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    • 8. 发明公开
    • 반도체 소자 및 그 제조 방법
    • 半导体器件及其制造方法
    • KR1020120038810A
    • 2012-04-24
    • KR1020100100465
    • 2010-10-14
    • 삼성전자주식회사
    • 한혁이병규홍진기이창원이응준박제헌이정길
    • H01L21/8247H01L27/115
    • H01L29/7827H01L27/11582H01L29/66666H01L29/7926H01L21/823487
    • PURPOSE: A semiconductor device and a manufacturing method thereof are provided to uniformly etch a first conductive film regardless of a level of gap regions, thereby improving reliability of the semiconductor device. CONSTITUTION: An insulating structure which includes insulation patterns(120a,120Ua) laminated by being separated from each other is formed on a substrate. Gap regions(145L,145,145U) between the adjacent insulation patterns are defined. A first conductive film is formed by covering a sidewall of the insulating structure and filling the gap regions. A second conductive film is formed by covering the first conductive film on the sidewall of the insulating structure. The thickness of the second conductive film on the upper sidewall of the insulating structure is greater than the thickness of the second conductive film on the lower sidewall of the insulating structure.
    • 目的:提供半导体器件及其制造方法以均匀地蚀刻第一导电膜,而不管间隙区域的水平如何,从而提高半导体器件的可靠性。 构成:在基板上形成由绝缘层(120a,120ua)彼此分离而形成的绝缘结构。 定义相邻绝缘图案之间的间隙区域(145L,145,145U)。 通过覆盖绝缘结构的侧壁并填充间隙区域形成第一导电膜。 通过覆盖绝缘结构的侧壁上的第一导电膜形成第二导电膜。 绝缘结构的上侧壁上的第二导电膜的厚度大于绝缘结构的下侧壁上的第二导电膜的厚度。