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    • 31. 发明公开
    • 전해 도금 장치 및 방법
    • 电解涂层的装置和方法
    • KR1020080110658A
    • 2008-12-18
    • KR1020087026807
    • 2007-04-05
    • 바스프 에스이
    • 로흐트만레네카크춘죄르겐슈나이더노르베르트피스터죄르겐폴게르트바그너노르베르트
    • C25D17/02C25D17/10
    • C25D17/12C25D7/0657C25D17/005C25D17/06C25D17/28
    • The invention relates to a device for electroplating at least one electrically conductive substrate or a structured or electrically conductive surface covering the whole area of a non-conductive substrate. Said device comprises at least one bath, an anode and a cathode. The bath contains an electrolyte solution, which comprises at least one metal salt and from which metal ions are deposited on electrically conductive surfaces of the substrate to form a metal layer, as the cathode is brought into contact with the surface of the substrate to be coated and said substrate is conveyed through the bath. The cathode comprises at least two discs (2, 4, 10) that are rotatably mounted on a respective shaft (1, 5, 14), said discs (2, 4, 10) intermeshing. The invention also relates to a method for electroplating at least one substrate, said method being carried out in a device according to the invention. The invention further relates to the use of said device for electroplating electrically conductive structures situated on an electrically non-conductive support. ® KIPO & WIPO 2009
    • 本发明涉及用于电镀至少一个导电衬底或覆盖非导电衬底的整个区域的结构化或导电表面的器件。 所述装置包括至少一个浴,阳极和阴极。 浴中含有电解质溶液,其包含至少一种金属盐,并且金属离子沉积在基板的导电表面上以形成金属层,因为阴极与待涂覆的基底的表面接触 并且所述衬底被输送通过所述浴。 阴极包括至少两个可旋转地安装在相应的轴(1,5,14)上的盘(2,4,10),所述盘(2,4,10)相互啮合。 本发明还涉及一种用于电镀至少一个基底的方法,所述方法在根据本发明的装置中进行。 本发明还涉及所述装置用于电镀位于不导电支撑件上的导电结构的用途。 ®KIPO&WIPO 2009
    • 34. 发明公开
    • 웨이퍼 도금방법
    • 抛光方法
    • KR1020070119502A
    • 2007-12-20
    • KR1020070055348
    • 2007-06-07
    • 니혼 엘렉트로플레이팅 엔지니어스 가부시키가이샤
    • 우치우미유지
    • C25D7/12
    • C25D17/001C25D17/005C25D17/12H01L24/11H01L24/94H01L2224/1147H01L2224/13099H01L2224/742H01L2924/01005H01L2924/01006H01L2924/01013H01L2924/01018H01L2924/01022H01L2924/01033H01L2924/01074H01L2924/01077H01L2924/01078H01L2924/01079H01L2924/3025
    • A method of wafer plating is provided to make it possible to carry out plating with a uniform film thickness on the entire area of a plated surface even for a wafer with a large diameter by improving conventional wafer plating treatment techniques. In a method of wafer plating comprising disposing a wafer on an opening of a plating vessel, contacting an outer peripheral side of the wafer with a cathode electrode, supplying a plating solution, thereby causing the plating solution that has reached the wafer to flow in the outer peripheral direction of a wafer surface to be plated, and supplying a plating current by an anode electrode(A) disposed within the plating vessel oppositely to the wafer and the cathode electrode, thereby subjecting the wafer to a plating treatment, the method is characterized in that the anode electrode has a shape that is almost the same shape as the wafer surface to be plated, a plurality of peripheral edge current supplying parts(ar1-ar4) are installed on a peripheral edge of the anode electrode, and a central current supplying part(ac) is installed in the center of the anode electrode at the same time so as to adjust a peripheral edge plating current supplied from the peripheral edge current supplying parts and a central plating current supplied from the central current supplying part.
