上的磁性膜提供的维恩滤波器。维恩滤波器的电场由形成在空腔的壁上的电极提供。检测器阵列是在质量过滤器的色散平面中定向的线性阵列，并且包括在用作法拉第笼的腔的端部处的会聚电极，其将电荷传递到信号发生器，例如形成在衬底中的电荷耦合器件，但是从腔。

9. 发明授权

US11189773B2 Superconductor thermal filter 有权
公开(公告)号：US11189773B2
公开(公告)日：2021-11-30
申请号：US16554155
申请日：2019-08-28
申请人： Aaron A. Hathaway , Robert M. Young , John X. Przybysz , Greg Boyd , Zachary Keane
发明人： Aaron A. Hathaway , Robert M. Young , John X. Przybysz , Greg Boyd , Zachary Keane
IPC分类号： H01L39/22 , F25B21/02 , H01L39/12 , H01L39/24
摘要： A superconductor thermal filter is disclosed that includes a normal metal layer having a first side, an insulating layer overlying the first side of the normal metal layer, and a multilayer superconductor structure having a first side overlying a side of the insulating layer opposite the side that overlies the normal metal layer. The multilayer superconductor structure is comprised of a plurality of superconductor layers with each superconductor layer having a smaller superconducting energy band gap than the preceding superconductor as the superconductor layers extend away from the normal metal layer. The thermal filter further includes a normal metal layer quasiparticle trap having a first side and a second side with the first side being disposed on a second side of the multilayer superconductor. A bias voltage is applied between the normal metal layer and the normal metal layer quasiparticle trap to remove hot electrons from the normal metal layer.

10. 发明授权

US5871336A Thermal transpiration driven vacuum pump 失效
标题翻译：热蒸腾驱动真空泵
公开(公告)号：US5871336A
公开(公告)日：1999-02-16
申请号：US685887
申请日：1996-07-25
申请人： Robert M. Young
发明人： Robert M. Young
IPC分类号： F04B19/00 , F04B37/06 , F04B19/24 , F04B3/00
CPC分类号： F04B19/006 , F04B37/06
摘要： A micro-machined vacuum pump is provided which may be utilized with microsensors. The pump in accordance with the present invention is preferably fabricated within a semiconductor substrate and utilizes thermal transpiration to provide compression. The pump has a plurality of flow chambers and a plurality of flow tubes to interconnect the flow chambers. The pump additionally includes means for creating a temperature differential between a first end and a second end of each flow tube to draw the gas therethrough. Drawing the gas through the flow tube increases the pressure within an adjacent flow chamber and induces a pumping action.
摘要翻译：提供微加工的真空泵，其可以与微传感器一起使用。根据本发明的泵优选地在半导体衬底内制造并利用热蒸腾来提供压缩。泵具有多个流动室和多个流动管以互连流动室。泵还包括用于在每个流管的第一端和第二端之间产生温度差以将气体抽吸通过其中的装置。通过流管抽取气体增加相邻流动室内的压力并引起泵送作用。

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