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1. 发明公开

KR1020000002653A 분배전극이 구비된 전계방출표시소자 및 그 제조방법 无效
标题翻译：具有合金电极的场发射显示装置及其制造方法
公开(公告)号：KR1020000002653A
公开(公告)日：2000-01-15
申请号：KR1019980023504
申请日：1998-06-22
申请人： 오리온전기 주식회사
发明人： 권기진
IPC分类号： H05B33/00
CPC分类号： H01J1/46 , H01J1/72 , H01J9/02
摘要： PURPOSE: A manufacturing method of a field emission display device is provided to decrease the cost of a driving circuit, etc. by reducing the number of lead lines for connecting negative electrode outside and increasing a fixing space. CONSTITUTION: The manufacturing method of a field emission display device comprises the processes of: forming a gate insulating film(13), a gate metal(15) and an allotted insulating film(17) on the upper part of a cathode metal(11); forming a groove by partly etching the allotted insulating film; forming metal for allotted electrode use on the upper entire surface; forming the allotted electrode by anisotropically etching the metal for allotted electrode use; etching the allotted insulating film of the lower allotted electrode; and forming a gate hole bi etching the gate metal and the gate insulating film, and forming an emitter tip inside.
摘要翻译：目的：提供一种场致发射显示装置的制造方法，通过减少用于将负极连接到外部的引出线的数量并增加固定空间来降低驱动电路等的成本。构成：场发射显示装置的制造方法包括以下处理：在阴极金属（11）的上部形成栅绝缘膜（13），栅极金属（15）和分配绝缘膜（17） ; 通过部分蚀刻分配的绝缘膜形成凹槽; 在整个表面上形成用于分配电极的金属; 通过各向异性蚀刻用于分配电极的金属来形成分配的电极; 蚀刻下分配电极的分配绝缘膜; 以及形成栅极双蚀刻栅极金属和栅极绝缘膜，并在其内部形成发射极尖端。

2. 发明公开

KR1020130141369A 정전렌즈 및 그 제조방법 无效
标题翻译：静电镜片及其制造方法
公开(公告)号：KR1020130141369A
公开(公告)日：2013-12-26
申请号：KR1020130064393
申请日：2013-06-05
申请人： 캐논 가부시끼가이샤
发明人： 요시타케타다유키 , 안도요이치
IPC分类号： H01J37/12 , H01J37/317
CPC分类号： H01J29/62 , B82Y10/00 , B82Y40/00 , H01J1/46 , H01J3/027 , H01J9/14 , H01J9/18 , H01J37/12 , H01J37/3177 , H01J2237/1205 , Y10T29/49082
摘要： An electrostatic lens includes a first electrode and a second electrode separated from each other with a gap. The first electrode and the second electrode have each through hole through which charged particle beams pass. At least the first electrode or the second electrode includes at least two regions. The through hole of the electrode having at least two regions is arranged in at least one region among the regions. The regions are electrically connected via a resistor.
摘要翻译：静电透镜包括以间隙彼此分离的第一电极和第二电极。第一电极和第二电极具有带电粒子束通过的每个通孔。至少第一电极或第二电极至少包括两个区域。具有至少两个区域的电极的通孔布置在区域中的至少一个区域中。这些区域通过电阻器电连接。

3. 发明公开

KR1020130129109A 정전렌즈의 전극 및 그 제조 방법 无效
标题翻译：静电镜片的电极及其制造方法
公开(公告)号：KR1020130129109A
公开(公告)日：2013-11-27
申请号：KR1020130052306
申请日：2013-05-09
申请人： 캐논 가부시끼가이샤
发明人： 야마다슈지
IPC分类号： H01L21/027 , G03F7/20
CPC分类号： H01J1/02 , B82Y10/00 , B82Y40/00 , H01J1/46 , H01J3/027 , H01J3/18 , H01J9/02 , H01J9/14 , H01J37/12 , H01J37/317 , H01J37/3177 , H01J2237/032 , H01J2237/1205 , H01L21/0274
摘要： An electrode for an electrostatic lens comprises a first substrate having a first through hole, a second substrate having a second through hole; the thickness of the first substrate is thinner than the thickness of the second substrate; the diameter of the first through hole is smaller than the diameter of the second through hole; the resistivity of the second substrate is lower than the resistivity of the first substrate, and the first substrate and the second substrate are arranged and overlapped with each other with regard to the first through hole and the second through hole. A notching generated around the through hole is reduced in a dry etching to form a fine though hole.
摘要翻译：用于静电透镜的电极包括具有第一通孔的第一基板，具有第二通孔的第二基板; 第一基板的厚度比第二基板的厚度薄; 第一通孔的直径小于第二通孔的直径; 第二基板的电阻率低于第一基板的电阻率，并且第一基板和第二基板相对于第一通孔和第二通孔彼此布置和重叠。在干蚀刻中减少在通孔周围产生的切口，以形成细孔。

