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11. 发明公开

KR1020140015211A 가변성 미세패턴을 구비한 미세구조체 제조방법 有权
标题翻译：具有可变微尺寸的精细结构的制造方法
公开(公告)号：KR1020140015211A
公开(公告)日：2014-02-06
申请号：KR1020130089033
申请日：2013-07-26
申请人： 서울대학교산학협력단
发明人： 권성훈 , 이호원 , 박태준 , 정유신
IPC分类号： B81C1/00 , G01N33/48 , G06K7/10
CPC分类号： B81C1/00119 , B81B2201/0214 , B81B2201/05 , B81C1/00349 , G01N33/48 , G06K7/10
摘要： Provided is a fabrication method for fine structures with variable micropatterns including: a step of forming a mixture containing photochromic materials and curable materials; a step of providing the mixture for a microfluidic tube; a step of forming variable micropatterns by applying patterned energy to a desired spot of the mixture and hardening the mixture; and a step of forming fine structures by injecting curable materials and applying additional energy to the microfluidic tube. [Reference numerals] (AA) Start; (BB) End; (S1) Forming a mixture containing photochromic materials and curable materials; (S2) Providing the mixture for a microfluidic tube; (S3) Forming variable micropatterns by applying patterned energy to a desired spot of the mixture and hardening the mixture; (S4) Forming fine structures by injecting curable materials and applying additional energy to the microfluidic tube
摘要翻译：提供了一种具有可变微图案的精细结构的制造方法，包括：形成含有光致变色材料和可固化材料的混合物的步骤; 提供微流体管的混合物的步骤; 通过将图案化的能量施加到混合物的所需点并硬化混合物来形成可变微图案的步骤; 以及通过注射可固化材料并向微流体管施加附加能量来形成精细结构的步骤。（附图标记）（AA）开始; （BB）结束; （S1）形成含有光致变色材料和可固化材料的混合物; （S2）提供微流体管的混合物; （S3）通过将图案化的能量施加到混合物的所需点并硬化混合物来形成可变微图案; （S4）通过注射可固化材料并向微流体管施加额外的能量来形成精细结构

12. 发明公开

KR1020130090706A 미세장치 매립형 온도센서 및 그 제조방법 有权
标题翻译：用于微型器件的可植入温度传感器及其制造方法
公开(公告)号：KR1020130090706A
公开(公告)日：2013-08-14
申请号：KR1020120012036
申请日：2012-02-06
申请人： 한국과학기술원
发明人： 권세진 , 박현철 , 정은상 , 문용준 , 김용대
IPC分类号： G01K7/12 , G01K7/13 , G01K1/20 , B81C1/00
CPC分类号： G01K7/13 , B81C1/00349 , G01K1/20 , H01L21/0226
摘要： PURPOSE: A temperature sensor buried in a minute device and a manufacturing method thereof are provided to directly install a thermocouple and temperature compensating circuit, which are formed with silicide material and non-precious metal, at a region for measuring a temperature gradient without interruption to a local space or a flow field, thereby measuring a wide temperature range. CONSTITUTION: A temperature sensor buried in a minute device includes a first thermocouple (20), a second thermocouple (30), a high temperature part (40), a low temperature part (50), and a temperature compensating part (60). The mutually separated thermocouples are formed with different materials, and are respectively and longitudinally placed. The high temperature part is in contact with one ends of the thermocouples. The low temperature part is placed at the other end of the first thermocouple. The temperature compensating part is placed between the other ends of the thermocouples.
摘要翻译：目的：埋在微型装置中的温度传感器及其制造方法，用于在不中断温度梯度的区域直接安装由硅化物材料和非贵金属形成的热电偶和温度补偿电路局部空间或流场，从而测量宽的温度范围。构成：埋在微型装置中的温度传感器包括第一热电偶（20），第二热电偶（30），高温部分（40），低温部分（50）和温度补偿部分（60）。相互分离的热电偶由不同的材料形成，分别且纵向放置。高温部分与热电偶的一端接触。低温部分放置在第一热电偶的另一端。温度补偿部件位于热电偶的另一端之间。

