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    • 8. 发明公开
    • 이미지 센서
    • 图像传感器
    • KR1020110050351A
    • 2011-05-13
    • KR1020100083681
    • 2010-08-27
    • 삼성전자주식회사
    • 구준모이하라히사노리박윤동오훈상최상준배형진윤태응홍성권
    • H01L27/146
    • H01L27/14612H01L27/1461H01L27/14689
    • PURPOSE: An image sensor is provided to improve the transfer speed of signal charge by forming a transfer transistor to have a surface channel, a side channel, and a buried channel. CONSTITUTION: In an image sensor, a deep well is provided in a semiconductor substrate(10). An element isolation region(15) includes an element isolation film made of an insulating material and also includes an element isolation impurity region. A photoelectric conversion unit is provided in the active region of the semiconductor substrate. A first photoelectric conversion unit(23) includes a first N-type impurity area(22). A second photoelectric conversion unit includes a second N-type impurity region(25).
    • 目的:提供一种图像传感器,通过形成具有表面通道,侧通道和埋入通道的转移晶体管来提高信号电荷的传输速度。 构成:在图像传感器中,在半导体衬底(10)中提供深阱。 元件隔离区域(15)包括由绝缘材料制成的元件隔离膜,并且还包括元件隔离杂质区域。 在半导体基板的有源区域设置有光电转换单元。 第一光电转换单元(23)包括第一N型杂质区(22)。 第二光电转换单元包括第二N型杂质区(25)。