4. 发明公开

KR1020170048480A 이온 필터 및 그 제조 방법 审中-实审
标题翻译：离子过滤器及其制造方法
公开(公告)号：KR1020170048480A
公开(公告)日：2017-05-08
申请号：KR1020177008460
申请日：2015-09-10
申请人： 가부시키가이샤후지쿠라
发明人： 아라이다이스케
IPC分类号： H01J47/06 , H01J1/46 , H01J9/14 , G01T1/18
CPC分类号： H01J1/46 , G01T1/18 , H01J9/14 , H01J47/02 , H01J47/06
摘要： 절연성기재(11)와, 절연성기재(11)의한쪽주면에형성된제1 도전층(12)과, 절연성기재(11)의다른쪽 주면에형성된제2 도전층(13)과, 절연성기재(11)의두께방향을따라형성된복수의관통구멍(30)을가지며, 제1 도전층(12)의제1 두께(th1)와, 제2 도전층(13)의제2 두께(th2)를다르게구성한다.
摘要翻译：形成在绝缘基板11的一个主表面上的第一导电层12和形成在绝缘基板11的另一个主表面上的第二导电层13; 并且，第一导电层12的厚度和第二导电层13的厚度被设定为彼此不同。

5. 发明公开

KR1020090120777A 전자빔 집속 전극 및 이를 이용한 전자총 有权
标题翻译：光束形成电极和电子枪使用它
公开(公告)号：KR1020090120777A
公开(公告)日：2009-11-25
申请号：KR1020080046748
申请日：2008-05-20
申请人： 삼성전자주식회사 , 재단법인서울대학교산학협력재단
发明人： 백찬욱 , 아누락스리바스타바 , 김종민 , 김선일 , 손영목 , 박건식 , 소진규
IPC分类号： H01J29/51 , H01J29/48 , H01J29/02
CPC分类号： G21K1/087 , H01J1/13 , H01J1/30 , H01J1/46
摘要： PURPOSE: An electron beam focusing electrode and an electron gun using the same are provided to focus the electron to an anode direction separated from a cathode by passing the electron through the penetration hole of the electron beam focusing electrode. CONSTITUTION: A cross section of a second surface(32) of a penetration hole(33) emitting the electron is larger than the cross section of a first surface(31) of the penetration hole. The cross section of the penetration hole is inclined to the progressing direction of the electron beam passing through the inside of the penetration hole. A protrusion(34) is formed in at least one side of the penetration hole. The orbit of the electrons passing through the inside of the penetration hole is controlled by the protrusion. The distortion of the electric field is decreased in an edge part of the electron beam. The uniformity of the electron beam from the electron gun is improved.
摘要翻译：目的：提供电子束聚焦电极和使用该电子束聚焦电极的电子枪，以通过使电子通过电子束聚焦电极的穿透孔将电子聚焦到与阴极分离的阳极方向上。构成：发射电子的穿透孔（33）的第二表面（32）的横截面大于穿透孔的第一表面（31）的横截面。穿透孔的横截面向穿过穿透孔内部的电子束的前进方向倾斜。突起（34）形成在贯通孔的至少一侧。穿过穿透孔内部的电子的轨道由突起控制。在电子束的边缘部分，电场的变形减小。来自电子枪的电子束的均匀性得到改善。

6. 发明公开

KR1020090033579A 전자빔 방출장치 失效
标题翻译：电子束源
公开(公告)号：KR1020090033579A
公开(公告)日：2009-04-06
申请号：KR1020070098661
申请日：2007-10-01
申请人： 박흥균
发明人： 박흥균
IPC分类号： H01J1/15
CPC分类号： H01J1/15 , C01B32/20 , H01J1/20 , H01J1/22 , H01J1/46 , H01J1/88 , H01J9/04 , H01J2209/383 , H01J2209/3896
摘要： An electron beam emission apparatus is provided to emit electrons on an object in an exact penetration depth by adjusting the emission speed of electrons through a grid electrode. A hollow cathode micro jet array(20), an anode electrode(25) and a grid electrode(30) are sequentially installed inside a chamber(10). A wafer(50) is mounted on a lower-side wafer chuck(35). A plurality of gas holes(11) are formed at the upper part of the chamber in order to supply the process gas into the chamber. A ventilation hole(13) is formed at a lower part of the chamber in order to exhaust the gas outside the chamber. A vacuum pump(75) for controlling the inner pressure of the chamber is installed at one side of the ventilation hole. A valve(70) is installed between the vacuum pump and ventilation hole.
摘要翻译：电子束发射装置被设置为通过调整电子通过栅电极的发射速度，在精确穿透深度的物体上发射电子。空腔阴极微型喷射阵列（20），阳极电极（25）和栅格电极（30）依次安装在室（10）的内部。晶片（50）安装在下侧晶片卡盘（35）上。在室的上部形成多个气孔（11），以便将处理气体供应到室中。在室的下部形成通气孔（13），以便将气体排出室外。用于控制室内压的真空泵（75）安装在通气孔的一侧。阀（70）安装在真空泵和通风孔之间。

