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    • 1. 发明公开
    • 시료의 성능평가장치가 구비된 플라즈마중합 연속처리장치
    • 连续等离子体聚合装置,用于评估样品性能
    • KR1020010019016A
    • 2001-03-15
    • KR1019990035215
    • 1999-08-24
    • 주식회사 엘지이아이
    • 이현욱강성희
    • C23C16/54
    • H01J37/32972B05D1/62G01N21/75G01N2021/751G01N2021/8433H01J37/3277H01J2237/3382
    • PURPOSE: A continuous plasma polymerization device equipped with an apparatus for evaluating performance of a sample is provided to easily distinguish defects of sample and take prompt counter measures after polymerization by continuously carrying out characteristics evaluation of a sample, particularly not giving damage to the sample during characteristics evaluation. CONSTITUTION: A continuous plasma polymerization device consists an unwinding roll, a sample (2) of which surface is treated by being transferred from the unwinding roll, a deposition chamber (1) in which electrodes oppositely directed to upper and lower sides of the sample (2) are installed, a UV spectrometer which is installed for evaluating performance of a surface treated sample and includes a noncontact probe and a sensor, a winding roll winding the surface treated sample, a vacuum pump for controlling pressure of the deposition chamber (1), and a reactive gas controller infusing a reactive gas and a nonreactive gas around a sample of which surface is treated in the deposition chamber (1).
    • 目的:提供一种配备有用于评价样品性能的装置的连续等离子体聚合装置,以容易地区分样品的缺陷,并通过连续进行样品的特性评估,特别是不对样品造成损害,在聚合后立即采取对策 特征评估。 构成:连续的等离子体聚合装置包括退卷辊,其表面通过从退绕辊转移而被处理的样品(2),沉积室(1),其中电极相对地指向样品的上侧和下侧 2)被安装用于评估表面处理样品的性能并包括非接触探针和传感器的UV光谱仪,卷绕表面处理样品的卷绕辊,用于控制沉积室(1)的压力的真空泵, 以及反应性气体控制器,在沉积室(1)内处理表面的样品周围注入反应性气体和非反应性气体。
    • 5. 发明公开
    • 보호막 검출 방법
    • 保护膜检测方法
    • KR1020160110176A
    • 2016-09-21
    • KR1020160028150
    • 2016-03-09
    • 가부시기가이샤 디스코
    • 료센이치이토유사쿠엔도도모아키오우라유키노부오다나카겐타로
    • H01L21/66H01L21/268H01L21/56H01L21/683
    • G01N21/55G01N21/3563G01N21/8422G01N2021/8427G01N2021/8433H01L22/12
    • (과제) 보호막피복장치에의한수용성보호막의피복상황을양호한정밀도로확인할수 있는보호막검출방법을제공하는것. (해결수단) 보호막검출방법은, 피가공물에수용성보호막이피복되어있는지의여부를검출하는방법이다. 보호막검출방법은검출전의준비스텝 (ST1) 과검출스텝 (ST2) 을구비한다. 준비스텝 (ST1) 은, 레퍼런스의수용성보호막이피복된제 1 영역및 수용성보호막이피복되어있지않은제 2 영역에적외광을조사하여반사광을수광하고제 1 영역의반사강도와제 2 영역의반사강도를취득하는반사강도취득스텝 (ST12) 과, 임계값을파수가 3000 ㎝∼ 3600 ㎝에있어서의제 1 영역의반사강도와제 2 영역의반사강도로부터구하는임계값결정스텝 (ST13) 을갖는다. 검출스텝 (ST2) 은, 피가공물의표면에적외광을조사하고반사광을수광하여취득한반사강도를임계값과비교한다.
