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    • 8. 发明公开
    • 수직 나노튜브를 이용한 비휘발성 메모리 소자
    • 使用垂直纳米管的非易失性存储器件
    • KR1020040043043A
    • 2004-05-22
    • KR1020020071041
    • 2002-11-15
    • 삼성전자주식회사
    • 최원봉이조원강호규김정우
    • H01L21/8247B82Y10/00
    • G11C13/025B82Y10/00G11C16/0466G11C2213/16G11C2213/17H01L29/02H01L29/792H01L29/7923H01L29/7926H01L51/0048H01L51/0512Y10S977/943
    • PURPOSE: A non-volatile memory device using a vertical nano tube is provided to be capable of preventing the increase of resistance due to miniaturization and reducing malfunction. CONSTITUTION: A non-volatile memory device using a vertical nano tube is provided with a substrate(11) having a source region(13), a nano tube column array(10) vertically grown from one end portion of the source region for being used as an electron mobility channel, and a memory cell(19) deposited at both sidewalls of the nano tube column array. The non-volatile memory device further includes a control gate(17) formed at the lateral portion of the memory cell, and a drain region(15) connected with the nano tube column array. Preferably, the memory cell includes the first insulating layer(19a), an electron storing layer(19b), and the second insulating layer(19c).
    • 目的:提供使用立式纳米管的非易失性存储器件,以防止由于小型化引起的电阻增加并减少故障。 构成:使用立式纳米管的非易失性存储装置设置有具有源极区域(13)的衬底(11),从源极区域的一个端部垂直生长的纳米管柱阵列(10),用于被使用 作为电子迁移率通道,以及沉积在纳米管柱阵列的两个侧壁处的存储单元(19)。 非易失性存储器件还包括形成在存储单元的侧面部分的控制栅极(17)和与纳米管柱阵列连接的漏极区域(15)。 优选地,存储单元包括第一绝缘层(19a),电子存储层(19b)和第二绝缘层(19c)。