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12. 发明公开

KR1020060126286A 웨이퍼 캐리어 无效
标题翻译：散热器
公开(公告)号：KR1020060126286A
公开(公告)日：2006-12-07
申请号：KR1020050048057
申请日：2005-06-04
申请人： 삼성전자주식회사
发明人： 박경식
IPC分类号： H01L21/68
CPC分类号： H01L21/67316
摘要： A wafer carrier is provided to prevent cracking of edges of a wafer by reducing an impact generated when the wafer is inserted between slots using the slots or a sidewall made of a buffer member. A frame(200) forms a space to receive a wafer. A top and a bottom of the frame are opened. Plural slots(210) are projected in both sidewalls(230) of the frame at certain intervals to mount the wafer therebetween. A pair of supports(220) are formed on a lower portion of the frame to be extended from the frame The pair of supports support a wafer carrier(100) on a plane surface. The slot is made of a buffer member. The buffer member is selected form a group consisting of cork, rubber, and synthesis. The inside of the sidewall of the frame is made of a buffer member.
摘要翻译：提供晶片载体以通过减少使用槽或由缓冲构件制成的侧壁将晶片插入槽之间产生的冲击来防止晶片边缘的破裂。框架（200）形成用于接收晶片的空间。打开框架的顶部和底部。以一定间隔将多个槽（210）突出在框架的两个侧壁（230）中以将晶片安装在其间。一对支撑件（220）形成在框架的下部以从框架延伸。该对支撑件在平面上支撑晶片载体（100）。槽由缓冲构件制成。缓冲构件选自软木，橡胶和合成的组。框架的侧壁的内部由缓冲构件制成。

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