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    • 1. 发明授权
    • 정전용량검출형 센서 및 자이로스코프 및 입력장치
    • 정전용량검출형센서및자이로스코프및입력장
    • KR100428226B1
    • 2004-04-30
    • KR1020000083560
    • 2000-12-28
    • 알프스 덴키 가부시키가이샤에사시마사요시
    • 아베무네미쯔시노하라에이지에사시마사요시
    • G01C19/08
    • B81B7/007B81C2203/031G01C19/5621G01C19/5628
    • 전극 주위에서 발생하는 전기적 노이즈를 억제하고, S/N 비의 향상에 따라 검출감도의 향상을 도모할 수 있는 정전용량검출형 센서를 제공한다.
      본 발명의 자이로스코프 (1) 는 3 개의 다리 (9) 를 갖는 음차 (6) 와, 양 유리기판 (2, 3) 상에 설치된 구동용 전극 (4) 과 검출용 전극 (5) 과, 구동용 전극 (4) 에 구동신호를 공급하는 구동용 필드스루 (7) 와, 검출용 전극 (5) 으로부터의 검출신호를 인출하는 검출용 필드스루 (8) 를 구비하고 있다. 그리고, 구동용 필드스루 (7), 검출용 필드스루 (8) 가 배열된 인접하는 필드스루 사이에 이들 필드스루 사이를 정전적으로 차폐하는 검출-구동간 차폐부 (19), 검출-검출간 차폐부 (20), 구동-구동간 차폐부 (21) 가 각각 형성되어 있다.
    • 本发明提供一种抑制在电极周围产生的电噪声并且提高S / N比从而提高检测灵敏度的电容式微传感器。 本发明的陀螺仪包括音叉(6),其具有设置在两个玻璃基板(2,3)上的三条腿(9),驱动电极(4)和检测电极(5) 用驱动信号驱动驱动电极,并检测从检测电极提取检测信号的字段(8)。 在检测和驱动之间还设置有屏蔽构件,在检测和检测之间设置屏蔽构件,并且设置驱动和驱动之间的屏蔽构件,其在相邻视场之间进行静电屏蔽 - 穿过 驱动字段通过和检测字段通过排列。 <图像>
    • 8. 发明公开
    • 자이로스코프 및 이를 사용한 입력장치
    • 使用它的陀螺仪和输入装置
    • KR1020010050366A
    • 2001-06-15
    • KR1020000052945
    • 2000-09-07
    • 알프스 덴키 가부시키가이샤에사시마사요시
    • 아베무네미쯔시노하라에이지에사시마사요시
    • G01C19/00
    • G01C19/5607
    • PURPOSE: Provided is a gyroscope which can miniaturize a device, improve a detecting sensitivity, reduce a driving voltage, and the like. CONSTITUTION: A gyroscope(1) includes a tuning fork(2) with three legs(9) and a supporting part(10), an upper glass substrate(7) and a lower glass substrate(8) which support the tuning fork(2), movable electrodes(3) for driving which are set to upper faces of the legs(9), fixed electrodes(4) for driving which are set to a lower face of the upper glass substrate(7) to be opposite to the movable electrodes, three remained movable electrodes(5) for detection which are set to upper faces of leading ends of the legs(9) and connected in parallel to each other, and six fixed electrodes(6) of three pairs for detection which are existed set to the lower face of the upper glass appeared substrate(7) to be opposite to the movable consisted electrodes(5) and connected in parallel to every other electrode.
    • 目的:提供一种能够使装置小型化,提高检测灵敏度,降低驱动电压等的陀螺仪。 构成:陀螺仪(1)包括具有三个腿(9)和支撑部分(10)的音叉(2),支撑音叉(2)的上玻璃基板(7)和下玻璃基板(8) ),用于驱动的​​可动电极(3),其设置在腿部(9)的上表面,用于驱动的​​固定电极(4)设置在上玻璃基板(7)的下表面上以与可移动 电极,三个保持的用于检测的可动电极(5),其被设置为腿部(9)的前端的上表面并且彼此并联,并且存在用于检测的六对固定电极(6) 到上玻璃的下表面出现与可移动组合电极(5)相对的衬底(7)并且与每隔一个电极并联连接。
    • 10. 发明公开
    • 콘택터, 콘택터의 제조 방법 및 콘택터를 사용한 프로브 카드
    • 接触器,接触器的检测卡和制造方法
    • KR1020020037276A
    • 2002-05-18
    • KR1020010070037
    • 2001-11-12
    • 도쿄엘렉트론가부시키가이샤에사시마사요시
    • 에사시마사요시이이노신지호시노도모히사
    • G01R1/073
    • G01R1/07371
    • PURPOSE: To solve the problem that, when tip contact terminals, beam parts and posts are formed in respective processes so as to be transferred mutually and integrated, a defect is easy to generate in their transferred parts so as to influence a yield, and that there exist many restriction conditions under which the melting point of a brazing material used for the transferred parts must be changed properly because they are transferred in a plurality of parts. CONSTITUTION: The contactor 10 is provided with a contactor board 11, a plurality of continuity parts 12 formed on the board, a plurality of beams 13 which come into contact with the cintinuity parts 12, and a plurality of bumps 14 which are formed at tip parts of the beams 13. The contactor brings the respective bumps 14 into contact with a wafer W so as to inspect its electric characteristic. The beams 13 are separated stepwise from the contactor board 11 so as to be extended and installed along the contactor board 11. The bumps 14 and the beams 13 are formed integrally.
    • 目的:为了解决这样一个问题,当在各个工序中形成尖端接触端子,梁部件和支柱以便相互转移和一体化时,容易在其转移部分产生缺陷,从而影响产量,并且 存在许多限制条件,在这些条件下,用于转移部件的钎焊材料的熔点必须适当地改变,因为它们被转移成多个部分。 构成:接触器10设置有接触器板11,形成在板上的多个连续性部分12,与铁素体部分12接触的多个梁13和形成在尖端的多个凸块14 梁13的部分。接触器使各个凸起14与晶片W接触,以检查其电特性。 梁13从接触器板11逐步分离,以沿着接触器板11延伸和安装。凸块14和梁13一体形成。