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1. 发明公开

KR1020100067413A 비접촉식 플라즈마 모니터링 장치, 플라즈마 처리 장치 및 비접촉식 플라즈마 모니터링 방법 无效
标题翻译：非接触式等离子体监测装置，等离子体处理装置和非接触式等离子体监测系统
公开(公告)号：KR1020100067413A
公开(公告)日：2010-06-21
申请号：KR1020080125975
申请日：2008-12-11
申请人： 삼성전자주식회사 , 주식회사 플라즈마트
发明人： 최신일 , 진홍기 , 김상갑 , 이기엽 , 양동주 , 정유광 , 최승하 , 여윤종 , 박지영 , 김형준 , 이상선
IPC分类号： H01L21/66 , H01L21/3065 , H01L21/205
CPC分类号： G01R33/12
摘要： PURPOSE: A contactless plasma monitoring apparatus, a plasma processing apparatus and a contactless plasma monitoring method are provided to maintain a plasma state in a processing chamber with proper condition to a plasma process by controlling a voltage provided to the processing chamber in a real time. CONSTITUTION: A processing chamber(100) supplies a reaction space(150) in which the process is implemented using a plasma(140). The processing chamber includes an upper electrode(110) and a lower electrode(120). A power supply unit(300) supplies the power supply to the processing chamber. The power supply unit includes a power generating unit(320) with generating the power supply to the processing chamber and a matching box(310). The matching box controls the intensity of the generated power source and supplies to the processing chamber. A power supply wiring(200) connects the processing chamber with the power supply unit.
摘要翻译：目的：提供一种非接触式等离子体监测装置，等离子体处理装置和非接触式等离子体监测方法，以通过实时控制提供给处理室的电压，将处于等离子体状态的等离子体状态保持在等离子体处理的适当条件。构成：处理室（100）提供使用等离子体（140）实现该过程的反应空间（150）。处理室包括上电极（110）和下电极（120）。电源单元（300）将电源供应到处理室。电源单元包括产生对处理室的电源的发电单元（320）和匹配箱（310）。匹配箱控制所产生的电源的强度并供应给处理室。电源线（200）将处理室与电源单元连接。

2. 发明公开

KR1020080057779A 박막 트랜지스터 기판의 제조 방법 无效
标题翻译：制造薄膜晶体管基板的方法
公开(公告)号：KR1020080057779A
公开(公告)日：2008-06-25
申请号：KR1020060131470
申请日：2006-12-21
申请人： 삼성전자주식회사
发明人： 김상갑 , 오민석 , 정유광 , 김시열 , 최신일 , 최승하
IPC分类号： G02F1/136
CPC分类号： G02F1/13458 , G02F2201/123 , H01L21/0273 , H01L29/786
摘要： A method for manufacturing a TFT(Thin Film Transistor) substrate is provided to pattern a data metal film through a wet etching process and a dry etching process. A gate insulating film and an active layer(140) are successively formed on a substrate(110) in which a gate wire is formed. A data metal film(150) in which the first to the third metal layers(151~153) are continuously laminated is formed on the active layer. The first photoresist pattern(160) in which a channel forming region has a thickness which is relatively thinner than other regions is formed on the data metal layer. The data metal layer and the active layer are etched by using the first photoresist pattern. The first photoresist pattern is etched, and the second photoresist pattern in which the channel forming region is opened is formed. A primary dry etching of the third metal layer of the channel forming region is performed by using the second photoresist pattern. Secondary dry etching of the second metal layer is performed, and tertiary dry etching of the first metal layer is performed by using the second photoresist pattern.
摘要翻译：提供一种用于制造TFT（薄膜晶体管）基板的方法，以通过湿蚀刻工艺和干蚀刻工艺对数据金属膜进行图案化。栅极绝缘膜和有源层（140）依次形成在其上形成有栅极线的基板（110）上。在有源层上形成连续层叠有第一〜第三金属层（151〜153）的数据金属膜（150）。在数据金属层上形成第一光致抗蚀剂图案（160），其中沟道形成区域的厚度比其它区域薄。通过使用第一光致抗蚀剂图案蚀刻数据金属层和有源层。蚀刻第一光致抗蚀剂图案，形成其中打开通道形成区域的第二光致抗蚀剂图案。通过使用第二光致抗蚀剂图案来进行沟道形成区域的第三金属层的主干蚀刻。执行第二金属层的二次干法蚀刻，并且通过使用第二光致抗蚀剂图案来执行第一金属层的三次干蚀刻。

