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    • 2. 发明授权
    • 정전용량검출형 센서 및 자이로스코프 및 입력장치
    • 정전용량검출형센서및자이로스코프및입력장
    • KR100428226B1
    • 2004-04-30
    • KR1020000083560
    • 2000-12-28
    • 알프스 덴키 가부시키가이샤에사시마사요시
    • 아베무네미쯔시노하라에이지에사시마사요시
    • G01C19/08
    • B81B7/007B81C2203/031G01C19/5621G01C19/5628
    • 전극 주위에서 발생하는 전기적 노이즈를 억제하고, S/N 비의 향상에 따라 검출감도의 향상을 도모할 수 있는 정전용량검출형 센서를 제공한다.
      본 발명의 자이로스코프 (1) 는 3 개의 다리 (9) 를 갖는 음차 (6) 와, 양 유리기판 (2, 3) 상에 설치된 구동용 전극 (4) 과 검출용 전극 (5) 과, 구동용 전극 (4) 에 구동신호를 공급하는 구동용 필드스루 (7) 와, 검출용 전극 (5) 으로부터의 검출신호를 인출하는 검출용 필드스루 (8) 를 구비하고 있다. 그리고, 구동용 필드스루 (7), 검출용 필드스루 (8) 가 배열된 인접하는 필드스루 사이에 이들 필드스루 사이를 정전적으로 차폐하는 검출-구동간 차폐부 (19), 검출-검출간 차폐부 (20), 구동-구동간 차폐부 (21) 가 각각 형성되어 있다.
    • 本发明提供一种抑制在电极周围产生的电噪声并且提高S / N比从而提高检测灵敏度的电容式微传感器。 本发明的陀螺仪包括音叉(6),其具有设置在两个玻璃基板(2,3)上的三条腿(9),驱动电极(4)和检测电极(5) 用驱动信号驱动驱动电极,并检测从检测电极提取检测信号的字段(8)。 在检测和驱动之间还设置有屏蔽构件,在检测和检测之间设置屏蔽构件,并且设置驱动和驱动之间的屏蔽构件,其在相邻视场之间进行静电屏蔽 - 穿过 驱动字段通过和检测字段通过排列。 <图像>
    • 5. 发明公开
    • 자이로스코프 및 이를 사용한 입력장치
    • 使用它的陀螺仪和输入装置
    • KR1020010050366A
    • 2001-06-15
    • KR1020000052945
    • 2000-09-07
    • 알프스 덴키 가부시키가이샤에사시마사요시
    • 아베무네미쯔시노하라에이지에사시마사요시
    • G01C19/00
    • G01C19/5607
    • PURPOSE: Provided is a gyroscope which can miniaturize a device, improve a detecting sensitivity, reduce a driving voltage, and the like. CONSTITUTION: A gyroscope(1) includes a tuning fork(2) with three legs(9) and a supporting part(10), an upper glass substrate(7) and a lower glass substrate(8) which support the tuning fork(2), movable electrodes(3) for driving which are set to upper faces of the legs(9), fixed electrodes(4) for driving which are set to a lower face of the upper glass substrate(7) to be opposite to the movable electrodes, three remained movable electrodes(5) for detection which are set to upper faces of leading ends of the legs(9) and connected in parallel to each other, and six fixed electrodes(6) of three pairs for detection which are existed set to the lower face of the upper glass appeared substrate(7) to be opposite to the movable consisted electrodes(5) and connected in parallel to every other electrode.
