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    • 3. 发明公开
    • 자기 센서 및 그 제조 방법
    • 磁传感器及其制造方法
    • KR1020140111193A
    • 2014-09-18
    • KR1020130025230
    • 2013-03-08
    • 매그나칩 반도체 유한회사
    • 김관수김동준류승한안희백정종열김경수신강섭
    • G01R33/07G01D5/12
    • H01L43/04G01R33/0011G01R33/0052G01R33/07H01L43/065H01L43/14
    • The present invention relates to a magnetic sensor and a manufacturing method thereof, capable of detecting the direction of a magnetic field by having a plurality of hole elements and a magnetic procedure plate. The present invention comprises: a semiconductor substrate installed with the hole elements; a protective layer formed on the semiconductor substrate; a base layer formed on the protective layer; and the magnetic procedure plate formed on the base layer, wherein the base layer has a bent plane on the surface. The present invention can simplify a manufacturing process by providing the magnetic procedure plate having a bent form and can improve sensor characteristics by lowering the stress of the hole element to a certain uniformity.
    • 磁传感器及其制造方法技术领域本发明涉及一种能够通过具有多个孔元件和磁性程序板来检测磁场方向的磁传感器及其制造方法。 本发明包括:安装有孔元件的半导体衬底; 形成在半导体衬底上的保护层; 形成在保护层上的基层; 以及形成在所述基底层上的所述磁性过程板,其中所述基底层在所述表面上具有弯曲平面。 本发明可以通过提供具有弯曲形状的磁性过程板来简化制造过程,并且可以通过将孔元件的应力降低到一定的均匀性来提高传感器特性。