    • 提供了一种晶片电镀方法,通过改进传统的晶片电镀处理技术,可以在电镀表面的整个区域上均匀地进行具有大直径的晶片的电镀。 在晶片电镀方法中,包括在电镀槽的开口上设置晶片,使晶片的外周侧与阴极接触,供给电镀液,使已到达晶片的电镀液流入 要镀覆的晶片表面的外周方向,并且通过与晶片和阴极电极相对的布置在电镀槽内的阳极电极(A)提供电镀电流,从而对晶片进行电镀处理,该方法的特征在于 由于阳极电极具有与被电镀晶片表面几乎相同形状的形状,因此在阳极电极的周缘部安装有多个周边电流供给部(ar1〜ar4),中央电流 供电部件(ac)同时安装在阳极电极的中心,以便调节从周边电流供应p提供的周边电镀电流 并且从中央电流供应部分提供中央电镀电流。
    • 35. 发明公开
    • 금속박의 표면 처리 장치 및 방법
    • 金属表面处理方法与装置
    • KR1020070114577A
    • 2007-12-04
    • KR1020060048333
    • 2006-05-29
    • 주식회사 아스플로
    • 강두홍
    • C25D7/06
    • C25D7/0685C25D11/38C25D17/12C25D21/12
    • An apparatus and a method for surface treatment of a metal foil are provided to uniformly treat the surface of the metal foil by forming suction holes in a positive electrode such that the metal foil is closely adhered to the positive electrode and forming discharge ports in a negative electrode such that an electrolyte is supplied to the metal foil uniformly. An apparatus for surface treatment of a metal foil(207) comprises: an electrolytic cell(203) for containing an electrolyte(201); a pump(205) for discharging the electrolyte from the electrolytic cell; a positive electrode(209) for supporting a metal foil; a negative electrode(213) which is spaced from the positive electrode in a predetermined distance, and in which discharge ports(211) are formed; a manifold(215) for supplying the electrolyte discharged from the pump into the discharge ports; a rectifier(217) for supplying a power source to the positive electrode; a pressure gauge(219) for measuring a pressure of the electrolyte; a flow meter(221) for measuring a flow amount of the electrolyte; a temperature sensor(223) for measuring a temperature of the electrolyte; a flow control valve(225) for controlling a supply amount of the electrolyte; and a control box(227) for controlling power supply of the rectifier based on measurement values detected by the pressure gauge, the flow meter and the temperature sensor, controlling a temperature of the electrolyte in the electrolytic cell, and controlling the flow control valve.
    • 提供金属箔表面处理的装置和方法,以通过在正极中形成吸孔来均匀地处理金属箔的表面,使得金属箔紧密粘附到正极并形成负极的排出口 电极,使得电解质均匀地供应到金属箔。 一种用于表面处理金属箔(207)的设备包括:用于容纳电解质(201)的电解槽(203); 用于从电解池排出电解质的泵(205); 用于支撑金属箔的正极(209); 与正极隔开预定距离的负极(213),其中形成有排出口(211); 用于将从泵排出的电解质供给到排出口的歧管(215); 用于向正极供电的整流器(217); 用于测量电解质压力的压力计(219); 用于测量电解质的流量的流量计(221); 用于测量电解质温度的温度传感器(223); 用于控制电解液的供给量的流量控制阀(225) 以及控制箱(227),用于基于由压力计,流量计和温度传感器检测的测量值来控制整流器的电源,控制电解槽中的电解质的温度,并控制流量控制阀。
    • 36. 发明授权
    • 수도미터기의 도금 지그
    • JIG用于水表
    • KR100767282B1
    • 2007-10-17
    • KR1020070044801
    • 2007-05-09
    • 신우산업 (주)
    • 방병민
    • C25D17/06
    • C25D17/06C25D17/12
    • A plating jig of a water meter, which improves mechanical properties of the water meter including corrosion resistance, durability, lubricity and low friction coefficient by enabling nickel or chromium to be plated on both inner and outer sides of the water meter, is provided. A plating jig(J) of a water meter comprises a cathode frame(10) including a cathode vertical rod(11) vertically installed, a plurality of cathode horizontal rods(12) installed on the cathode vertical rod at certain intervals, and holders(13) formed on end portions of the cathode horizontal rods to hold the water meter, wherein the cathode vertical rod, the cathode horizontal rods and the holders are made of a conductive material to apply negative electric current to water meters held by the holders; and an anode frame(20) including an anode vertical rod(21), a plurality of anode horizontal rods(22) installed on the anode vertical rod at certain intervals, and electrode rods(23) installed on end portions of the anode horizontal rods, wherein the anode vertical rod, the anode horizontal rods and the electrode rods are made of a conductive material to apply positive electric current to the electrode rods.