13. 发明公开

KR1020130079799A 3차원 미세유체집속채널구조를 이용하는 균일한 미세 액적 및 단분산성 입자의 제조 방법 有权
标题翻译：使用具有三维地形图的微流量聚焦装置的均匀分散滴定剂和聚合单体颗粒的制备方法
公开(公告)号：KR1020130079799A
公开(公告)日：2013-07-11
申请号：KR1020120000511
申请日：2012-01-03
申请人： 한국과학기술원
发明人： 양승만 , 정웅찬 , 최재훈
IPC分类号： B81B1/00 , B81C1/00 , B82B3/00 , B82Y40/00
CPC分类号： B81B1/006 , B81C1/00349 , B82B3/0004 , B82Y40/00
摘要： PURPOSE: A method for stably manufacturing uniform nanometer-sized droplets and mono-dispersed particles using a three-dimensional microfluidic flow-focusing channel structure is provided to uniformly maintain the droplets and to freely control the size and the composition of the droplet. CONSTITUTION: A three-dimensional microfluidic flow-focusing channel structure has a water dispersed phase channel comprising an inlet and a guide tube. The channel is connected to an orifice. An oil continuous phase channel comprises an inlet and guide tubes at both sides of the inlet, and is connected to the orifice. A water-oil emulsion is generated in the orifice, passes through a downstream channel, and is discharged through an outlet. The heights of the water dispersed phase channel and the orifice are relatively below the heights of the oil continuous phase channel and the downstream channel. [Reference numerals] (AA) Continuous (oil) phase inlet; (BB) Dispersed (wool) phase inlet; (CC) Outlet; (DD) Countercurrent flow; (EE) Top view; (FF,LL) Continuous phase channel; (GG,NN) Downstream channel; (HH,KK) Dispersed phase channel; (II,MM) Orifice; (JJ) Side view
摘要翻译：目的：提供使用三维微流体聚焦通道结构稳定地制造均匀的纳米级液滴和单分散颗粒的方法，以均匀地保持液滴并自由地控制液滴的尺寸和组成。构成：三维微流体聚焦通道结构具有包括入口和导管的水分散相通道。通道连接到孔口。油连续相通道包括入口两侧的入口和导管，并连接到孔口。在孔中产生水油乳液，通过下游通道，并通过出口排出。水分散相通道和孔口的高度相对低于油连续相通道和下游通道的高度。（附图标记）（AA）连续（油）相入口; （BB）分散（羊毛）相入口; （CC）出口; （DD）逆流; （EE）顶视图; （FF，LL）连续相位通道; （GG，NN）下行通道; （HH，KK）分散相通道; （II，MM）孔; （JJ）侧视图

14. 发明公开

KR1020100038271A 다결정 3Ｃ-ＳｉＣ를 이용한 공진기 및 그 제작 방법 无效
标题翻译：微晶谐振器使用多晶3C-SIC及其制造方法
公开(公告)号：KR1020100038271A
公开(公告)日：2010-04-14
申请号：KR1020090028077
申请日：2009-04-01
申请人： 울산대학교 산학협력단
发明人： 정귀상
IPC分类号： B81C1/00 , B81B3/00 , H01J37/28
CPC分类号： B81C1/0015 , B81B3/0021 , B81B2203/0118 , B81C1/00349 , B81C1/00436 , B81C2201/013
摘要： PURPOSE: A resonator using polycrystalline 3 Cubic-Silicon Carbide and a manufacturing method thereof are provided to use the resonator as a wireless telecommunication component, a biosensor, and a chemical sensor. CONSTITUTION: A manufacturing method of a resonator using polycrystalline 3C-SiC is as follows. An oxide film(120) is formed on a substrate(110). A part of the oxide film located in the bottom of the resonator is etched. An air gap is formed by etching a part of the substrate. A 3C-SiC thin film is formed using a chemical vapor deposition method. Hexamethyldisilane is used as a precursor of the 3C-SiC thin film.
摘要翻译：目的：提供使用多晶3立方碳化硅的谐振器及其制造方法，以使用谐振器作为无线电信部件，生物传感器和化学传感器。构成：使用多晶3C-SiC的谐振器的制造方法如下。氧化膜（120）形成在基板（110）上。蚀刻位于谐振器底部的氧化膜的一部分。通过蚀刻基板的一部分形成气隙。使用化学气相沉积法形成3C-SiC薄膜。六甲基二硅烷用作3C-SiC薄膜的前体。

15. 发明公开

KR1020050017716A 마이크로 미러 제조방법 失效
标题翻译：用于通过填充柱形轴来改善镜子的整体反射度的微型镜的方法
公开(公告)号：KR1020050017716A
公开(公告)日：2005-02-23
申请号：KR1020030054834
申请日：2003-08-08
申请人： 동부일렉트로닉스 주식회사
发明人： 박건욱
IPC分类号： B81C1/00
CPC分类号： B81C1/00095 , B81C1/00063 , B81C1/00349 , B81C1/00436 , B81C2201/01
摘要： PURPOSE: A method for fabricating a micro-mirror is provided to improve an entire reflection degree of a mirror by filling a pillar shaft hole formed in a surface of the mirror. CONSTITUTION: A structure is formed on a substrate. A micro-mirror(36) is formed at an upper portion of a driving part installed on the substrate. A method for fabricating the micro-mirror(36) includes a step of forming a coupling joint. Polymer is formed on an upper portion of the coupling joint and is patterned. An inner portion of the polymer is filled with a predetermined material. The micro-mirror(36) is formed on the substrate through a photography process and an etch back process. The polymer is removed by using solvent. The micro-mirror(36) is preferably formed by depositing aluminum, titanium, and nitride titanium on the substrate.
摘要翻译：目的：提供一种制造微镜的方法，通过填充形成在反射镜表面中的柱轴孔来提高反射镜的整体反射度。构成：在基板上形成结构。微镜（36）形成在安装在基板上的驱动部件的上部。一种制造微反射镜（36）的方法包括形成耦合接头的步骤。聚合物形成在耦合接头的上部并被图案化。聚合物的内部填充有预定的材料。微镜（36）通过摄影过程和回蚀工艺在衬底上形成。通过使用溶剂除去聚合物。微反射镜（36）优选通过在基板上沉积铝，钛和氮化钛而形成。

