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    • 7. 发明公开
    • 멤브레인 구조 소자 및 그 제조 방법
    • 膜结构元件及其制造方法
    • KR1020080097243A
    • 2008-11-04
    • KR1020087023570
    • 2007-03-28
    • 가부시키가이샤 고베 세이코쇼
    • 히라노다까유끼가와까미노부유끼간나까마사또
    • H01L21/316H01L31/101
    • G01F1/692B81B2201/0278B81B2203/0127B81C1/00666B81C2201/0169B81C2201/0178C23C16/402C23C16/56Y10T428/24488Y10T428/24612
    • A membrane structure element which can be easily manufactured, has excellent insulating characteristics and a high quality is provided. A method for manufacturing such membrane structure element is also provided. The membrane structure element is provided with a membrane formed of a silicon oxide film, and a substrate for supporting the membrane in a hollow status by supporting a part of the periphery of the membrane. The method for manufacturing such membrane is provided with a film forming step of forming a heat-shrinkable silicon oxide film (13) on the surface side of a silicon substrate (2) by plasma CVD method; a heat treatment step of performing heat treatment for making the silicon oxide film (13) formed on the substrate (1) shrink with heat; and a removing step of removing a part of the substrate (2) so that a corresponding part of the silicon oxide film (13) to the membrane is supported as a membrane to the substrate (2) in the hollow status, and forming a recessed section (4).
    • 提供了可以容易地制造的膜结构元件,具有优异的绝缘特性和高质量。 还提供了一种制造这种膜结构元件的方法。 膜结构元件设置有由氧化硅膜形成的膜,以及用于通过支撑膜的周边的一部分来将膜支撑在中空状态的基板。 该膜的制造方法具有通过等离子体CVD法在硅衬底(2)的表面侧形成热收缩性氧化硅膜(13)的成膜工序; 进行热处理的热处理步骤使得形成在基板(1)上的氧化硅膜(13)热收缩; 以及去除所述基板(2)的一部分以使得所述膜的所述氧化硅膜(13)的相应部分以中空状态作为膜被支撑到所述基板(2)的去除步骤,并且形成凹陷 第(4)节。
    • 10. 发明公开
    • 온도 측정 부재, 온도 측정 장치 및 온도 측정 방법
    • 温度测量部件,温度测量装置和温度测量方法
    • KR1020090005988A
    • 2009-01-14
    • KR1020080065919
    • 2008-07-08
    • 가부시키가이샤 고베 세이코쇼
    • 미즈노마사오히라노다까유끼도미히사가쯔후미
    • G01K7/00H01L21/66
    • G01K3/14G01K11/06G01K2213/00H01L21/67248G01K7/02G01K2219/00
    • A temperature measurement member, a temperature measuring apparatus and a temperature measuring method are provided to remove the need of external wiring and reduce the risk of substrate contamination due to dust or foreign materials. A temperature measuring apparatus comprises a substrate in which a plurality of metallic films are attached, a planar density measuring unit for measuring the planar density of concave/convex parts generated on the substrate, a memory unit(8) in which data indicating the relation between the planar density of concave/convex parts and the highest arrival temperature are stored, and a temperature production unit(9) for producing the highest arrival temperature of the atmosphere. The planar density measuring unit includes a surface data collecting part receiving a surface image, a conversion unit converting the image signal into digital signal, and a number production unit(7) converting the digital signal into the number per unit area.
    • 提供温度测量部件,温度测量装置和温度测量方法以消除对外部布线的需要,并降低由于灰尘或异物引起的基板污染的风险。 一种温度测量装置,包括其中附着有多个金属膜的基板,用于测量在基板上产生的凹凸部的平面密度的平面密度测量单元,存储单元(8),其中指示 存储凹凸部的平面密度和最高到达温度,以及用于产生气氛的最高到达温度的温度生成部(9)。 平面密度测量单元包括接收表面图像的表面数据收集部分,将图像信号转换为数字信号的转换单元,以及将数字信号转换为单位面积数的数字生成单元。