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1. 发明公开

KR20120040070A Apparatus for fabricating flexible liquid crystal display 有权
标题翻译：用于制造柔性液晶显示器的装置
公开(公告)号：KR20120040070A
公开(公告)日：2012-04-26
申请号：KR20100101596
申请日：2010-10-18
申请人： AP SYSTEMS INC
发明人： LEE JIN HWAN
IPC分类号： G02F1/13
CPC分类号： G02F1/1303 , G02F1/133305 , G02F2001/133354 , H01L21/67703 , H01L21/68714
摘要： PURPOSE: A flexible liquid crystal display manufacturing device is provided to prevent contamination in a dispensing unit due to an operation of a gate part. CONSTITUTION: An upper chuck(375) fixes a sheet type upper plate with a first width of a first flexible board. A lower chuck(385) fixes a lower plate made of a web type second flexible board(200) with a second width wider than the first width. A vacuum chamber cover(401) is coupled with the upper chuck. The vacuum chamber cover moves together with the upper chuck. The lower plate defines a vacuum area of a vacuum chamber. An upper transfer unit(376) moves the vacuum chamber cover and the upper chuck coupled with the cover to couple an upper plate with the lower plate.
摘要翻译：目的：提供一种灵活的液晶显示器制造装置，以防止由于门部件的操作引起的分配单元中的污染。构成：上卡盘（375）固定具有第一柔性板的第一宽度的片状上板。下卡盘（385）将具有比第一宽度宽的第二宽度的由腹板式第二柔性板（200）制成的下板固定。真空室盖（401）与上卡盘联接。真空室盖与上卡盘一起移动。下板限定真空室的真空区域。上转印单元（376）移动真空室盖和与盖接合的上卡盘，以将上板与下板耦合。

2. 发明公开

KR20120007803A Sleeve unit and scanning electron microscope using the same 有权
标题翻译： SLEEVE UNIT和扫描电子显微镜使用相同
公开(公告)号：KR20120007803A
公开(公告)日：2012-01-25
申请号：KR20100068510
申请日：2010-07-15
申请人： AP SYSTEMS INC
发明人： KANG WON GU , AN JAE SHIN , LEE DAE JONG
IPC分类号： H01J37/28
摘要： PURPOSE: A sleeve unit and a scan electronic microscope are provided to prevent a trouble by forming a vacuum path and a small hole for a gas flow. CONSTITUTION: A sleeve body(310) has a pipe shape. An aperture(320) is included in the sleeve body and partitions the inner space of the sleeve body. A small hole(321) for selectively transmitting an electron beam is formed in the aperture. A vacuum path is formed on the assembled part of the sleeve body and the aperture.
摘要翻译：目的：提供套筒单元和扫描电子显微镜，以通过形成用于气流的真空路径和小孔来防止故障。构成：套筒体（310）具有管状。套筒主体中包括孔（320），并且分隔套筒主体的内部空间。在孔中形成用于选择性地透射电子束的小孔（321）。在套筒主体和孔的组装部分上形成真空路径。

3. 发明公开

KR20200133949A 기판 가접용 필름 하프컷 장치 및 그 제어방법 审中-公开
公开(公告)号：KR20200133949A
公开(公告)日：2020-12-01
申请号：KR20190059278
申请日：2019-05-21
申请人： AP SYSTEMS INC
发明人： PARK YOUNGKYU , LEE SEOKJEONG , AHN KIYONG
IPC分类号： H01L21/67 , H01L21/66 , H01L21/683 , H01L21/76 , H01L21/78
摘要： 본발명은자동으로하프커팅되는필름의두께를추정가능하게제어할수 있어두께가상이한여러종류의필름에대응할수 있도록개선된기판가접용필름하프컷장치및 그제어방법에관한것이다. 본발명은프레임과; 상기프레임에가로질러승강가능하게설치되어기판가접용필름을원하는두께만큼만하프커팅하는하프컷나이프와; 상기하프컷나이프의상부의상기프레임에설치되어상기하프컷나이프를승강시키는나이프구동부와; 상기하프컷나이프의하부에설치되어상기하프컷나이프에의해하프커팅되는하프컷필름을안내하는커팅다이와; 상기커팅다이의좌우가장자리일측에설치되어상기하프컷나이프와상기커팅다이사이의커팅갭을측정하는갭센서와; 상기커팅다이의하부의상기프레임에설치되어상기커팅다이를승강시키는다이구동부와; 상기필름의두께가입력되고, 상기다이구동부의편차를제어하는제어부;를포함하는기판가접용필름하프컷장치를제공한다.