16. 发明公开

KR1020030083930A 변위 증폭이 가능한 열 마이크로 구동기 및 그의 제조방법 失效
标题翻译：具有放大位移的热敏致动器及其制造方法
公开(公告)号：KR1020030083930A
公开(公告)日：2003-11-01
申请号：KR1020020022332
申请日：2002-04-23
申请人： 전자부품연구원
发明人： 김건년 , 박광범 , 박준식 , 이경일 , 박효덕
IPC分类号： B81B7/00
CPC分类号： B81B7/02 , B81B2201/03 , B81B2201/031 , B81B2203/0136 , B81C1/00015 , B81C1/00349 , B81C1/00388 , B81C1/00555
摘要： PURPOSE: A thermal micro actuator and a method for fabricating the same are provided to amplify displacement of the thermal micro actuator by installing an arch bar at end portions of two arch bars. CONSTITUTION: A thermal micro actuator includes a substrate(50). A first electrode(51), a ground electrode(52) and a second electrode(53) are fixed to the substrate(50) in such a manner that they are parallel spaced by a predetermined distance. A first arch bar(54) extends from the first electrode(51) and the ground electrode(52). A second arch bar(55) extends from the second electrode(53) and the ground electrode(52). A third arch bar(56) extends from end portions of the first and second arch bars(54,55). A front section(58) extends from a center(57) of the third arch bar(56).
摘要翻译：目的：提供一种热微致动器及其制造方法，用于通过在两个拱杆的端部安装拱杆来放大热微致动器的位移。构成：热微致动器包括衬底（50）。第一电极（51），接地电极（52）和第二电极（53）以平行间隔预定距离的方式固定到基板（50）。第一拱杆（54）从第一电极（51）和接地电极（52）延伸。第二拱杆（55）从第二电极（53）和接地电极（52）延伸。第三拱杆（56）从第一和第二拱杆（54,55）的端部延伸。前部（58）从第三拱杆（56）的中心（57）延伸。

17. 发明公开

KR1020020039523A 감광성유리의 가공방법 失效
标题翻译：感光玻璃加工方法
公开(公告)号：KR1020020039523A
公开(公告)日：2002-05-27
申请号：KR1020000069383
申请日：2000-11-21
申请人： 조수제
发明人： 조수제
IPC分类号： B81C1/00
CPC分类号： B81C1/00198 , B81C1/00349 , B81C1/00436 , B81C1/00841 , B81C2201/0101
摘要： PURPOSE: A photosensitive glass processing method is provided to obtain a high precision fine structure by crystallizing the portion which is not exposed to an ultraviolet light and selectively etching the crystallized portion. CONSTITUTION: A photosensitive glass processing method comprises a first step of selectively radiating an ultraviolet light(9) generated from a light source to a photosensitive glass(8); a second step of crystallizing a portion(11) which is not exposed to the ultraviolet light by performing a heat treatment to the portion; and a third step of obtaining a fine structure(14) by selectively removing the crystallized portion through an etching process(13) by dipping the resultant structure into a hydrogen fluoride(HF) solution.
摘要翻译：目的：提供一种感光玻璃加工方法，通过使不暴露于紫外光的部分结晶并选择性地蚀刻结晶部分来获得高精度的精细结构。构成：感光玻璃处理方法包括：将从光源产生的紫外光（9）选择性地辐射到感光玻璃（8）的第一步骤; 第二步骤，通过对所述部分进行热处理来结晶未暴露于紫外光的部分（11）; 以及通过将所得结构浸入氟化氢（HF）溶液中，通过蚀刻工艺（13）选择性地除去结晶部分来获得精细结构（14）的第三步骤。

