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1. 发明授权

KR101709092B1 택배화물 고속 구분기 有权
标题翻译：送货高速轮转向器
公开(公告)号：KR101709092B1
公开(公告)日：2017-02-22
申请号：KR1020160095244
申请日：2016-07-27
申请人： 전원
发明人： 전원
IPC分类号： B65G47/64 , B65G47/53 , B65G13/06 , B65G13/10 , B65G13/07 , F16H7/02 , F16H7/12 , B65G39/02 , B65G39/09 , B07B13/16 , B07C5/36
CPC分类号： B65G13/10 , B65G47/54 , B65G47/648 , B65G2207/34 , F16H7/02 , F16H7/12 , F16H9/26 , B65G47/642 , B07B13/16 , B07C5/36 , B65G13/06 , B65G13/07 , B65G39/02 , B65G39/09 , B65G47/53
摘要： 본발명은택배화물고속구분기에관한것으로서, 보다상세하게는메인모터(11)가구비된하부동력부(10)와; 상기하부동력부(10)의동력을전달하는중앙동력전달부(20)와; 상기중앙동력전달부(20)의동력을절달받아택배화물(P)을이송시키는상부이송부(30)로이루어지고, 상기상부이송부(30)의롤러(31)가이송벨트(T)의텐션을유지토록다중으로결합된택배화물고속구분기에관한것이다.

2. 发明公开

KR1020140114530A 반도체 및 LED 세정용 세정 장치의 체인 구동 방식의 컨베이어 장치 审中-实审
标题翻译：用于清洁链条传动装置的半导体和LED清洁装置
公开(公告)号：KR1020140114530A
公开(公告)日：2014-09-29
申请号：KR1020130028535
申请日：2013-03-18
申请人： 주식회사 제이스텍
发明人： 최상규
IPC分类号： H01L21/677 , H01L21/304 , B65G49/07
CPC分类号： H01L21/67028 , B65G13/06 , H01L21/67706 , H01L21/67736
摘要： The present invention relates to a chain driven type conveyor device equipped at a cleaning apparatus for cleaning a semiconductor and an LED and, specifically, to a conveyor device having backing rollers backing the semiconductor and a backing roller driver driving the backing rollers to be rotated at the same speed as a feeding speed of a belt such that damage to the semiconductor is prevented while separation of the semiconductor from the belt is prevented when a high pressure cleaning process is performed for the semiconductor on a moving path of the semiconductor (or the LED) by a feeding belt. The conveyor device like this comprises the belt feeding the semiconductor or the LED; an injection nozzle arranged on the moving path of the belt for injecting high pressure cleaning water to the semiconductor or the LED; the backing rollers backing the semiconductor or the LED when the injection nozzle injects the high pressure cleaning water; and the backing roller driver rotating the backing rollers which touch and back the semiconductor or the LED according to the movement of the belt.
摘要翻译：本发明涉及一种链式驱动式输送装置，其装备在用于清洁半导体和LED的清洁装置上，具体而言，涉及具有背衬半导体的背衬辊的输送装置和驱动背衬辊以便旋转的背衬辊驱动装置与半导体的移动路径（或LED）的半导体执行高压清洗处理时，能够防止半导体与带的分离，从而防止半导体的损坏，从而防止带子的进给速度相同的速度。）。像这样的传送装置包括送入半导体或LED的带; 喷嘴，其设置在所述带的移动路径上，用于向所述半导体或所述LED注入高压清洗水; 当注射喷嘴喷射高压清洗水时，背衬辊衬着半导体或LED; 并且背衬辊驱动器根据带的移动来旋转接触并靠背半导体或LED的背衬辊。