    • 提供一种水表的电镀夹具,其通过使镍或铬能够在水表的内侧和外侧进行电镀来提高水表的机械性能,包括耐腐蚀性,耐久性,润滑性和低摩擦系数。 水表的电镀夹具(J)包括阴极框架(10),其包括垂直安装的阴极垂直杆(11),以一定间隔安装在阴极垂直杆上的多个阴极水平杆(12) 13)形成在阴极水平杆的端部上以保持水表,其中阴极垂直杆,阴极水平杆和保持器由导电材料制成,以对由保持器保持的水表施加负电流; 以及阳极框架(20),其包括阳极垂直杆(21),以一定间隔安装在阳极垂直杆上的多个阳极水平杆(22)和安装在阳极水平杆的端部上的电极棒(23) 其中阳极垂直杆,阳极水平杆和电极棒由导电材料制成,以向电极杆施加正电流。
    • 39. 实用新型
    • 다수의 타공이 형성된 일체형 도금용 전극
    • 电极电镀
    • KR200430552Y1
    • 2006-11-10
    • KR2020060022870
    • 2006-08-25
    • 주식회사 디오이에스
    • 정도원이병호
    • C25D17/10
    • C25D17/12
    • 본 고안은 다수의 타공이 형성된 일체형 도금용 전극에 관한 것으로, Ti(티타늄) 플레이트에 다수의 홀(hole)을 타공하여 지지대의 부착 없이도 그 형상을 유지하는 다수의 타공이 형성된 일체형 도금용 전극에 관한 것이다.
      Ti(티타늄) 플레이트(20)의 전후면에는 '-'형상을 기준으로 제1구획부(21)와 제2구획부(22)로 구획되어, 상기 각각의 제1,2구획부(21,22)에는 타공으로 다수의 홀(27)이 형성되고, 상기 '-'형상의 중앙부에는 터미널(25)을 용접으로 고정시킨다.
      따라서, 본 고안은 충분한 강도가 유지되는 Ti(티타늄) 플레이트에 다수의 홀(hole)을 타공하여 지지대의 부착 없이도 그 형상을 유지할 수 있으며, 상기 일체형의 도금용 전극 한 곳에만 터미널 부착에 따른 용접점이 발생하기 때문에 종래 다수의 용접점에서 발생되는 끊김 현상을 방지할 수 있어 내구성이 크게 향상되는 효과가 있다.
      타공, 도금용 전극, 홀, 터미널
    • 40. 发明公开
    • 부분 도금 장치 및 방법
    • 选择性涂层装置,包括防止不必要的镀层区域的镀层方法及其镀层方法
    • KR1020060114982A
    • 2006-11-08
    • KR1020050037231
    • 2005-05-03
    • 주식회사 엘에스
    • 김판석전상현
    • C25D5/02
    • C25D5/026C25D17/06C25D17/12
    • A partial plating device and a partial plating method capable of performing selective plating by spraying a plating solution only on a plating needed area of a material to be plated and injecting air into other area except the plating needed area are provided. As a device for plating a partial plating needed material(1) to be plated, a partial plating device comprises: a body part(20) in which a plating solution passage(30) connected to a plating solution supply means and an air passage(40) connected to an air injection means are formed in a way that outlets of the plating solution passage and the air passage are spaced from each other; an alignment means for arranging the material to be plated in such a manner that a target plating area of the material to be plated and a target non-plating area adjacent to the target plating area correspond to the plating solution passage and the air passage respectively; and an electrode(10) that comes in contact with the plating solution to supply a power source for electroplating.
    • 提供一种部分电镀装置和部分电镀方法,其能够仅通过将电镀液喷涂在待镀材料的电镀所需区域并将空气喷射到除电镀所需区域之外的其它区域中来进行选择性镀覆。 作为用于电镀部分电镀所需要的材料(1)的装置,部分电镀装置包括:主体部分(20),其中连接到电镀液供应装置的电镀液通道(30)和空气通道 连接到空气注入装置的方式形成为使得电镀液通道和空气通道的出口彼此间隔开的方式; 对准装置,用于将待镀材料的目标镀覆区域和与目标镀覆区域相邻的目标非电镀区域分别对应于电镀液通道和通风道的方式布置待镀材料; 以及与电镀液接触以供给电镀用电源的电极(10)。