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    • 73. 发明公开
    • 스크라이브 라인 상에 뱅크를 구비하는 반도체 웨이퍼
    • 半导体晶圆及其制造方法
    • KR1020010090574A
    • 2001-10-18
    • KR1020010015761
    • 2001-03-26
    • 르네사스 일렉트로닉스 가부시키가이샤
    • 후지이모유루
    • H01L21/304
    • H01L23/3171H01L21/78H01L2224/02381H01L2224/05001H01L2224/05027H01L2224/05552H01L2224/05556H01L2224/05571H01L2224/16H01L2924/01078
    • PURPOSE: To prevent grinding chips, which are produced during when the back is ground, from polluting an electrode pad in a back-grinding step for adsorbing a water surface, by using a simple method such as vacuum suction. CONSTITUTION: The method of manufacturing a semiconductor wafer and the semiconductor wafer manufactured by the method are characterized to include as a step for manufacturing a semiconductor wafer, in the back grinding step, the surface of a polyimide film formed wafer 2 is sucked after a polyimide film forming step for removing a polyimide film 8 on large parts of scrub lines 7 and a region between the scrub lines 7 and electrode pads 5 being adjacent to the scrub lines 7. In this step, the pattern of the polyimide film 8 in the polyimide film forming step includes banks 17b, by which the pattern of the polyimide film 8 in the polymide film forming step divides the scrub lines 7 near the intersections of the scrub lines 7 provided in a lattice form, so as to prevent the entry of grinding chips 14 generated, when the back is ground.
    • 目的:为了防止在背面研磨时产生的研磨屑,通过使用真空抽吸等简单方法,在用于吸附水面的背面研磨工序中污染电极焊盘。 构成:通过该方法制造半导体晶片和半导体晶片的方法的特征在于,作为制造半导体晶片的步骤,在背面研磨工序中,将聚酰亚胺膜形成晶片2的表面在聚酰亚胺 在擦洗线7的大部分上除去聚酰亚胺膜8的膜形成步骤以及与擦洗线7相邻的擦洗线7和电极焊盘5之间的区域。在该步骤中,聚酰亚胺膜8在聚酰亚胺 膜形成步骤包括堤17b,聚酰亚胺膜形成步骤中的聚酰亚胺膜8的图案在格栅形式的擦洗线7的交叉点附近划分擦洗线7,以防止磨屑 14产生,当背面被磨碎。
    • 76. 发明公开
    • 반도체 소자의 패드 형성방법
    • 用于形成半导体器件的焊盘的方法
    • KR1020010053893A
    • 2001-07-02
    • KR1019990054447
    • 1999-12-02
    • 에스케이하이닉스 주식회사
    • 송기철
    • H01L21/3213
    • H01L24/05H01L2224/02166H01L2224/05556
    • PURPOSE: A method for forming a pad of a semiconductor device is provided to prevent damage or peeling off of interlayer dielectric layers underneath the pad owing to an external wire bonding onto the pad. CONSTITUTION: The method includes forming metal layers(23,25) for interconnection extended under the pad(27). In the method, after an oxide layer(22) is formed on a semiconductor substrate(21), the first metal layer(23) is formed thereon and etched to form the first interconnection layer. Next, the first interlayer dielectric layer(24) is formed thereon and etched to expose a portion of the first metal layer(23). The second metal layer(25) is then formed over a resultant structure and etched to form the second interconnection layer. Next, the second interlayer dielectric layer(26) is formed on the first interlayer dielectric layer(24) and the second metal layer(25), and then etched to expose a portion of the second metal layer(25). Thereafter, a metal layer for the pad(27) is formed over a resultant structure and etched to form the pad(27). Next, a passivation layer(28) is formed thereon and etched to expose the pad(27). The first and second metal layers(23,25) under the pad(27) not only support the pad(27) but also provide electrical connection between the interconnection layers and the pad(27).