3. 发明公开

KR1020140104085A 대면적 기판의 이송장치 审中-实审
标题翻译：大面积基片的传输装置
公开(公告)号：KR1020140104085A
公开(公告)日：2014-08-28
申请号：KR1020130017594
申请日：2013-02-19
申请人： 주식회사 케이씨
发明人： 이기우
IPC分类号： B65G49/06 , C03B35/16 , G02F1/13 , H01L21/677
CPC分类号： B65G49/061 , B65G13/06 , B65G49/063 , G02F1/1303 , H01L21/67706
摘要： The present invention relates to a transfer device for large area substrates, comprising lower rollers arranged in both ends of multiple transfer shafts arranged close to each other in the transfer direction of substrates; lower surface contact rings wound on the outer surface of the lower rollers arranged in the transfer direction of the substrates to transfer the substrates by being in surface contact with the bottom edge of the substrates while being rotated by the rotation of the transfer shafts; upper rollers separated from each other above the lower rollers; and upper surface contact rings wound on the outer surface of the upper rollers arranged in the transfer direction of the substrates to support the substrates while being in surface contact with the top edge of the substrates. In the present invention, each pair of the upper and lower rollers vertically positioned in a section where the substrates are powerfully transferred is arranged in the front and rear sides along the transfer direction of the substrates. A pair of the surface contract rings being in surface contact with the upper and lower part of the substrates transferred by winding the pair of the upper and lower rollers are arranged to prevent pressure from being concentrated on a part of the substrates, thereby preventing damage to the substrates.
摘要翻译：本发明涉及一种用于大面积基板的转印装置，包括在基板的传送方向上彼此靠近设置的多个传送轴的两端布置的下辊; 下表面接触环缠绕在沿着基板的传送方向布置的下辊的外表面上，以通过与传送轴的旋转一起旋转而与基板的底部边缘面接触来传送基板; 上辊在下辊之上彼此分离; 以及上表面接触环缠绕在沿着基板的传送方向布置的上辊的外表面上，以在与基板的顶边缘表面接触的同时支撑基板。在本发明中，沿着基板的传送方向在前侧和后侧设置垂直定位在基板被强制传送的部分中的上下两个辊对。一对表面接合环与通过缠绕一对上辊和下辊而转移的基板的上下部分进行表面接触，以防止压力集中在基板的一部分上，从而防止损坏底物。

4. 发明公开

KR1020140089169A 인라인 열처리 장치 无效
标题翻译：在线式热处理设备
公开(公告)号：KR1020140089169A
公开(公告)日：2014-07-14
申请号：KR1020130001063
申请日：2013-01-04
申请人： 주식회사 테라세미콘
发明人： 오홍록 , 전영준
IPC分类号： H01L21/677 , H01L21/22 , G02F1/13
CPC分类号： H01L21/67098 , B65G13/06 , B65G49/061 , G02F1/1303 , H01L21/67173 , H01L21/67706 , H01L21/68742
摘要： An in-line heat treatment apparatus is disclosed. The in-line heat treatment apparatus according to the present invention has a moving member moving in the direction of a transferred substrate or in the direction opposite to the direction of the transferred substrate, wherein the moving member transfers the substrate by having the substrate loaded and supported thereon. Thus, the in-line heat treatment apparatus prevents particles due to friction since friction force is not generated between the substrate and the moving member or between the support member having the substrate loaded thereon and the moving member, thereby improving product reliability by preventing damage to the substrate due to the particles.
摘要翻译：公开了一种在线热处理装置。根据本发明的在线热处理装置具有沿着转印的基板的方向或与被转印的基板的方向相反的方向移动的移动部件，其中移动部件通过使基板负载而传送基板，在其上支持。因此，在线热处理装置防止由于摩擦力在基板和移动部件之间或者在其上装载有基板的支撑部件与移动部件之间产生摩擦而产生的颗粒，从而通过防止损坏基体由于颗粒而产生。

5. 发明公开

KR1020130051645A 기판 이송 장치 审中-实审
标题翻译：基板传送装置
公开(公告)号：KR1020130051645A
公开(公告)日：2013-05-21
申请号：KR1020110116906
申请日：2011-11-10
申请人： 세메스 주식회사
发明人： 주재성
IPC分类号： H01L21/677 , B65G49/06 , G02F1/13
CPC分类号： H01L21/67706 , B65G13/06 , B65G49/061 , B65G49/063 , G02F1/1303
摘要： PURPOSE: A substrate transferring apparatus is provided to improve the yield of a substrate by preventing impurities due to the contact between a guide roller and the side of the substrate. CONSTITUTION: A substrate is transferred by rotating a bottom roller(110) in contact with the lower side of the substrate. A transfer shaft(120) is extended in a vertical direction to a substrate transfer direction. The bottom roller is installed in the transfer shaft. The transfer shaft rotates by receiving an external driving power. A top roller(310) faces the bottom roller. The substrate is supported by the bottom roller and the top roller. The top roller rotates in contact with the upper side of the substrate to prevent the substrate from being separated.
摘要翻译：目的：提供一种基板转印装置，用于通过防止由于导向辊与基板侧之间的接触引起的杂质来提高基板的收率。构成：通过旋转底部辊（110）与衬底的下侧接触来转移衬底。传送轴（120）在垂直于基板传送方向的方向上延伸。底辊安装在传送轴上。传送轴通过接收外部驱动力而旋转。上辊（310）面向底辊。基板由底辊和顶辊支撑。顶辊与衬底的上侧旋转以防止衬底分离。