7. 发明公开

KR1020000002658A 전계방출표시소자의 금속팁 제조방법 无效
标题翻译：生产现场排放显示的金属提示
公开(公告)号：KR1020000002658A
公开(公告)日：2000-01-15
申请号：KR1019980023509
申请日：1998-06-22
申请人： 오리온전기 주식회사
发明人： 남명우
IPC分类号： H05B33/00
CPC分类号： H01J9/025 , H01J1/3042 , H01J1/46 , H01J2201/30449
摘要： PURPOSE: A method is provided to enhance the quality and the reliability of the device by forming a pointed metal tip without a damage. CONSTITUTION: A method of producing a metal tip of a field emission display comprises the steps of: forming an emitter metal(13) onto a substrate(11) and forming a first photosensitive film(15) pattern onto the emitter metal; and forming oxidized film(19) after forming a groove(17) by etching the emitter metal using the first photosensitive film pattern as a mask and then removing the first photosensitive film pattern.
摘要翻译：目的：提供一种通过形成尖头金属尖端而不损坏的方式来提高设备的质量和可靠性。构成：制造场致发射显示器的金属尖端的方法包括以下步骤：在衬底（11）上形成发射极金属（13）并在发射极金属上形成第一感光膜（15）图案; 并且通过使用第一感光膜图案作为掩模蚀刻发射极金属，然后除去第一感光膜图案，在形成凹槽（17）之后形成氧化膜（19）。

8. 实用新型

KR2019980015359U 형광표시관용 그리드 失效
标题翻译：荧光显示纬度网格
公开(公告)号：KR2019980015359U
公开(公告)日：1998-06-25
申请号：KR2019960028583
申请日：1996-09-09
申请人： 삼성에스디아이 주식회사
发明人： 이용규
IPC分类号： H01J1/62 , H01J29/18 , H01J31/15
CPC分类号： H01J1/46 , H01J29/18 , H01J31/15
摘要： 금형의공용화를위해, 형광표시관용그리드의형상을변화시키고자한다. 형광표시관의기종이바뀌는경우, 그리드를제작하는금형이설계가다시이루어지고있다. 이것은그리드의형상을변화시킴으로서금형의공용화를실현할수 있는것으로서, 그러한기술적수단은, 단변측리본의폭을증가시키고, 이리본부에금형가이드핀이삽입될수 있는홀과, 전후마크를표시하며, 장변측리본을제거하는것으로가능하게된다.
摘要翻译：对于共享使用模具，并打算改变真空荧光显示器公差网格的形状。如果这种类型的荧光显示被改变，以产生电网的模具被设计再次制成。此为能够通过改变栅格的形状，这样的技术手段，短边增加带的宽度和，来中央模具导销，实现共享使用的模具中示出的孔，在此之前和可插入长侧的标记后侧通过去除带成为可能。

9. 发明授权

KR101809232B1 이온 필터 및 그 제조 방법 有权
公开(公告)号：KR101809232B1
公开(公告)日：2018-01-18
申请号：KR1020177008460
申请日：2015-09-10
申请人： 가부시키가이샤후지쿠라
发明人： 아라이다이스케
IPC分类号： H01J47/06 , H01J1/46 , H01J9/14 , G01T1/18
CPC分类号： H01J1/46 , G01T1/18 , H01J9/14 , H01J47/02 , H01J47/06
摘要： 절연성기재(11)와, 절연성기재(11)의한쪽주면에형성된제1 도전층(12)과, 절연성기재(11)의다른쪽 주면에형성된제2 도전층(13)과, 절연성기재(11)의두께방향을따라형성된복수의관통구멍(30)을가지며, 제1 도전층(12)의제1 두께(th1)와, 제2 도전층(13)의제2 두께(th2)를다르게구성한다.

10. 发明授权

KR101420244B1 전자빔 집속 전극 및 이를 이용한 전자총 有权
标题翻译：光束形成电极和使用其的电子枪
公开(公告)号：KR101420244B1
公开(公告)日：2014-07-21
申请号：KR1020080046748
申请日：2008-05-20
申请人： 삼성전자주식회사 , 재단법인서울대학교산학협력재단
发明人： 백찬욱 , 아누락스리바스타바 , 김종민 , 김선일 , 손영목 , 박건식 , 소진규
IPC分类号： H01J29/51 , H01J29/48 , H01J29/02
CPC分类号： G21K1/087 , H01J1/13 , H01J1/30 , H01J1/46
摘要： 다각형 관통홀을 포함하는 플레이트; 및 상기 관통홀의 적어도 한 변에 형성된 돌출부를 포함하는 전자빔 집속 전극과 상기 전자빔 집속 전극을 이용한 전자총이 개시된다. 본 발명의 일 실시예에 따른 전자빔 집속 전극을 이용하면, 사각형 형상의 단면을 갖는 전자빔의 퍼짐 현상을 감소시킬 수 있으며, 전자총의 출력을 증가시키는 동시에 전자빔을 집속하는 것이 용이한 이점이 있다.
전자빔 집속 전극, BFE, 전자총, 사각형

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