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    • 5. 发明公开
    • 불소가스 방전 레이저용 애노드
    • 氟化物放射性激光阳极
    • KR1020060054355A
    • 2006-05-22
    • KR1020067001802
    • 2004-07-16
    • 사이머 엘엘씨
    • 다이어티모씨에스.모톤리차드질레스피에월터디.스타이거토마스디.
    • H01S3/22
    • H01S3/038H01S3/036H01S3/0381H01S3/0382H01S3/0385H01S3/0388H01S3/097H01S3/09702H01S3/09713H01S3/225H01S3/2251H01S3/2256
    • Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight portions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode. Another embodiment may comprise an anode and an up-stream fairing each composed of electrically conductive material, at least the discharge receiving portion of which is coated with a thin dielectric layer, e.g. is anodized. Another embodiment may comprise at least a portion of the discharge region of a gas discharge electrode is covered with a preformed reef having generally uniform pore size and distribution. A method is disclosed for reef making which may comprise forming the reef of a vacuum infiltrated porous anodized material. Another disclosed method may comprise forming a first anodization layer on the surface of the electrode at least in the discharge region; removing the anodization layer; forming a second anodization layer on the surface of the electrode at least in the discharge region; which may be followed by widening the pores in the second anodization layer, thinning the second anodization layer; and filling the pores with a conductive material. A further method may comprise forming a reef template on at least the discharge region of the elongated gas discharge region; selectively growing a porous layer of insulating material as dictated by the reef template, and may further comprise a positive template or a negative template.
    • 公开了一种用于氟气体放电激光器的电极,其可以包括跨越所述一对侧壁和所述一对端壁之间的中心线轴线的冠,包括形成电极的放电区域的至少一部分的第一材料; 横截面的冠部具有以预旋转方向旋转的倾斜椭圆的上半部的形状,使得与椭圆形的短中心线轴线的切线与水平方向成一角度。 另一实施例可以包括具有顶部部分和分别与顶部部分相交的第一和第二侧壁部分的阳极刀片; 阳极叶片形成为顶部部分的横截面形状为曲线,并且沿着曲率半径与第一和第二侧壁部分的每一个的大体直线部分相交,并且顶部部分从远离不对称排放侧的角度倾斜 阳极。 另一个实施例可以包括每个由导电材料构成的阳极和上游整流罩,至少其放电接收部分涂覆有薄介电层,例如电介质层。 被阳极氧化。 另一个实施例可以包括气体放电电极的放电区域的至少一部分被预先形成的具有大致均匀的孔径和分布的珊瑚礁覆盖。 公开了一种用于珊瑚礁制造的方法,其可以包括形成真空渗透的多孔阳极氧化材料的珊瑚礁。 另一公开的方法可以包括至少在放电区域中在电极的表面上形成第一阳极氧化层; 去除阳极氧化层; 至少在所述放电区域中在所述电极的表面上形成第二阳极氧化层; 其后可以扩大第二阳极氧化层中的孔,使第二阳极氧化层变薄; 并用导电材料填充孔。 另外的方法可以包括在细长气体放电区域的至少放电区域上形成珊瑚礁模板; 根据珊瑚礁模板选择性地生长绝缘材料的多孔层,并且还可以包括正模板或负模板。
    • 8. 发明公开
    • 할로겐 가스 방전 레이저 전극
    • 卤化物放电激光电极
    • KR1020060089717A
    • 2006-08-09
    • KR1020067001713
    • 2004-07-27
    • 사이머 엘엘씨
    • 스타이거토마스디.우자도우스키리차드씨.다이어티모씨에스.두페이토마스피.질레스피에월터디.무스만브라이언지.모톤리차드지.스트라테브라이언디.
    • H01S3/041
    • H01S3/225H01S3/0381H01S3/0385H01S3/0388H01S3/0971H01S3/09713
    • A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.