4. 发明公开

KR20180021968A 공기 집진 장치 审中-公开
标题翻译：喷气式集尘器
公开(公告)号：KR20180021968A
公开(公告)日：2018-03-06
申请号：KR20160106382
申请日：2016-08-22
申请人： AP SYSTEMS INC
发明人： SHIN HEUNG HYUN , LEE DONG JU
IPC分类号： B23K26/142 , B23K26/16 , B23K101/36 , H01L21/268 , H01L51/00
摘要： 본발명은, 뒤집혀진용기의천장에서공기인입홀을한정하는공기포집하우징, 그리고공기포집하우징과연통하는공기배출관을갖는공기수거후드; 공기포집하우징으로덮이며, 공기인입홀의주변에서공기포집하우징에고정되는와이퍼분리통; 와이퍼분리통으로둘러싸이는공기조사와이퍼; 와이퍼분리통 주변에위치되어공기포집하우징의테두리에고정되는공기추진와이퍼를포함하고, 공기조사와이퍼와공기추진와이퍼는서로에대해반대방향으로공기흐름을생성시키는것을특징으로한다.
摘要翻译：本发明中，其中容器的顶部限定了空气入口孔翻转二进制气收集壳体，以及具有空气通过空气排放管收集壳体确实空气收集罩; 1。一种擦拭器分离盖，其覆盖有集气壳体并固定在进气孔周围的集气壳体上; 由擦拭器分离器包围的空气照射刮水器; 刮水器分隔圆筒围绕定位并包括驱动刮板的空气被固定在空气收集壳体，空气和空气照射刮水器驱动擦拭器的边界的特征在于产生在相反的方向上彼此的空气流。

5. 发明公开

KR20120002046A Device of removing film for laser induced thermal imaging 有权
标题翻译：用于激光诱导的热成像的去除膜的装置
公开(公告)号：KR20120002046A
公开(公告)日：2012-01-05
申请号：KR20100062729
申请日：2010-06-30
申请人： AP SYSTEMS INC
发明人： YANG SANG HEE , KIM SANG OH , JANG SUNG WOOK , KIM HWAN
IPC分类号： B41M5/46 , B41M5/26
摘要： PURPOSE: A laser heat transcribing device for removing a film is provided to stably separate the film from a substrate by spraying air through successively driving spraying units. CONSTITUTION: A laser heat transcribing device(1) for removing a film comprises the following: a substrate stage(10) for mounting substrates; a roller unit(20) successively pressurizing donor film units mounted on the substrate stage; and spraying units spraying air in between the substrates and the donor film units, installed on grooves of the substrate stage. The donor film units includes films(13) reacting to laser light, and a tray(14) combining with the edges of the films.
摘要翻译：目的：提供一种用于去除胶片的激光加热转印装置，用于通过连续驱动的喷涂单元喷射空气来将膜与基板稳定分离。构成：用于除去膜的激光加热转印装置（1）包括：用于安装基板的基板台（10）; 滚筒单元（20），其连续地加压安装在基板台上的供体膜单元; 以及喷涂单元，其在基板和施主膜单元之间喷涂空气，安装在基板台的凹槽上。供体膜单元包括与激光反应的膜（13）和与膜的边缘结合的托盘（14）。

6. 发明公开

KR20100120335A Position measuring apparatus for wafer supply 有权
标题翻译：位置测量装置
公开(公告)号：KR20100120335A
公开(公告)日：2010-11-16
申请号：KR20090039101
申请日：2009-05-06
申请人： AP SYSTEMS INC
发明人： LEE SEOK JEONG , JANG SUNG WOOK , LEE JIN HWAN
IPC分类号： H01L21/68 , H01L21/677
CPC分类号： H01L21/681 , H01L21/68714 , H01L21/68764 , H01L21/68771
摘要： PURPOSE: A position measuring apparatus for supplying a wafer is provided to measure the accurate position of a susceptor inside a process chamber under high temperature without an additional protective unit. CONSTITUTION: A susceptor(112) is installed inside a processing chamber(110). A mounting groove(112a) is formed on the top of the susceptor. A wafer supply unit(120) has dual arms(123,124) which are parallel with each other in the processing chamber. A driving unit(125) driving the dual arms is installed in lower part of the processing chamber. An inlet(122a) receiving the wafer from the outside is installed on the side of the processing chamber.
摘要翻译：目的：提供一种用于供应晶片的位置测量装置，用于在高温下测量基座在处理室内的准确位置，而无需附加的保护单元。构成：基座（112）安装在处理室（110）内。在基座的顶部形成安装槽（112a）。晶片供给单元（120）具有在处理室中彼此平行的双臂（123,124）。驱动双臂的驱动单元（125）安装在处理室的下部。从处理室的一侧安装从外部接收晶片的入口（122a）。

7. 发明公开

KR20200139508A 필름 부착장치 및 필름 부착방법 审中-公开
公开(公告)号：KR20200139508A
公开(公告)日：2020-12-14
申请号：KR20190066103
申请日：2019-06-04
申请人： AP SYSTEMS INC
发明人： CHO JEA JUN , LIM HYUNG MUN , KIM HYUN MIN
IPC分类号： B32B37/00 , B32B37/10 , B32B38/18 , B32B41/00
摘要： 본발명은필름부착장치및 필름부착방법에관한것으로서, 보다상세하게는가요성의정전척시트를이용하는필름부착장치및 필름부착방법에관한것이다. 본발명의일실시예에따른필름부착장치는정전기력으로필름을고정하는가요성의정전척시트; 상기필름이부착되는부착대상물을지지하여고정하는스테이지부; 및상기스테이지부를향해상기정전척시트에가압력을제공하여, 상기필름을상기부착대상물에부착시키는가압롤러부;를포함할수 있다.