3. 发明公开

KR1020080040442A 박막 트랜지스터 표시판의 제조 방법 및 이에 이용되는제조 시스템 无效
标题翻译：制造薄膜晶体管基板的方法和使用它的制造系统
公开(公告)号：KR1020080040442A
公开(公告)日：2008-05-08
申请号：KR1020060108416
申请日：2006-11-03
申请人： 삼성전자주식회사
发明人： 오민석 , 김상갑 , 진홍기 , 정유광 , 최승하 , 김기현 , 송인호
IPC分类号： H01L29/786 , H01L21/304
CPC分类号： H01L22/12 , H01L27/1288 , H01L2924/0002 , H01L21/02068 , H01L27/1214 , H01L2924/00
摘要： A method for manufacturing a thin film transistor display panel and a manufacturing system using the same are provided to reduce the error rate of a liquid crystal display device by preventing generation of corrosive foreign materials in a manufacturing process. A deposition process is performed to deposit a metallic thin film on a display panel(S111). An insulating substrate deposited with a metallic thin film is provided into an etch unit to perform a dry-etch process for forming a predetermined circuit pattern(S112). The insulating substrate is provided into a standby unit to perform a cleaning and standby process(S113). A preliminary cleaning process is performed(S114). A determination process is performed to determine the state of a cleaning operation(S115). A main cleaning process is performed(S116).
摘要翻译：提供一种制造薄膜晶体管显示面板的方法和使用该方法的制造系统，以通过在制造过程中防止产生腐蚀性异物来降低液晶显示装置的误差率。进行沉积处理以在显示面板上沉积金属薄膜（S111）。将沉积有金属薄膜的绝缘衬底提供到蚀刻单元中以执行用于形成预定电路图案的干法蚀刻工艺（S112）。将绝缘基板设置在待机单元中以执行清洁和待机处理（S113）。进行初步清洗处理（S114）。执行确定处理以确定清洁操作的状态（S115）。执行主要清洁处理（S116）。

4. 发明公开

KR1020080024763A 박막 트랜지스터 표시판 및 그 제조 방법 无效
标题翻译：薄膜晶体管阵列及其制造方法
公开(公告)号：KR1020080024763A
公开(公告)日：2008-03-19
申请号：KR1020060089312
申请日：2006-09-14
申请人： 삼성전자주식회사
发明人： 오민석 , 김상갑 , 박홍식 , 진홍기 , 정유광 , 최승하
IPC分类号： G02F1/136 , H01L29/786
CPC分类号： G02F1/136286 , H01L29/458
摘要： A thin film transistor display panel and its fabrication method are provided to obtain low resistance of wirings and the reliability. A gate line(121) is formed on an insulation substrate. A gate insulating layer is formed on the gate line. A semiconductor(151) is formed on the gate insulating layer. Ohmic contacts are formed on the semiconductor. A data line(171) is formed on the ohmic contacts and includes a source electrode(173). A drain electrode faces the source electrode. A pixel electrode is connected with the drain electrode. At least one of the data line and the drain electrode includes the first contact layer, the second contact layer including a conductive oxide, and a conductive layer containing silver or a silver alloy.
摘要翻译：提供一种薄膜晶体管显示面板及其制造方法，以获得较低的布线电阻和可靠性。在绝缘基板上形成栅极线（121）。在栅极线上形成栅极绝缘层。在栅极绝缘层上形成半导体（151）。在半导体上形成欧姆接触。数据线（171）形成在欧姆接触上，并包括源电极（173）。漏电极面对源电极。像素电极与漏电极连接。数据线和漏电极中的至少一个包括第一接触层，第二接触层包括导电氧化物，以及包含银或银合金的导电层。

