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    • 1. 发明公开
    • 전자 빔 개구 요소
    • 电子束孔径元件
    • KR1020010012601A
    • 2001-02-15
    • KR1019997010560
    • 1998-05-14
    • 라이카 마이크로시스템즈 리소그라피 리미티드
    • 장타오
    • H01J29/84
    • H01J37/09H01J2237/3175
    • An electron beam aperture element (10) comprises a body (11) provided with a passage (12) for an electron beam (E) and with a blocking surface (15) for blocking travel of part or all of the beam otherwise than through the passage. The blocking surface (15) is angled to cause departing electrons derived from the blocked beam or part thereof to be directed away from the axis (13) of the passage and, in particular, into an electron trap cavity (21) bounded by the surface (15) and a wall of a screening member (17). The wall returns electrons to the blocking surface (15) for redirection back into the cavity (21), thus preventing escape of scattered electrons or delaying their escape until sufficient absorption has taken place to render them largely harmless to the interior environment of an electron beam column equipped with the element.
    • 电子束孔元件(10)包括:主体(11),其设置有用于电子束(E)的通道(12),并具有阻挡表面(15),用于阻止部分或全部光束的行进, 通道。 阻挡表面(15)成角度以使得源自阻挡梁或其一部分的离开的电子被引导离开通道的轴线(13),并且特别地引导到由表面限定的电子捕获腔(21) (15)和屏蔽构件(17)的壁。 壁将电子返回到阻挡表面(15)以重定向回到空腔(21)中,从而防止散射电子的逸出或延迟它们的逸出,直到发生足够的吸收,使得它们对电子束的内部环境无害化 列配有元素。