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    • 9. 发明专利
    • VOLTAGE DIVISION RESISTOR AND VOLTAGE DIVISION CIRCUIT
    • JPH11214631A
    • 1999-08-06
    • JP1401298
    • 1998-01-27
    • SHARP KK
    • MORI HARUYA
    • H01L27/04H01L21/822H01L27/08H01L29/8605
    • PROBLEM TO BE SOLVED: To reduce impedance in the high frequency area of an output terminal while the increase of a chip area and the wave of impedance in the high frequency area are avoided by providing at least one capacity electrode which substantially forms capacity elements with a resistance element dividing inputted voltage. SOLUTION: A resistor 2 generated by doping N-type impurity is provided for a semiconductor substrate whose surface is coated with the insulating body 1 of silicon oxide by using a P-type silicon substrate. The resistor 2 is connected to aluminum output electrodes 3 by a hole provided for the insulating body 1. In a dielectric 5 between the output electrodes 3, silicon nitride whose relative dielectric constant is larger than silicon oxide is used and it is made to be thinner than the other part. Then, capacity per area is enlarged. The electrodes are formed on the dielectrics 5 with aluminum and capacity electrodes 4 are obtained. The capacity electrodes 4 are connected to ground potential an aluminum wiring. A space for arranging the capacity elements by a resistance element where a plurality of capacity elements are formed is secured on the resistance element and the increase of chip cost can be suppressed.