会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Method of etching a semiconductor substrate
    • 蚀刻半导体衬底的方法
    • US5851928A
    • 1998-12-22
    • US562865
    • 1995-11-27
    • Jerry D. CripeJerry L. WhiteCarl E. D'Acosta
    • Jerry D. CripeJerry L. WhiteCarl E. D'Acosta
    • H01L21/301H01L21/306H01L21/308H01L21/302
    • H01L21/30608H01L21/3081
    • A method of etching a semiconductor substrate (11) includes thinning (102) the semiconductor substrate (11), providing (103) a support layer (30) for the semiconductor substrate (11), providing (104) an etch mask (28) over the semiconductor substrate (11), and etching (105) the semiconductor substrate (11) using an etchant mixture of hydrofluoric acid, nitric acid, phosphoric acid, sulfuric acid, and a wetting agent at a temperature below ambient. The method is capable of using one etch step (105) and one etch mask (28) to form a plurality of trenches (12, 13) having the same width (15, 17) but different depths (16, 18) and different orientations. The method can be used to singulate different sizes and configurations of semiconductor dice from the semiconductor substrate (11).
    • 蚀刻半导体衬底(11)的方法包括使半导体衬底(11)变薄(102),提供(103)用于半导体衬底(11)的支撑层(30),提供(104)蚀刻掩模(28) 并且在低于环境温度的温度下使用氢氟酸,硝酸,磷酸,硫酸和润湿剂的蚀刻剂混合物蚀刻(105)半导体衬底(105)。 该方法能够使用一个蚀刻步骤(105)和一个蚀刻掩模(28)形成具有相同宽度(15,17)但不同深度(16,18)和不同取向的多个沟槽(12,13) 。 该方法可用于从半导体衬底(11)中分离出不同尺寸和结构的半导体晶片。
    • 2. 发明授权
    • Method and apparatus for performing failure analysis with fluorescence inks
    • 用荧光油墨进行故障分析的方法和装置
    • US07444012B2
    • 2008-10-28
    • US10626781
    • 2003-07-24
    • Jerry L. WhiteRussell T. Lee
    • Jerry L. WhiteRussell T. Lee
    • G06K9/00
    • G01N21/91
    • A method for performing failure analysis on a semiconductor device under inspection includes preparing of a device sample using an encapsulation material containing a dye, the prepared device sample possibly including a failure area having wicked in encapsulation material containing the dye. The prepared device sample is then sectioned to facilitate viewing a cross section face of the device under inspection. Lastly, a dark field analysis on the prepared device sample is performed with the use of dark field illumination. Responsive to at least one failure area containing wicked in encapsulation material with dye occurring on the cross section face of the device under inspection, the failure area can be readily identified as well as a contrast and perspective of remaining portions of the cross section face being maintained.
    • 在检查的半导体器件上执行故障分析的方法包括使用包含染料的封装材料来制备器件样品,所制备的器件样品可能包括在包含染料的包封材料中具有恶性的破坏区域。 然后将准备好的装置样品切片以便于观察被检查装置的横截面。 最后,使用暗场照明进行对制备的器件样品的暗场分析。 响应于在被检测装置的截面上出现染料的包封材料中含有邪恶的至少一个故障区域,可以容易地识别故障区域以及保持截面的剩余部分的对比度和透视图 。