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    • 1. 发明授权
    • Method and apparatus for performing failure analysis with fluorescence inks
    • 用荧光油墨进行故障分析的方法和装置
    • US07444012B2
    • 2008-10-28
    • US10626781
    • 2003-07-24
    • Jerry L. WhiteRussell T. Lee
    • Jerry L. WhiteRussell T. Lee
    • G06K9/00
    • G01N21/91
    • A method for performing failure analysis on a semiconductor device under inspection includes preparing of a device sample using an encapsulation material containing a dye, the prepared device sample possibly including a failure area having wicked in encapsulation material containing the dye. The prepared device sample is then sectioned to facilitate viewing a cross section face of the device under inspection. Lastly, a dark field analysis on the prepared device sample is performed with the use of dark field illumination. Responsive to at least one failure area containing wicked in encapsulation material with dye occurring on the cross section face of the device under inspection, the failure area can be readily identified as well as a contrast and perspective of remaining portions of the cross section face being maintained.
    • 在检查的半导体器件上执行故障分析的方法包括使用包含染料的封装材料来制备器件样品,所制备的器件样品可能包括在包含染料的包封材料中具有恶性的破坏区域。 然后将准备好的装置样品切片以便于观察被检查装置的横截面。 最后,使用暗场照明进行对制备的器件样品的暗场分析。 响应于在被检测装置的截面上出现染料的包封材料中含有邪恶的至少一个故障区域,可以容易地识别故障区域以及保持截面的剩余部分的对比度和透视图 。