    • 公开了一种用于操作气体放电激光器的方法和装置,其可以包括包含激光气体的激光室,激光气体包括卤素,限定阴极和阳极的两个细长电极元件,阴极和阳极中的每一个具有细长的 放电接收区域具有限定激光气体中的电极元件之间的放电宽度的放电接收区域宽度,放电接收区域限定两个纵向边缘,阳极包括:第一细长阳极部分,包括限定 第一阳极材料侵蚀速率,完全位于阳极的放电接收区域内;一对第二细长阳极部分,包括限定第二阳极材料侵蚀速率的第二阳极材料,第二阳极材料分别位于第一阳极部分的每一侧, 最少部分地在放电接收区域内; 与所述第一细长阳极部分成一体的细长电极中心基部; 并且其中相应的一对第二细长阳极部分中的每一个机械地结合到中心基部。 电极元件可以包括阴极。 第一和第二材料可以是不同的材料,例如在卤素气体中具有不同侵蚀速率的不同的黄铜合金。 第一细长阴极部分可以包括第一阴极材料,其全部位于放电接收区域内,包括与细长侧壁相交的椭圆的第一部分,其中与壁的部分相对的底壁; 以及一对第二细长阴极侧部分,其包括第二阴极材料,每个相应的第二阴极部分和形成第一阴极部分的放电接收区域的椭圆形部分的交点形成第一部分的相应的椭圆形延伸部分。 构件可以机械地结合到中心基部。 一些可以扩散结合到中心基部和/或彼此。 电极组件可以在电极的相应端部处具有连接的放电接收区域延伸部,并且电极部分可以形成有或结合到中心基部并且可以具有倾斜的侧壁。
    • 9. 发明公开
    • 불소가스 방전 레이저용 캐소드
    • 氟气排放激光灯
    • KR1020060054359A
    • 2006-05-22
    • KR1020067001840
    • 2004-07-21
    • 사이머 엘엘씨
    • 스타이거토마스디.브라운조슈아씨.두페이토마스피.질레스피에월터디.모톤리차드지.다이어티모씨에스.
    • H01S3/22
    • H01S3/038H01S3/036H01S3/0381H01S3/0382H01S3/0385H01S3/0388H01S3/097H01S3/09702H01S3/0971H01S3/225H01S3/2251H01S3/2256H01S3/2258
    • A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint for the cathode comprising copper and a lower portion comprising a copper alloy, with the facing portion of the electrode if formed in a arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper including at least the arcuate portion, the electrode may comprise a bonded element machined from two pieces of material the first made of copper and the second made of a copper alloy bonded together before machining. The electrode may also comprise a first and a second elongated lopsided V-shaped groove formed along substantially all of the elongated electrode body forming a discharge receiving ridge between the first and second lopsided V-shaped grooves, with a differentially faster eroding material filling the first and second lopsided V-shaped grooves. also disclosed is an electrode system in which the one electrode, e.g., the cathode bows during operation and may comprise at least one of a first and second elongated gas discharge electrode being machined to form a crown to receive the gas discharge that compensates for the bowing of at least one of the gas discharge electrodes during operation of the fluorine gas discharge laser.
    • 公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极,其可包括铜和铜合金阴极体,该铜和铜合金阴极体具有包含用于包含铜的阴极的放电足迹的上部弯曲区域,以及包含铜 合金,如果电极的对置部分形成为延伸到弓形部分两侧的直线部分的弓形形状,则直线部分终止于垂直的直边,铜线之间的边界至少包括弧形部分 电极可以包括由铜制成的两片材料和由加工前结合在一起的铜合金制成的第二个材料加工的接合元件。 电极还可以包括沿着基本上所有的细长电极体形成的第一和第二细长的非平面V形槽,该细长电极体在第一和第二偏斜V形槽之间形成放电接收脊,其中填充有第一 和第二个不对称的V形槽。 还公开了一种电极系统,其中一个电极例如阴极在操作期间弯曲并且可以包括被加工成形成冠部的第一和第二细长气体放电电极中的至少一个,以接收补偿弯曲的气体放电 的至少一个气体放电电极在氟气放电激光器的操作期间。