8. 发明公开

KR20180042970A 레이저 처리장치 및 처리방법 审中-公开
公开(公告)号：KR20180042970A
公开(公告)日：2018-04-27
申请号：KR20160135629
申请日：2016-10-19
申请人： AP SYSTEMS INC
发明人： HAM SANG GEUN , SEON SANG PIL , JI HO JIN , CHO MIN YOUNG
IPC分类号： H01L21/324 , H01L21/02 , H01L21/268 , H01L21/683
摘要： 본발명은, 기판을처리가능한공간이내부에마련되는챔버, 레이저광을발진및 가공하여챔버의내부로조사가능하게형성되는레이저부, 레이저광의조사경로에기판을위치시킬수 있도록챔버의내부에장착되는스테이지부, 에너지밀도기준값을이용하여레이저부및 스테이지부의작동을제어하는제어부,를포함하고, 에너지밀도기준값을이용하여라인빔 조사조건을설정하고, 라인빔 조사조건을이용하여기판을이동시키며기판에라인빔을조사함에따라, 기판이손상되는것을억제또는방지할수 있는레이저처리장치및 방법이제시된다.

9. 发明公开

KR20120076765A Sensing module and sensing using the same 有权
标题翻译：感应模块和使用相同的感应器
公开(公告)号：KR20120076765A
公开(公告)日：2012-07-10
申请号：KR20100138464
申请日：2010-12-30
申请人： AP SYSTEMS INC
发明人： LIM SUN CHUL , CHO HYUN GU , CHOI JEONG HYEONG , CHOI TAK KYU
IPC分类号： G02F1/13 , G01B11/00
CPC分类号： G02F1/1341 , B41J2/175 , G01B11/0658
摘要： PURPOSE: A sensing module and a sensing method using the same are provided to easily monitor a process of dropping raw materials. CONSTITUTION: A light emitting member(512) emits light. A plurality of light receiving members(513) are arranged on the same side as the light emitting member. The light receiving members receive light emitted from the light emitting member. A reflecting member(520) faces the light emitting member and the light receiving members. The reflecting member reflects the light emitted from the light emitting member.
摘要翻译：目的：提供一种感测模块和使用该感测模块的感测方法，以便于轻松监控原料丢弃过程。构成：发光构件（512）发光。多个光接收元件（513）被布置在与发光元件相同的一侧。光接收构件接收从发光构件发射的光。反射构件（520）面向发光构件和光接收构件。反射构件反射从发光构件发射的光。

10. 发明公开

KR20120067036A Flatness level inspection apparatus and method for inspecting measuring method using the same 有权
标题翻译：平坦度检测装置及其检测方法
公开(公告)号：KR20120067036A
公开(公告)日：2012-06-25
申请号：KR20100128428
申请日：2010-12-15
申请人： AP SYSTEMS INC
发明人： KANG WON GU , LEE JIN HWAN
IPC分类号： G01B21/30 , G01B13/22
摘要： PURPOSE: A device and method for inspecting the flatness are provided to spray fluid on a surface of an inspection object and senses pressure changed according to a spaced distance between the inspection object and a nozzle, thereby inspecting the flatness of the inspection object. CONSTITUTION: A device for inspecting the flatness comprises a chuck(200), a measuring unit(300), a moving up and down module(500), a moving module(600), and a calculation unit. The chuck supports and fixes an inspection object. The measuring unit comprises a nozzle spraying fluid on a surface of the inspection object and senses a change of spraying pressure of the fluid sprayed from the nozzle according to a spaced distance between the nozzle and inspection object and converts the change into a voltage value. The moving up and down module moves up and down the nozzle. The chuck and nozzle are relatively-horizontally moved. The calculation unit calculates an actual measuring voltage value as a surface height value of the inspection object while scanning the surface of the inspecting object by using the converted voltage value and decides the flatness by relatively comparing the calculated height values of the surface of the inspection object.
摘要翻译：目的：提供一种用于检查平面度的装置和方法，用于在检查对象的表面上喷射流体，并感测根据检查对象和喷嘴之间的距离而改变的压力，从而检查检查对象的平坦度。构成：用于检查平坦度的装置包括卡盘（200），测量单元（300），上下移动模块（500），移动模块（600）和计算单元。卡盘支撑并固定检查对象。测量单元包括在检查对象的表面上喷嘴喷射流体，并且根据喷嘴和检查对象之间的间隔来感测从喷嘴喷射的流体的喷射压力的变化，并将该变化转换为电压值。上下移动模块上下移动喷嘴。卡盘和喷嘴相对水平移动。计算单元通过使用转换后的电压值来扫描被检查体的表面，并将检测对象的表面的高度值相对比较来决定平坦度。

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