6. 发明公开

KR1020130046722A 롤러 어셈블리 审中-实审
标题翻译：滚子总成
公开(公告)号：KR1020130046722A
公开(公告)日：2013-05-08
申请号：KR1020110111262
申请日：2011-10-28
申请人： 세메스 주식회사
发明人： 유동진 , 박태현
IPC分类号： B65G49/06 , H01L21/677 , G02F1/13
CPC分类号： B65G49/061 , B65G13/06 , B65G49/067 , G02F1/1303 , H01L21/67706
摘要： PURPOSE: A roller assembly is provided to simplify the assembly and maintenance works of the roller assembly by easily coupling a shaft and a roller. CONSTITUTION: A roller assembly(1000) comprises a shaft(100), a first fixing pin, a second fixing pin, a first stopping protrusion, a second stopping protrusion, and a roller(200). The first and second fixing pins are formed at one end of the shaft and face to each other. The first and second stopping protrusions are formed at the end of the first and second fixing pins. The roller is coupled by the elasticity of the first and second fixing pins and is not separated by the first and second stopping protrusions.
摘要翻译：目的：提供滚筒组件，通过轻松连接轴和滚筒来简化滚筒组件的组装和维护工作。构成：辊组件（1000）包括轴（100），第一固定销，第二固定销，第一止动突起，第二止动突起和辊（200）。第一和第二固定销形成在轴的一端并彼此面对。第一和第二止动突起形成在第一和第二固定销的端部。辊由第一和第二固定销的弹性联接，并且不被第一和第二止动突起分离。

7. 发明公开

KR1020130035377A 기판 이송 장치 无效
标题翻译：用于传输基板的装置
公开(公告)号：KR1020130035377A
公开(公告)日：2013-04-09
申请号：KR1020110099626
申请日：2011-09-30
申请人： 에프엔에스테크 주식회사
发明人： 박병우 , 지용현 , 박우열
IPC分类号： H01L21/677 , B65G49/06 , B65G49/07 , G02F1/13
CPC分类号： H01L21/67706 , B65G13/06 , B65G49/061 , B65G49/063 , G02F1/1303
摘要： PURPOSE: A substrate transferring apparatus is provided to prevent a transfer roller from being damaged by including a transfer belt on the outer sides of a plurality of transfer rollers. CONSTITUTION: A plurality of transfer rollers(200) are formed on the lower side of a substrate and erectly transfers the substrate. A plurality of guide rollers(400) guide the transferred substrate. A transfer belt(300) surrounds the outer sides of a plurality of transfer rollers. One side of the transfer roller is contacted to the lower side of the substrate.
摘要翻译：目的：提供一种基板传送装置，用于通过在多个转印辊的外侧包括转印带来防止转印辊损坏。构成：在基板的下侧形成有多个转印辊（200），并直立地传送基板。多个导辊（400）引导所转印的基板。转印带（300）围绕多个转印辊的外侧。转印辊的一侧与基板的下侧接触。

8. 发明授权

KR101174401B1 인라인 증착 시스템의 기판 제조장치 有权
标题翻译：用于制造在线沉积系统基板的装置
公开(公告)号：KR101174401B1
公开(公告)日：2012-08-20
申请号：KR1020110141851
申请日：2011-12-26
申请人： 주식회사 선익시스템
发明人： 황인호 , 김선혁 , 김종진
IPC分类号： H01L51/56 , H01L21/677
CPC分类号： H01L21/67173 , B65G13/06 , H01L21/6723 , H01L21/67276 , H01L21/67706
摘要： PURPOSE: An apparatus for manufacturing a substrate of an in-line deposition system is provided to increase a processing speed by transferring the substrate using a substrate transfer unit in a processing chamber. CONSTITUTION: A processing chamber is formed in a substrate transfer direction. A substrate transfer unit linearly transfers a substrate in the processing chamber. A driving unit drives the substrate transfer unit at each section of the processing chamber. A plurality of roller members(31a,31b) is connected to each driving shaft(42a,42b). The driving shaft is connected to each driving motor(43a,43b).
摘要翻译：目的：提供一种用于制造在线沉积系统的衬底的设备，以通过使用衬底转移单元在处理室中传送衬底来提高处理速度。构成：处理室形成在基板传送方向上。基板转印单元在处理室中线性地传送基板。驱动单元在处理室的每个部分驱动基板传送单元。多个辊构件（31a，31b）连接到每个驱动轴（42a，42b）。驱动轴连接到每个驱动电机（43a，43b）。

