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    • 4. 发明公开
    • 박막 트랜지스터 기판 및 표시 디바이스
    • 薄膜晶体管基板和显示器件
    • KR1020110095825A
    • 2011-08-25
    • KR1020110014477
    • 2011-02-18
    • 가부시키가이샤 고베 세이코쇼
    • 모리따신야고또오히로시미끼아야도미히사가쯔후미데라오야스아끼
    • H01L29/786
    • H01L27/124H01L29/458
    • PURPOSE: A thin film transistor and a display device are provided to suppress the diffusion of a Cu element to a semiconductor layer by contacting a Cu alloy layer with the semiconductor layer of the thin film transistor through an oxygen containing layer. CONSTITUTION: A thin film transistor substrate includes a semiconductor layer(33) of a thin film transistor and a Cu alloy layer(28b,29b). An oxygen containing layer is formed between the semiconductor layer and the Cu alloy layer. The oxygen of the oxygen containing layer is combined with Si of the semiconductor layer of the thin film transistor. The Cu alloy layer includes one selected from a group of Mn, Ni, Zn, and Mg between 2 and 20 atom%. The Cu alloy layer is contacted with the semiconductor layer of the tin film transistor through the oxygen containing layer.
    • 目的:提供薄膜晶体管和显示装置,通过使含氧层与Cu合金层与薄膜晶体管的半导体层接触来抑制Cu元素向半导体层的扩散。 构成:薄膜晶体管衬底包括薄膜晶体管的半导体层(33)和Cu合金层(28b,29b)。 在半导体层和Cu合金层之间形成含氧层。 含氧层的氧与薄膜晶体管的半导体层的Si结合。 Cu合金层包括选自2至20原子%的Mn,Ni,Zn和Mg中的一种。 Cu合金层通过含氧层与锡膜晶体管的半导体层接触。