18. 发明公开

KR1020170114116A 나노 크기의 구조물이 표면에 형성된 마이크로 크기의 구조물 제작 방법 审中-实审
标题翻译：如何制作表面具有纳米尺寸结构的微型结构
公开(公告)号：KR1020170114116A
公开(公告)日：2017-10-13
申请号：KR1020160041197
申请日：2016-04-04
申请人： 강원대학교산학협력단
发明人： 김병희 , 서영호 , 박용민 , 한의돈
IPC分类号： B81C1/00
CPC分类号： B81C1/00349 , B81C1/00031 , B81C1/00388 , B81C1/00436
摘要： 나노크기의구조물이표면에형성된마이크로크기의구조물을간편하고저렴하게제작하는방법이개시된다. 전술한과제를달성하기위한본 발명의일 양상에따른나노크기의구조물이표면에형성된마이크로크기의구조물제작방법은마이크로크기로이루어진소정형상의개방부를갖는절연층을금속표면에형성하는단계, 금속을전해액에담그고전류밀도의프로파일을제어하면서전원을공급하여, 금속이양극산화되게하는단계, 화학적으로식각하여산화되지않은금속부분을제거하는단계를포함한다.
摘要翻译：公开了一种以简单且廉价的方式制造在其表面上形成有纳米尺寸结构的微尺寸结构的方法。根据本发明的一个方面，提供了一种制造在其表面上具有纳米尺寸结构的微尺寸结构的方法，所述方法包括：形成具有微结构的绝缘层，将金属浸入电解溶液中并供电，同时控制电流密度分布以使金属变成阳极氧化物;以及化学蚀刻去除未氧化的金属部分。

19. 发明公开

KR1020150026805A 진동 소자 및 그 제조 방법 审中-实审
标题翻译：振动装置及其制造方法
公开(公告)号：KR1020150026805A
公开(公告)日：2015-03-11
申请号：KR1020140097114
申请日：2014-07-30
申请人： 한국전자통신연구원
发明人： 백인복 , 유한영 , 김약연 , 김용준 , 안창근 , 윤용선 , 이봉국 , 임지은 , 장원익
IPC分类号： H03H9/24 , B81B3/00
CPC分类号： H03H9/24 , B81B3/0035 , B81B2201/0285 , B81C1/00349 , B81C1/00436
摘要： 진동 영역의 양 끝을 감싸는 형상으로 형성된 지지부를 포함하는 진동 소자 및 그 제조 방법이 개시된다.
진동 소자는 상부에 절연층이 형성된 하부 기판; 상기 절연층의 위에 결합되며, 하부 기판과 일정 거리 이상 이격되어 진동하는 진동 영역을 포함하는 상부 기판; 및 상기 진동 영역의 양끝을 감싸는 형태로 형성되어 상기 진동 영역을 지지하는 지지부를 포함할 수 있다.
摘要翻译：公开了一种振动装置及其制造方法，该振动装置包括围绕振动区域的两端的支撑部。振动装置可以包括其上形成有绝缘层的下基板; 与绝缘层组合的上基板，包括与下基板隔开一定距离振动的振动区域; 以及支撑部，其围绕振动区域的两端并且支撑振动区域。

20. 发明公开

KR1020110046536A 전자 또는 전자기계 소자와 나노요소들을 위한 기판 无效
标题翻译：电子或机电元件和纳米元件的基材
公开(公告)号：KR1020110046536A
公开(公告)日：2011-05-04
申请号：KR1020117006141
申请日：2009-08-31
申请人： 꼼미사리아 아 레네르지 아또미끄 에 오 에네르지 알떼르나띠브스
发明人： 구아슬라르드몽사베르토마스 , 드게크리스텔 , 디종장 , 코스트르제와마렉
IPC分类号： H01L21/768 , H01L23/522
CPC分类号： F02D13/02 , B81C1/00349 , B82Y10/00 , H01L21/187 , H01L21/76879 , H01L21/76898 , H01L23/481 , H01L23/53276 , H01L25/0657 , H01L29/0665 , H01L29/0673 , H01L29/0676 , H01L51/001 , H01L51/0045 , H01L2221/1094 , H01L2924/0002 , Y02T10/18 , H01L2924/00
摘要： 적어도 하나의 전자 또는 전자기계 소자(708) 및 하나 이상의 나노-요소들을 지지하기 위한 기판이 제공된다. 기판은 베이스 지지부(301), 촉매 시스템(302), 장벽층(303), 및 단결정 Si 또는 Ge 또는 이들 물질들의 혼합물인 전자 또는 전자기계 소자의 수용 가능층(304)으로 형성된다. 촉매 시스템(302)은 전자 또는 전자기계 소자의 수용 가능층(304)과 접촉되지 않도록 베이스 지지부(301) 상에 놓이고, 장벽층(303)은 촉매 시스템(302)과 전자 또는 전자기계 소자의 수용 가능층(304)의 사이에 개재된다. 장벽층(303)은 베이스 지지부(301)와 접촉되지 않는다.

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