5. 发明公开

KR1020080020323A 박막 트랜지스터 표시판의 제조 방법 无效
标题翻译：制造薄膜晶体管阵列的方法
公开(公告)号：KR1020080020323A
公开(公告)日：2008-03-05
申请号：KR1020060083676
申请日：2006-08-31
申请人： 삼성전자주식회사
发明人： 이은국 , 오민석 , 김상갑 , 정유광
IPC分类号： G02F1/136
CPC分类号： G02F1/1368 , H01L27/1214 , H01L29/786
摘要： A method for manufacturing a TFT display panel is provided to prevent vacuum break between an active etch process and an etch back process, thereby preventing damage of copper lines and improving characteristics of a TFT. A method for manufacturing a TFT(Thin Film Transistor) display panel comprises the following steps of: forming a gate line(121) on a substrate(110); forming a gate insulating layer(140) on the gate line; laminating an amorphous silicon layer(150), a doped amorphous silicon layer(160) and a conductive layer(170) on the gate insulating layer; forming a first photoresist film pattern on the conductive layer; forming a doped amorphous silicon pattern and a semiconductor by etching the doped amorphous silicon layer and the amorphous silicon layer by using the first photoresist film pattern as a mask; and forming a second photoresist film pattern by removing the first photoresist film pattern as much as a predetermined thickness.
摘要翻译：提供一种用于制造TFT显示面板的方法，以防止有源蚀刻工艺和回蚀工艺之间的真空断裂，从而防止铜线损坏并改善TFT的特性。一种制造TFT（薄膜晶体管）显示面板的方法包括以下步骤：在衬底（110）上形成栅极线（121）; 在所述栅极线上形成栅极绝缘层（140）; 在所述栅绝缘层上层叠非晶硅层（150），掺杂非晶硅层（160）和导电层（170）; 在导电层上形成第一光致抗蚀剂图案; 通过使用第一光致抗蚀剂膜图案作为掩模，通过蚀刻掺杂的非晶硅层和非晶硅层来形成掺杂的非晶硅图案和半导体; 以及通过将第一光致抗蚀剂膜图案去除预定厚度来形成第二光致抗蚀剂图案。

6. 发明公开

KR1020070008869A 박막 트랜지스터 표시판 및 그 제조 방법 无效
标题翻译：薄膜晶体管阵列及其制造方法
公开(公告)号：KR1020070008869A
公开(公告)日：2007-01-18
申请号：KR1020050062732
申请日：2005-07-12
申请人： 삼성전자주식회사
发明人： 김상갑 , 오민석 , 진홍기 , 정유광
IPC分类号： G02F1/136
CPC分类号： H01L27/124 , G02F1/136227 , G02F1/136286 , H01L27/1259
摘要： A thin film transistor display panel and a fabrication method thereof are provided to reduce a leakage current and prevent a persistence of vision from being generated by forming a semiconductor device using a-Si:H:Cl (hydrogenated chlorinated amorphous silicon). A gate line is formed on a substrate(110). A gate insulating layer(140) is formed on the gate line. A semiconductor layer is formed on the gate insulating layer and includes 3 to 20 at% of Chlorine atoms (Cl). A data line(171) and a drain electrode(175) include an Al-containing conductive layer that is formed on the semiconductor layer and a Mo-containing conductive layer that is formed at least one of under and over the Al -containing conductive layer. A pixel electrode(191) is connected with the drain electrode.
摘要翻译：提供薄膜晶体管显示面板及其制造方法以减少泄漏电流，并通过使用-Si：H：Cl（氢化氯化非晶硅）形成半导体器件来防止产生视力的持续性。在基板（110）上形成栅极线。栅极绝缘层（140）形成在栅极线上。在栅极绝缘层上形成半导体层，其含有3〜20原子％的氯原子（Cl）。数据线（171）和漏极（175）包括形成在半导体层上的含Al导电层和形成在含Al导电层的下面和之上的至少一个的含Mo导电层。像素电极（191）与漏电极连接。

