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    • 25. 发明公开
    • 다중 채널 길이와 동일한 물리적 게이트 길이를 갖는 반도체 장치 및 이의 제조 방법
    • 具有相同孔径长度的多通道长度半导体及其制造方法
    • KR1020150126788A
    • 2015-11-13
    • KR1020150062607
    • 2015-05-04
    • 삼성전자주식회사
    • 로더마크에스.오브라도빅,보르나센굽타르윅
    • H01L29/78
    • H01L29/10H01L21/0257H01L21/823412H01L21/823418H01L21/823431H01L21/823456H01L27/0886H01L29/08H01L29/0847H01L29/1033H01L29/423H01L29/42376
    • 다중채널길이와동일한물리적게이트길이를갖는반도체장치및 이의제조방법을포함할수 있다. 상기반도체장치는, 제1 핀과, 상기제1 핀의상면및 측면상에형성되는제1 게이트전극구조체(rst gate electrode structure)와, 상기제1 게이트전극구조체의아래에위치하는제1 채널영역과, 상기제1 핀내에서상기제1 채널영역의일측에위치하는제1 소오스또는드레인영역을포함하되, 상기제1 게이트전극구조체는제1 게이트메탈과제1 측벽스페이서를포함하는제1 핀펫(nFET), 및제2 핀과, 상기제2 핀의상면및 측면상에형성되는제2 게이트전극구조체(second gate electrode structure)와, 상기제2 게이트전극구조체의아래에위치하는제2 채널영역과, 상기제2 핀내에서상기제2 채널영역의일측에위치하는제2 소오스또는드레인영역을포함하되, 상기제2 게이트전극구조체는제2 게이트메탈과제2 측벽스페이서를포함하는제2 핀펫을포함하되, 상기제1 핀펫과상기제2 핀펫은, 동일한반도체타입의장치이고, 상기제1 게이트전극구조체는, 제1 물리적게이트길이(Lgate1)로형성되고, 상기제2 게이트전극구조체는상기제1 물리적게이트길이(Lgate1)와동일한상기제2 물리적게이트길이(Lgate2)로형성되며, 상기제1 핀은제1 유효채널길이(Leff1)를갖고, 상기제2 핀은상기제1 유효채널길이(Leff1)와다른제2 유효채널길이(Leff2)를갖는다.
    • 本发明涉及具有与多通道长度相同的物理栅极长度的半导体器件及其制造方法。 半导体器件包括:第一鳍状物(nFET),其包括第一鳍片,第一栅极电极结构(第一栅电极结构),第一沟道区域和第一源极或漏极区域;以及第二鳍片FET,其包括第二鳍片 第二栅极电极结构,第二沟道区和第二源极或漏极区。 第一栅极电极结构包括第一栅极金属和第一侧壁间隔物。
    • 26. 发明公开
    • 비휘발성 메모리 장치 및 그 제조 방법
    • 非易失性存储器件及其制造方法
    • KR1020140022205A
    • 2014-02-24
    • KR1020120088485
    • 2012-08-13
    • 에스케이하이닉스 주식회사
    • 이인혜
    • H01L27/115H01L21/8247
    • H01L27/11582H01L21/28H01L21/768H01L21/76879H01L29/423H01L29/66666H01L29/7926H01L21/28282H01L21/76838
    • The present invention relates to a non-volatile memory device and a manufacturing method thereof. The non-volatile memory device comprises a channel layer, a structure, a memory film, a source line, a plurality of source contact plugs, and a well pickup contact plug. The channel layer vertically protrudes from a substrate having a well area. A plurality of interlayer insulation films and a plurality of gate electrodes are alternatively laminated on the structure according to the channel layer. The memory film is interposed between the channel layer and a gate electrode. The source line is formed on the substrate. The plurality of source contact plugs is located among the structures and is connected to the source line. The well pickup contact plug is located among the structures and is connected to the well area. The present invention is provided to form the plurality of source contact plugs and the well pickup contact plug, thereby reducing source and well pickup contact resistance.
    • 本发明涉及一种非易失性存储器件及其制造方法。 非易失性存储器件包括沟道层,结构,存储膜,源极线,多个源极接触插塞和阱拾取接触插塞。 沟道层从具有阱区的衬底垂直地突出。 根据通道层,在多个层间绝缘膜和多个栅电极交替层叠在结构上。 记忆膜介于沟道层和栅电极之间。 源极线形成在衬底上。 多个源接触插头位于结构之间并连接到源极线。 井拾取接触插头位于结构之间,并连接到井区。 提供本发明以形成多个源极接触插塞和阱拾取器接触插塞,从而减少源极和阱拾取器接触电阻。
    • 27. 发明授权
    • 전력 반도체 소자
    • 功率半导体器件
    • KR101366228B1
    • 2014-02-24
    • KR1020130007537
    • 2013-01-23
    • 주식회사 케이이씨
    • 황금
    • H01L29/78H01L21/336
    • H01L29/4232H01L29/423H01L29/42344H01L29/42356
    • The present invention relates to a power semiconductor device. The present invention includes a second gate area which connects first gate areas; a third gate area connected to a gate electrode; and one or more first gate connection units connecting the first gate area and the third gate area. The total area of the first gate connection unit is smaller than the second gate area and the third gate area. According to the present invention, a structure having bigger resistance value than the gate area is formed in the gate area so that a voltage change inclination between a gate and a source is gradual, and the voltage change inclination between the gate on the output side and source can be gradual.
    • 功率半导体器件技术领域本发明涉及功率半导体器件。 本发明包括连接第一栅极区域的第二栅极区域; 连接到栅电极的第三栅极区域; 以及连接第一栅极区域和第三栅极区域的一个或多个第一栅极连接单元。 第一栅极连接单元的总面积小于第二栅极区域和第三栅极区域。 根据本发明,在栅极区域中形成具有比栅极区域更大的电阻值的结构,使得栅极和源极之间的电压变化倾斜是逐渐的,并且输出侧的栅极和 来源可以是渐进的。
    • 29. 发明公开
    • 반도체 장치
    • 半导体器件
    • KR1020130071687A
    • 2013-07-01
    • KR1020110139047
    • 2011-12-21
    • 에스케이하이닉스 주식회사
    • 구민규
    • H01L27/085H01L29/78H01L21/28
    • H01L27/088H01L27/0207H01L29/423H01L29/4232H01L29/42344H01L29/7802
    • PURPOSE: A semiconductor device is provided to improve electrical properties by forming a contact plug on a bent end of a source or a drain to increase a distance between a gate and the contact plug. CONSTITUTION: A first transistor group includes a first gate (105), a first source (107S), and a first drain (107D). A second transistor group includes a second gate (105'), a second source (107S'), and a second drain (107D'). The first source and the first drain have a shape bent in the opposite direction from the second source and the second drain. The bent part of the first drain is extended between the bent parts of the second gate and the second source. Contact plugs (111D, 111D', 111S, 111S') are formed on end parts of the first and the second drain and the end parts of the first and the second source.
    • 目的:提供半导体器件以通过在源极或漏极的弯曲端上形成接触塞以增加栅极和接触插塞之间的距离来改善电性能。 构成:第一晶体管组包括第一栅极(105),第一源极(107S)和第一漏极(107D)。 第二晶体管组包括第二栅极(105'),第二源极(107S')和第二漏极(107D')。 第一源极和第一漏极具有与第二源极和第二漏极相反的方向弯曲的形状。 第一排水口的弯曲部分在第二浇口的弯曲部分和第二源之间延伸。 接触塞(111D,111D',111S,111S')形成在第一和第二漏极的端部以及第一和第二源的端部。