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    • 4. 发明授权
    • 나노와이어 소자 제조 방법
    • 纳米器件制造方法
    • KR101431818B1
    • 2014-08-19
    • KR1020130091107
    • 2013-07-31
    • 울산과학기술원 산학협력단
    • 최경진
    • B82B3/00B81B7/04
    • H01L29/0676B82Y10/00B82Y40/00H01L21/02381H01L21/02543H01L21/02546H01L21/02603H01L21/0262H01L21/02658H01L29/068H01L29/775
    • In the present invention, provided is a fabrication method of a nanowire device improving productivity by manufacturing nanowire uniformly with respect to the entire surface of a single substrate. To accomplish the objective, in the present invention, provided is a fabrication method of a nanowire device for forming nanowire on the entire surface of a substrate. The fabrication method includes a substrate preparing step of preparing a substrate for forming nanowires; a substrate surface treating step of immersing the prepared substrate in a polylysine solution for a certain period of time; a substrate coating step of coating As atoms uniformly on the entire surface of the substrate; and a nanowire forming step of forming InAsP nanowire arrangement on the coated substrate.
    • 在本发明中,提供了通过相对于单个基板的整个表面均匀地制造纳米线而提高生产率的纳米线装置的制造方法。 为了实现该目的,在本发明中,提供了在基板的整个表面上形成纳米线的纳米线装置的制造方法。 制造方法包括:准备形成纳米线的基板的基板准备工序; 将制备的基板浸渍在聚赖氨酸溶液中一定时间的基板表面处理步骤; 在基板的整个表面均匀地涂布As原子的基板涂布步骤; 以及在涂覆的基底上形成InAsP纳米线排列的纳米线形成步骤。
    • 9. 发明公开
    • 마이크로 가동 디바이스
    • 微动装置
    • KR1020080079196A
    • 2008-08-29
    • KR1020080015656
    • 2008-02-21
    • 후지쯔 가부시끼가이샤
    • 미샤오유시마노우찌다께아끼이마이마사히꼬우에다사또시
    • B81B7/00B81B7/04H01G5/16
    • H01G5/16H01G5/011H01G5/06H03J3/20
    • A micro movable device is provided to realize good packaging by using insulation liquid of low viscosity or insulation gas of low viscosity as filler. A micro movable device(X1) includes a driving unit(10), a frame(20), and a connecting unit. The driving unit includes a main body, a first capacitor patterned electrode and a first driving patterned electrode. The first capacitor patterned electrode has a plurality of electrode teeth. The electrode teeth are elongated from the main body. The first driving patterned electrode also has electrode teeth which are elongated from the main body. The frame a second capacitor patterned electrode and a second driving patterned electrode. The capacitor patterned electrode and the second driving patterned electrode have electrode teeth which are elongated toward the first capacitor patterned electrode and the first driving patterned electrode respectively. The connecting unit connects the driving unit and the frame.
    • 提供微型移动装置,通过使用低粘度的绝缘液体或低粘度绝缘气体作为填料来实现良好的包装。 微型移动装置(X1)包括驱动单元(10),框架(20)和连接单元。 驱动单元包括主体,第一电容器图案化电极和第一驱动图案化电极。 第一电容器图案化电极具有多个电极齿。 电极齿从主体伸长。 第一驱动图案电极还具有从主体伸长的电极齿。 框架是第二电容器图案化电极和第二驱动图案化电极。 电容器图案化电极和第二驱动图案化电极具有分别朝向第一电容器图案化电极和第一驱动图案化电极延伸的电极齿。 连接单元连接驱动单元和框架。