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    • 9. 发明公开
    • 유기금속증착용 전구용액 형성방법 및 이를 사용하는초전도 후막 형성방법
    • 用于金属有机沉积的前体溶液的形成方法和使用其形成超级薄膜的方法
    • KR1020090093618A
    • 2009-09-02
    • KR1020080019250
    • 2008-02-29
    • 재단법인서울대학교산학협력재단주식회사 서남
    • 유상임문승현신거명
    • C23C18/00C23C16/00
    • A formation method of the precursor solution for the metal organic deposition and a super-conduction thick film forming method using the same are provided to manufacture a super-conduction thick film without the cracking by increasing the viscosity of the precursor solution. A super-conduction thick film forming method using the precursor solution for the metal organic deposition comprises followings. The compound solution is formed by melting the first precursor including one rare earth element without additive, the second precursor including barium and the third precursor including copper in acid(S1). The compound solution is melted in the solvent to form extra precursor solution(S3). The precursor solution with increased viscosity is formed by evaporating the solvent of the extra precursor solution(S4). The precursor solution with an increased viscosity is poured on a base material having texture in order to make the super-conduction thick film. At least one of the first, second or third precursor is molten with the acid not including fluorine. The super-conduction thick film forming process includes to coat the precursor solution with increased viscosity on the base material and to treat with the heat.
    • 提供了用于金属有机沉积的前体溶液的形成方法和使用其的超导厚膜形成方法,以通过增加前体溶液的粘度来制造没有裂纹的超导厚膜。 使用前体溶液进行金属有机沉积的超导厚膜形成方法包括以下。 复合溶液是通过熔化含有一种稀土元素的第一前体而没有添加剂形成的,第二前体包括钡,第三前体在酸中包括铜(S1)。 将化合物溶液在溶剂中熔融以形成额外的前体溶液(S3)。 通过蒸发额外的前体溶液的溶剂(S4)形成粘度增加的前体溶液。 将具有增加的粘度的前体溶液倒入具有纹理的基材上以制备超导厚膜。 第一,第二或第三前体中的至少一种与不含氟的酸熔融。 超导厚膜形成方法包括在基材上涂覆增加粘度的前体溶液并用热处理。