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1. 发明公开

KR1020080079828A 레이저 가공 장치 및 방법 无效
标题翻译：激光加工设备和方法
公开(公告)号：KR1020080079828A
公开(公告)日：2008-09-02
申请号：KR1020070020329
申请日：2007-02-28
申请人： 주식회사 이오테크닉스
发明人： 홍은정 , 정원철 , 김태현 , 이학용 , 이동준 , 유태경 , 임재관
IPC分类号： B23K26/08 , B23K26/067 , B23K26/00
CPC分类号： B23K26/067 , B23K26/0652 , B23K26/066 , B23K26/0676 , B23K26/0736 , B23K26/082 , B23K26/0821 , B23K26/364 , B23K26/40 , B23K2201/40 , B23K2203/50
摘要： A laser machining apparatus and a laser machining method are provided to improve machining quality of the workpiece and machining efficiency of the workpiece by machining a workpiece after splitting a laser beam projected in into at least two laser beams and moving a stage in the direction opposite to the irradiation direction of the laser beams. A laser machining apparatus comprises: a control part(101) for controlling the overall operation of the apparatus; a laser generating unit(103) for outputting a laser beam with a designated caliber; a beam splitting unit(105) for splitting a laser beam projected from the laser generating unit into at least two laser beams; a driver(107) for driving the beam scanner; an input part(109) for inputting control parameters and control instructions; an output part(111) for displaying information of an operating state, etc.; a storage part(113) for storing data; a beam scanner(115) enabling laser beams projected from the beam splitting unit to be scanned straightly and repeatedly in a designated section of a machining position on a workpiece; an optical system(117) for condensing laser beams reflected from the beam scanner to irradiate the condensed laser beam onto the workpiece; and a stage transfer unit(123) for transferring at least once a stage(121) having the workpiece placed thereon in the direction opposite to the irradiation direction of the laser beam while machining the workpiece.
摘要翻译：提供激光加工装置和激光加工方法以通过在将投影到至少两个激光束中的激光束分裂之后加工工件来加工工件的加工质量和加工效率，并且沿相反方向移动台阶激光束的照射方向。一种激光加工设备，包括：用于控制设备的整体操作的控制部分（101）用于输出具有指定口径的激光束的激光产生单元（103）分束单元，用于将从激光产生单元投影的激光束分成至少两个激光束; 用于驱动光束扫描器的驱动器（107）; 用于输入控制参数和控制指令的输入部分（109）; 用于显示操作状态信息的输出部分（111）等。存储部件（113），用于存储数据; 光束扫描器（115），使得能够在分割单元投影的激光束在工件上的加工位置的指定部分中被直线地重复扫描; 用于会聚从光束扫描器反射的激光束照射到工件上的聚光激光束的光学系统（117）以及用于在加工所述工件的同时在与激光束的照射方向相反的方向上放置其上放置有工件的台阶（121）至少一次传送的台转移单元（123）。

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