    • 目的:提供一种用于形成半导体器件的焊盘的方法,以防止由于焊盘上的外部引线接合而在焊盘下面的层间电介质层的损坏或剥离。 构成:该方法包括形成用于在垫(27)下延伸的互连的金属层(23,25)。 在该方法中,在半导体衬底(21)上形成氧化物层(22)之后,在其上形成第一金属层(23)并形成第一互连层。 接下来,在其上形成第一层间介质层(24)并进行蚀刻以暴露第一金属层(23)的一部分。 然后在所得结构上形成第二金属层(25)并进行蚀刻以形成第二互连层。 接下来,在第一层间电介质层(24)和第二金属层(25)上形成第二层间电介质层(26),然后蚀刻以暴露第二金属层(25)的一部分。 此后,在所得结构上形成用于焊盘(27)的金属层,并蚀刻以形成焊盘(27)。 接下来,在其上形成钝化层(28)并进行蚀刻以露出焊盘(27)。 衬垫(27)下面的第一和第二金属层(23,25)不仅支撑焊盘(27),而且还提供互连层和焊盘(27)之间的电连接。
    • 78. 发明授权
    • 다층패드를구비한반도체소자및그제조방법
    • 空值
    • KR100267105B1
    • 2000-11-01
    • KR1019970066918
    • 1997-12-09
    • 삼성전자주식회사
    • 김명성이승록
    • H01L21/28
    • H01L24/05H01L24/03H01L2224/02166H01L2224/0401H01L2224/05093H01L2224/05095H01L2224/05096H01L2224/05556H01L2924/00014H01L2924/01004H01L2924/01005H01L2924/01006H01L2924/01013H01L2924/01022H01L2924/01023H01L2924/01029H01L2924/01033H01L2924/0105H01L2924/01074H01L2924/01079H01L2924/01082H01L2924/04941H01L2924/14H01L2924/19041
    • PURPOSE: A semiconductor device having a multi-layer pad is provided to prevent crack of an interlayer dielectric caused by a probing upon a wire bonding or evaluation of an electrical characteristic by changing the pad structure of the semiconductor device having a multi-layer pad. CONSTITUTION: A semiconductor device includes the first interlayer dielectric(122) on a semiconductor substrate(120). The first conductive pad(124) is formed on the first interlayer dielectric(122) and is located in a length direction along the outer portion of one side of a pad window region(140). The second interlayer dielectric(128) is formed on the resulting surface and has the first via hole(126) through which a portion of the first conductive pad is exposed. The first conductive plug(127) is formed within the first via hole. The second conductive pad(130) electrically connected to the first conductive plug is formed on the second interlayer dielectric(128) on an upper side of the first conductive pad. The third interlayer dielectric(134) is formed on the resulting surface and has the second via hole(132) through which a portion of the second conductive pad is exposed. The second conductive plug(133) is formed within the second via hole. The third conductive pad(136) electrically connected to the second conductive plug is formed on the third interlayer dielectric and are formed to include the pad window region and its peripheral regions. A protection film(138) through which the surface of the third conductive pad in the pad window region is exposed is formed on the resulting surface.
    • 目的:提供具有多层焊盘的半导体器件,以通过改变具有多层焊盘的半导体器件的焊盘结构来防止由引线接合时的探测引起的层间电介质的裂纹或电特性的评估。 构成:半导体器件包括在半导体衬底(120)上的第一层间电介质(122)。 第一导电焊盘(124)形成在第一层间电介质(122)上,并且位于沿着垫窗区域(140)的一侧的外部的长度方向上。 第二层间电介质(128)形成在所得表面上,并且具有第一通孔(126),第一导电焊盘的一部分通过该第一通孔露出。 第一导电插塞(127)形成在第一通孔内。 电连接到第一导电插塞的第二导电焊盘(130)形成在第一导电焊盘的上侧上的第二层间电介质(128)上。 第三层间电介质(134)形成在所得表面上,并且具有第二通孔(132),第二导电焊盘的一部分通过该第二通孔露出。 第二导电插塞(133)形成在第二通孔内。 电连接到第二导电插塞的第三导电焊盘(136)形成在第三层间电介质上,并且形成为包括焊盘窗区域及其周边区域。 在所得到的表面上形成保护膜(138),衬垫窗区域中的第三导电焊盘的表面露出。