7. 发明公开

KR1020070004310A 액정 표시 장치 및 그 제조 방법 无效
标题翻译：液晶显示器及其形成方法
公开(公告)号：KR1020070004310A
公开(公告)日：2007-01-09
申请号：KR1020050059811
申请日：2005-07-04
申请人： 삼성전자주식회사
发明人： 진홍기 , 김상갑 , 오민석 , 정유광
IPC分类号： G02F1/1339
CPC分类号： G02F1/13394 , G02F1/133512 , G02F1/133514 , G02F2001/133519 , G02F2001/13398
摘要： An LCD and a method for manufacturing the same are provided to improve the uniformity of mountain-shaped structures, by forming each mountain-shaped structure of a first organic layer and a second organic layer having a higher photosensitivity than photosensitivity of the first organic layer. A common electrode(120) is formed on a transparent substrate(100). A mountain-shaped structure(140) covers at least a portion of the common electrode, wherein the mountain-shaped structure is formed of an organic material. A spacer(135) is disposed at one side of the mountain-shaped structure on a substrate, wherein the spacer is formed of an organic material. A height of the spacer is higher than the mountain-shaped structure. An organic material for an upper part of the spacer has a higher photosensitivity than that of an organic material for a lower part of the spacer.
摘要翻译：提供了一种液晶显示器及其制造方法，通过形成具有比第一有机层的光敏性更高的光敏性的第一有机层和第二有机层的每个山形结构来改善山形结构的均匀性。公共电极（120）形成在透明基板（100）上。山形结构（140）覆盖公共电极的至少一部分，其中山形结构由有机材料形成。衬垫（135）设置在基板上的山形结构的一侧，其中间隔件由有机材料形成。间隔件的高度高于山形结构。用于隔离物上部的有机材料具有比用于间隔物的下部的有机材料更高的光敏性。

8. 发明公开

KR1020080070457A 플라즈마 발생 장치 无效
标题翻译：等离子体发生装置
公开(公告)号：KR1020080070457A
公开(公告)日：2008-07-30
申请号：KR1020070008602
申请日：2007-01-26
申请人： 삼성전자주식회사
发明人： 최신일 , 김상갑 , 오민석 , 진홍기 , 정유광 , 최승하
IPC分类号： H04R1/24 , H05H1/30 , H05H1/34
CPC分类号： H01J37/32532 , H01J37/32082 , H01J37/32633 , H05H1/46
摘要： A plasma generation apparatus is provided to improve uniformity of a surface processing of an object by ejecting plasma into an ejection hole which is arranged uniformly. A plasma generation apparatus includes a power terminal(20), a first ground terminal(30), a first dielectric body(50), a second ground terminal(40), and an ejection hole(70). A high frequency voltage is applied to the power terminal. The first ground terminal is arranged to be opposite to the power terminal, and is grounded. The first dielectric body is located between the power terminal and the first ground terminal, and electrically insulates the power terminal from the first ground terminal. The second ground terminal is arranged to be apart from a lower part of the first ground terminal and the power terminal. The second ground terminal is grounded. The ejection hole is formed to be penetrated by the second ground terminal.
摘要翻译：提供了一种等离子体产生装置，以通过将等离子体喷射到均匀排列的喷射孔中来提高物体的表面处理的均匀性。等离子体产生装置包括电源端子（20），第一接地端子（30），第一电介质体（50），第二接地端子（40）和喷射孔（70）。向电源端子施加高频电压。第一接地端子被布置为与电源端子相对，并且接地。第一绝缘体位于电源端子与第一接地端子之间，并将电源端子与第一接地端子电绝缘。第二接地端子被布置成与第一接地端子和电源端子的下部分开。第二个接地端接地。喷射孔形成为被第二接地端子穿透。