    • 目的:提供一种能够使装置小型化,提高检测灵敏度,降低驱动电压等的陀螺仪。 构成:陀螺仪(1)包括具有三个腿(9)和支撑部分(10)的音叉(2),支撑音叉(2)的上玻璃基板(7)和下玻璃基板(8) ),用于驱动的​​可动电极(3),其设置在腿部(9)的上表面,用于驱动的​​固定电极(4)设置在上玻璃基板(7)的下表面上以与可移动 电极,三个保持的用于检测的可动电极(5),其被设置为腿部(9)的前端的上表面并且彼此并联,并且存在用于检测的六对固定电极(6) 到上玻璃的下表面出现与可移动组合电极(5)相对的衬底(7)并且与每隔一个电极并联连接。
    • 6. 发明授权
    • 자이로스코프 및 이를 사용한 입력장치
    • 자이로스코프및이를사용한입력장치
    • KR100413875B1
    • 2004-01-13
    • KR1020000052945
    • 2000-09-07
    • 알프스 덴키 가부시키가이샤에사시마사요시
    • 아베무네미쯔시노하라에이지에사시마사요시
    • G01C19/00
    • G01C19/5607
    • A gyroscope of the invention is provided with a tuning fork (2) having three legs (9) and a support (10), a top side glass substrate (7) and a bottom side glass substrate (8) between which the tuning fork is interposed, driving movable electrodes (3) disposed on the top surface of each leg, driving fixed electrodes (4) disposed on the bottom surface of the top side glass substrate so as to face to the driving movable electrodes, six detection movable electrodes (5) connected to each other in parallel disposed on the top surface of the free end of each leg, and six detection fixed electrodes (6) connected to each other in parallel disposed on the bottom surface of the top side glass substrate so as to face to the detection movable electrodes.
    • 本发明的陀螺仪配备有具有三个支脚(9)和支撑件(10),顶侧玻璃基板(7)和底侧玻璃基板(8)的音叉(2),音叉为 设置在每个腿的顶表面上的驱动可动电极(3),驱动设置在顶侧玻璃基板的底表面上以面对驱动可动电极的固定电极(4),六个检测可动电极(5 ),它们平行地相互连接并设置在每个支脚的自由端的顶表面上;以及六个检测固定电极(6),它们平行地相互连接设置在顶侧玻璃基片的底表面上,以面对 检测可动电极。 <图像>
    • 8. 发明公开
    • 각속도 입력시의 음차의 다리의 변위를 용량의 변화로검출하는 자이로스코프 및 이것을 사용한 입력장치
    • 使用它的GYROSCOPE和输入设备
    • KR1020010051543A
    • 2001-06-25
    • KR1020000066245
    • 2000-11-08
    • 알프스 덴키 가부시키가이샤에사시마사요시
    • 아베무네미쯔시노하라에이지에사시마사요시
    • G01C19/00
    • G01C19/5628G01C19/5621
    • PURPOSE: Provided is a gyroscope by which a device can be miniaturized, whose detecting sensitivity can be enhanced and in which a driving voltage can be reduced or the like. CONSTITUTION: This gyroscope(1) by this invention is provided with a tuning fork(2) which comprises three legs(9) and a support part(10). The gyroscope is provided with an upper-side glass substrate(7) and a lower-side glass substrate(8) which sandwich the tuning fork(2). The gyroscope is provided with fixed electrodes(4a,4b), for drive, which face base end edges of the respective legs(9) and which are installed on both glass substrates(7,8). The gyroscope is provided with six moving electrodes(5a,5b), for detection, which are installed on the surface and the rear surface at tip end parts of the respective legs(9) and which are composed of unevenly worked protruding parts. The gyroscope is provided with six fixed electrodes(6a,6b), for detection, which face the moving electrodes and which are installed on both glass substrates(7,8).
    • 目的:提供一种可以使装置小型化的陀螺仪,其检测灵敏度可以提高,并且可以降低驱动电压等。 构成:本发明的陀螺仪(1)具有包括三个腿部(9)和支撑部件(10)的音叉(2)。 陀螺仪设置有夹着音叉(2)的上侧玻璃基板(7)和下侧玻璃基板(8)。 陀螺仪设有用于驱动的​​固定电极(4a,4b),所述固定电极面对相应支脚(9)的基端边缘并安装在两个玻璃基板(7,8)上。 该陀螺仪具有用于检测的六个移动电极(5a,5b),它们安装在相应腿部(9)的尖端部分的表面和后表面上,并且由不均匀的突出部分组成。 该陀螺仪具有六个用于检测的固定电极(6a,6b),用于检测它们,该电极面对移动的电极并安装在两个玻璃基板(7,8)上。