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    • 4. 发明公开
    • 마이크로 캐비티 MEMS 장치 및 그 제조방법
    • 微孔MEMS器件及其制造方法
    • KR1020080041676A
    • 2008-05-13
    • KR1020087005252
    • 2006-08-30
    • 인터내셔널 비지네스 머신즈 코포레이션
    • 수루이스씨클레벤거로렌스에이달튼티모시제이라덴스칼제이웡케이스퀑혼양치차오
    • H01P1/10
    • H01H50/005H01H2050/007Y10T29/4902Y10T29/49105Y10T29/49147
    • A MEM switch is described having a free moving element (140) within in micro-cavity (40), and guided by at least one inductive element. The switch consists of an upper inductive coil (170); an optional lower inductive coil (190), each having a metallic core (180, 200) preferably made of permalloy; a micro-cavity (40); and a free-moving switching element (140) preferably also made of magnetic material. Switching is achieved by passing a current through the upper coil, inducing a magnetic field in the coil element. The magnetic field attracts the free-moving magnetic element upwards, shorting two open wires (M_l, M_r) and thus, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the wires open. When the chip is not mounted with the correct orientation, gravity cannot be used. In such an instance, a lower coil becomes necessary to pull the free-moving switching element back and holding it at its original position.
    • 描述了一种MEM开关,其具有在微腔(40)内的自由移动元件(140),并由至少一个电感元件引导。 开关由上部感应线圈(170)组成; 可选的下感应线圈(190),每个具有优选由坡莫合金制成的金属芯(180,200) 微腔(40); 以及优选也由磁性材料制成的自由移动的开关元件(140)。 通过使电流通过上部线圈来实现切换,从而在线圈元件中产生磁场。 磁场向上吸引自由移动的磁性元件,使两根开放的导线(M_1,M_r)短路,从而闭合开关。 当电流停止或反转时,自由移动的磁性元件通过重力返回到微腔的底部并且电线打开。 当芯片未正确安装时,重力不能使用。 在这种情况下,需要下部线圈将自由移动的开关元件拉回并将其保持在其原始位置。