9. 发明公开

KR1020080035150A 박막 트랜지스터 기판의 제조 방법 无效
标题翻译：薄膜晶体管基板的制作方法
公开(公告)号：KR1020080035150A
公开(公告)日：2008-04-23
申请号：KR1020060101428
申请日：2006-10-18
申请人： 삼성전자주식회사
发明人： 최승하 , 김상갑 , 오민석 , 최신일 , 김대옥 , 진홍기 , 정영호 , 정유광
IPC分类号： H01L29/786
CPC分类号： H01L27/1288 , H01L27/1214 , H01L21/02068 , H01L29/66765
摘要： A method for fabricating a TFT substrate is provided to avoid a skew phenomenon of a source/drain electrode by forming the source/drain electrode by a dry etch process. A gate interconnection, a gate insulation layer, an active layer, a conductive layer for a data interconnection, and a photoresist pattern composed of first and second regions are sequentially formed on an insulation substrate(10). By using the photoresist pattern as an etch mask, the conductive layer for the data interconnection is etched to form a conductive pattern for a source/drain electrode(65,66) and a data line(62). By using the photoresist pattern as an etch mask, the active layer is etched to form an active layer pattern. The second region of the photoresist pattern is removed. By employing etch gas and using the photoresist pattern as an etch mask, the conductive layer pattern for the source/drain electrode under the second region is dry-etched. A part of the active layer pattern is etched by using the photoresist pattern as an etch mask. Reaction byproducts of the conductive layer pattern for the source/drain electrode are physically removed by a reaction byproducts removing agent so that external force is applied to the etch gas and the reaction byproducts. The photoresist pattern is stripped, and a passivation layer(70) and a pixel electrode are formed.
摘要翻译：提供一种用于制造TFT基板的方法，以通过干法蚀刻工艺形成源/漏电极来避免源极/漏极的偏斜现象。在绝缘基板（10）上依次形成栅极互连，栅极绝缘层，有源层，数据互连用导电层和由第一和第二区域构成的光致抗蚀剂图案。通过使用光致抗蚀剂图案作为蚀刻掩模，蚀刻用于数据互连的导电层以形成用于源极/漏极（65,66）和数据线（62）的导电图案。通过使用光致抗蚀剂图案作为蚀刻掩模，有源层被蚀刻以形成有源层图案。除去光致抗蚀剂图案的第二区域。通过使用蚀刻气体并使用光致抗蚀剂图案作为蚀刻掩模，在第二区域下的源极/漏极电极的导电层图案被干蚀刻。通过使用光致抗蚀剂图案作为蚀刻掩模蚀刻有源层图案的一部分。用于源/漏电极的导电层图案的反应副产物通过反应副产物去除剂物理去除，使得外力施加到蚀刻气体和反应副产物。剥离光致抗蚀剂图案，形成钝化层（70）和像素电极。

10. 发明公开

KR1020080008734A 표시판, 표시 장치 및 이의 제조 방법 无效
标题翻译：显示面板，显示设备及其制造方法
公开(公告)号：KR1020080008734A
公开(公告)日：2008-01-24
申请号：KR1020060068334
申请日：2006-07-21
申请人： 삼성전자주식회사
发明人： 정창오 , 김상갑 , 석준형 , 김홍균 , 황인선 , 오민석 , 진홍기 , 정유광 , 최승하 , 이희국 , 김시열
IPC分类号： G02F1/1343 , G02F1/1335
CPC分类号： G02F1/133528 , G02F1/134336 , G02F2001/133548 , H01L27/12
摘要： A display panel, a display device and a manufacturing method thereof are provided to use an electrode of the display device as a polarizing panel, thereby removing the polarizing panel arranged at the rear of the display panel and simplifying the processes. A gate line is formed on a substrate. A gate insulating layer is formed on the substrate to cover the gate line. A data line is crossed with the gate line and includes a source electrode. A drain electrode(175) is located oppositely to the source electrode. Plural line patterns(193) are electrically connected with the drain electrode and polarizes the incidence light beam. The distance of line patterns is below 200 nanometer. The width of the line pattern is below 100 nanometer. An alignment layer is formed on the electrode. The electrode includes at least one among Al, Ag, Cu, Mo, Cr, Ta, Ti or alloy thereof. The gate insulating layer includes an opened pixel area.
摘要翻译：提供显示面板，显示装置及其制造方法以使用显示装置的电极作为偏振面板，从而去除布置在显示面板后部的偏振片，并简化了工艺。在基板上形成栅极线。栅极绝缘层形成在衬底上以覆盖栅极线。数据线与栅极线交叉并且包括源电极。漏电极（175）位于与源电极相对的位置。多个线图案（193）与漏电极电连接并使入射光束偏振。线条的距离低于200纳米。线图案的宽度低于100纳米。在电极上形成取向层。电极包括Al，Ag，Cu，Mo，Cr，Ta，Ti或其合金中的至少一种。栅极绝缘层包括开放的像素区域。

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