    • 本发明提供一种能够以良好的精度检查由保护膜涂布装置形成的水溶性保护膜的涂布状态的保护膜检测方法。 根据本发明,保护膜检测方法检测水溶性保护膜是否涂覆在待处理物品上,包括:检测前的准备步骤(ST1)和检测步骤(ST2)。 制备步骤(ST1)包括:反射强度获取步骤(ST12),其用红外光照射由水溶性保护膜涂覆的参考物的第一区域和未被水溶性保护膜涂覆的第二区域以接收 反射光,并获得第一和第二区域的反射强度; 以及阈值确定步骤(ST13),其从频率为3,000至3600cm -1的第一和第二区域的反射强度计算阈值。 检测步骤(ST12)用红外线照射待处理物品的表面,并接收反射光以将获得的反射强度与阈值进行比较。
    • 6. 发明公开
    • 접착제 검출 방법
    • 胶粘剂检测方法
    • KR1020100017800A
    • 2010-02-16
    • KR1020097026032
    • 2008-05-14
    • 헨켈 코포레이션
    • 로리아빈센트에이질렌제이슨맥킨리론
    • G01N21/64C09J9/00C09J7/02
    • G01N21/8422G01N2021/6439G01N2021/8427G01N2021/8433C09J7/00C09J9/00
    • Adhesive compositions useful for bonding fluorescent material-containing cellulosic substrates such as envelopes may be formulated using an adhesive polymer such as an emulsion of polyvinyl acetate in water and one or more compounds capable of reducing the degree of fluorescence exhibited by the substrate in areas of the substrate surface having the adhesive coated thereon. When irradiated by short wavelength light, the surface areas containing the adhesive coating appear darker than the surface areas that are free of adhesive, allowing quality control problems associated with application of the adhesive to be readily monitored and corrected. At the same time, however, the adhesive may be formulated such that the fluorescence-reducing compound does not alter the appearance of the adhesive coating when viewed under normal daylight conditions.
    • 用于粘合含荧光材料的纤维素基材如包络物的粘合剂组合物可以使用粘合剂聚合物如聚乙酸乙烯酯在水中的乳液和一种或多种能够降低基材在该区域中显示的荧光的程度的化合物来配制 基底表面,其上涂覆有粘合剂。 当用短波长的光照射时,含有粘合剂涂层的表面区域比不含粘合剂的表面区域显得更暗,从而允许容易地监测和校正粘合剂的施加相关的质量控制问题。 然而,同时,可以配制粘合剂,使得当在正常日光条件下观察时,荧光还原化合物不会改变粘合剂涂层的外观。
    • 7. 发明公开
    • 실리콘웨이퍼의 결함 검출 방법 및 이를 수행하기 위한장치
    • 检测硅基板缺陷的方法及其设备
    • KR1020080000303A
    • 2008-01-02
    • KR1020060058003
    • 2006-06-27
    • 삼성전자주식회사
    • 사공정정경호이병암안병설김종덕김경범
    • H01L21/66
    • G01N21/9503G01N21/8422G01N2021/8433
    • A method of detecting defects in a silicon substrate and an apparatus for performing the same are provided to identify grating defects of a silicon wafer by using a light emitting image of fluorescent materials. A silicon wafer(W) is loaded on a chuck(110) within a process chamber(100). An edge part of the silicon wafer is coated by using fluorescent materials having different coating characteristics at a defective grating part and a normal grating part of the silicon wafer. A light emitting image of a silicon wafer edge part is obtained by irradiating light onto the silicon wafer edge part coated with the fluorescent materials. A grating defect of the silicon wafer edge part is detected by identifying a coating state of the fluorescent materials of the light emitting image.
    • 提供了一种检测硅衬底中的缺陷的方法及其执行装置,以通过使用荧光材料的发光图像来识别硅晶片的光栅缺陷。 硅晶片(W)装载在处理室(100)内的卡盘(110)上。 通过使用在硅晶片的缺陷光栅部分和普通光栅部分处具有不同涂层特性的荧光材料来涂覆硅晶片的边缘部分。 通过将光照射到涂覆有荧光材料的硅晶片边缘部分上来获得硅晶片边缘部分的发光图像。 通过识别发光图像的荧光材料的涂布状态来检测硅晶片边缘部分的光栅缺陷。