9. 发明公开

KR1020120075374A 컨베이어 모듈 및 이를 이용한 기판 처리 장치 有权
标题翻译：用于处理具有相同基板的输送机模块和装置
公开(公告)号：KR1020120075374A
公开(公告)日：2012-07-06
申请号：KR1020110138623
申请日：2011-12-20
申请人： 에이피에스홀딩스 주식회사
发明人： 윤청룡 , 조익성
IPC分类号： H01L21/677 , B65G49/06 , B65G13/08 , G02F1/13
CPC分类号： H01L21/67706 , B65G13/06 , B65G49/061 , B65G49/063 , G02F1/1303 , H01L21/67736
摘要： PURPOSE: A conveyor module and a substrate processing apparatus using the same are provided to steadily transfer a substrate by mounting a plurality of magnet gears on a driving shaft and rotating a plurality of roll sets in a same direction. CONSTITUTION: A conveyor roll(110) is arranged along a transfer direction of a substrate. The conveyor roll comprises a roller member(112) and a roll shaft member(114). The roller member contacts to the bottom of the substrate. A conveyor driving shaft(120) transfers torque created in a motor(140) to the roll shaft member. A driven magnet gear(130') is mounted on the roll shaft member of the conveyor roll. A driving magnet gear(130) is composed of a magnet holder, a soft magnet, and an external magnet.
摘要翻译：目的：提供一种输送机模块和使用其的基板处理装置，以通过将多个磁齿轮安装在驱动轴上并沿相同方向旋转多个辊组来稳定地转移基板。构成：沿着基板的传送方向布置输送辊（110）。传送辊包括辊构件（112）和辊轴构件（114）。辊构件接触到基底的底部。输送机驱动轴（120）将在电动机（140）中产生的扭矩传递到辊轴构件。驱动磁齿轮（130'）安装在输送辊的辊轴构件上。驱动磁齿轮（130）由磁体保持器，软磁体和外部磁体构成。

10. 发明公开

KR1020120042418A 대면적 기판의 이송장치 无效
标题翻译：大面积基片变压器
公开(公告)号：KR1020120042418A
公开(公告)日：2012-05-03
申请号：KR1020100104112
申请日：2010-10-25
申请人： 주식회사 케이씨
发明人： 오윤근
IPC分类号： H01L21/677 , B65G49/06 , G02F1/13
CPC分类号： H01L21/67706 , B65G13/06 , B65G49/061 , B65G49/063 , G02F1/1303
摘要： PURPOSE: A transfer apparatus of a large-area substrate is provided to not use long rotary shafts, thereby reducing manufacturing costs of the transfer apparatus. CONSTITUTION: A fixed frame(10) is located on both sides of a transfer path of a large-area substrate(S). An upper rotary shaft(30) and a lower rotary shaft(20) are respectively supported by an upper bearing(11) and a lower bearing(12). Gears(32,22) transfer torque of the lower rotary shaft to the upper rotary shaft. A helical gear(23) rotates the lower rotary shaft by receiving the torque of a gear(40) arranged on an external driving shaft. An upper roller(31) and a lower roller(21) are respectively combined with end parts of the upper rotary shaft and the lower rotary shaft.
摘要翻译：目的：提供大面积基板的转印装置，以不使用长的旋转轴，从而降低转印装置的制造成本。构成：固定框架（10）位于大面积基板（S）的输送路径的两侧。上旋转轴（30）和下旋转轴（20）分别由上轴承（11）和下轴承（12）支撑。齿轮（32,22）将下旋转轴的扭矩传递到上旋转轴。斜齿轮（23）通过接收布置在外部驱动轴上的齿轮（40）的扭矩来旋转下旋转轴。上辊（31）和下辊（21）分别与上旋转轴和下旋转轴的端部组合。

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